[Scan]
initial_time=2016-01-18T19:19:25
final_time=2016-01-18T19:19:45
ip_count=19
run=1024
dataset=5
scan=336
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08855E-4
ql1_vset=
ql1_vmon=-8.81696E-1
ql1_imon=1.34454E-8
ql2_vset=
ql2_vmon=-8.96764E-1
ql2_imon=1.93461E-9
ql3_vset=
ql3_vmon=-9.0466E0
ql3_imon=5.77223E-10
ql4_vset=
ql4_vmon=-9.04205E0
ql4_imon=4.87089E-11
mult1=-9.55978E-9
mult2=-2.74855E-9
rf_tmon=-4.84288E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.71578E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=2.01119E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.15353E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=1.10635E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4026E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65185E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03504E1
cs_ea2_imon=1.36843E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.37533E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.24769E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14795E1
os_ea1_imon=2.37926E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63317E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=9.44484E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.97107E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.39458E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-9.74686E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.09203E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=8.69501E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3394E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53389E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00785E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08459E0
os_ef2alow_imon=-2.39966E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.33464E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.45987E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72799E1
iondef1_imon=1.12041E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68755E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.29575E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=8.01821E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-9.40055E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47547E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.90047E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.1557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.94301E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.44018E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08536E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31787E1
cs_fil1_imon=7.28098E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.99597E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69496E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.15265E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20466E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.33464E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.81696E-1	-8.9705E-1	-9.04663E0	-9.04212E0	4.45843E-3	9.4986E-2	2.73134E1	-3.26166E1	-3.26537E1	2.6822E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9978E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.81529E-1	-8.96978E-1	-9.04679E0	-9.04205E0	4.24385E-3	9.49144E-2	2.72935E1	-3.2664E1	-3.25789E1	2.68532E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.81863E-1	-8.97193E-1	-9.0466E0	-9.04148E0	4.24385E-3	9.5129E-2	2.73277E1	-3.26457E1	-3.26266E1	2.68499E1	1.19819E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.0041E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.81863E-1	-8.97241E-1	-9.04677E0	-9.04162E0	4.673E-3	9.5129E-2	2.73688E1	-3.26538E1	-3.26283E1	2.68337E1	1.1979E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.81958E-1	-8.97026E-1	-9.0466E0	-9.04186E0	4.57764E-3	9.47714E-2	2.73145E1	-3.26503E1	-3.26117E1	2.6835E1	1.20042E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.81982E-1	-8.97026E-1	-9.04677E0	-9.04176E0	4.74453E-3	9.46522E-2	2.72945E1	-3.26531E1	-3.25883E1	2.6822E1	1.201E-7	2.51384E-3	2.51384E-3	6.34737E-3	3.01337E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.8191E-1	-8.9736E-1	-9.04682E0	-9.04193E0	4.3869E-3	9.47714E-2	2.7361E1	-3.26164E1	-3.2623E1	2.68262E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.81886E-1	-8.9736E-1	-9.04677E0	-9.04179E0	4.64916E-3	9.51052E-2	2.73192E1	-3.26603E1	-3.26499E1	2.6843E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.82006E-1	-8.97002E-1	-9.04686E0	-9.04207E0	4.52995E-3	9.50098E-2	2.73611E1	-3.26555E1	-3.26231E1	2.68142E1	1.19766E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.01742E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.81934E-1	-8.97121E-1	-9.04651E0	-9.04202E0	4.31538E-3	9.46999E-2	2.73614E1	-3.26738E1	-3.26548E1	2.68496E1	1.19902E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00197E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.82077E-1	-8.97264E-1	-9.04667E0	-9.04193E0	4.50611E-3	9.47475E-2	2.73225E1	-3.26705E1	-3.2644E1	2.68088E1	1.19861E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.81958E-1	-8.96978E-1	-9.04672E0	-9.0421E0	4.52995E-3	9.51052E-2	2.73592E1	-3.26543E1	-3.265E1	2.68412E1	1.20191E-7	2.5225E-3	2.5225E-3	6.28511E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.81934E-1	-8.97026E-1	-9.04691E0	-9.04195E0	4.60148E-3	9.50336E-2	2.72715E1	-3.27025E1	-3.26092E1	2.68482E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.81886E-1	-8.96811E-1	-9.04651E0	-9.04214E0	4.29153E-3	9.50813E-2	2.73387E1	-3.26374E1	-3.26056E1	2.68154E1	1.19991E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.00348E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.81815E-1	-8.96859E-1	-9.0467E0	-9.04198E0	4.52995E-3	9.48906E-2	2.73267E1	-3.26687E1	-3.25978E1	2.68376E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.81672E-1	-8.97098E-1	-9.0467E0	-9.04195E0	4.62532E-3	9.49383E-2	2.73198E1	-3.26189E1	-3.26537E1	2.68298E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02133E-1
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.81577E-1	-8.96859E-1	-9.04667E0	-9.04181E0	4.48227E-3	9.50098E-2	2.73357E1	-3.26693E1	-3.26104E1	2.68328E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.816E-1	-8.96955E-1	-9.04667E0	-9.042E0	4.45843E-3	9.51767E-2	2.73257E1	-3.26933E1	-3.26514E1	2.68406E1	1.20069E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.03976E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.8191E-1	-8.96978E-1	-9.04655E0	-9.042E0	4.17233E-3	9.46999E-2	2.73104E1	-3.26703E1	-3.26083E1	2.68112E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.81696E-1	-8.96764E-1	-9.0466E0	-9.04205E0	4.41074E-3	9.49144E-2	2.72799E1	-3.26536E1	-3.26518E1	2.68755E1	1.20466E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
