[Scan]
initial_time=2016-01-18T19:20:18
final_time=2016-01-18T19:20:38
ip_count=19
run=1024
dataset=5
scan=338
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.81386E-1
ql1_imon=1.35346E-8
ql2_vset=
ql2_vmon=-8.97002E-1
ql2_imon=1.89685E-9
ql3_vset=
ql3_vmon=-9.04648E0
ql3_imon=4.69947E-10
ql4_vset=
ql4_vmon=-9.04193E0
ql4_imon=3.35813E-11
mult1=-9.36932E-9
mult2=-2.67034E-9
rf_tmon=-5.72467E-3
rf_agc=3.24125E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.70341E-9
bslens_vset=-6.2E0
bslens_vmon=-6.71661E0
bslens_imon=2.77928E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19592E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=3.16326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05186E1
cs_ea1_imon=1.11103E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35934E0
lens1_imon=2.426E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03258E1
cs_ea2_imon=1.35184E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.37722E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=2.37745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=9.32948E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.40704E-8
tplens_vset=1.4E-1
tplens_vmon=1.69851E0
tplens_imon=1.94533E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26225E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26219E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.10174E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=8.68059E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.15755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53929E0
os_ea2_imon=-4.61569E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.36002E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36467E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.45122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.27297E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.08639E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73322E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.26534E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=8.03135E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16078E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=2.49778E-1
window_imon=-6.84173E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82692E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=6.81683E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.12108E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50166E3
multb_neg_imon=7.78296E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.10682E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.43676E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07527E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66918E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31791E1
cs_fil1_imon=7.10078E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0026E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69669E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79597E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=9.10323E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-1.9692E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.97134E-1
res40_imon=-2.32758E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.81839E-1	-8.97384E-1	-9.04703E0	-9.04195E0	4.57764E-3	9.52721E-2	2.73411E1	-3.26697E1	-3.26254E1	2.68337E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01085E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.81863E-1	-8.97384E-1	-9.04663E0	-9.0415E0	4.69685E-3	9.51052E-2	2.73045E1	-3.26762E1	-3.25991E1	2.683E1	1.20311E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.81791E-1	-8.9767E-1	-9.04706E0	-9.04195E0	4.52995E-3	9.51052E-2	2.7326E1	-3.26619E1	-3.26625E1	2.68319E1	1.19766E-7	2.5225E-3	2.5225E-3	6.30182E-3	2.96973E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.82006E-1	-8.97527E-1	-9.04684E0	-9.04202E0	4.45843E-3	9.53197E-2	2.73291E1	-3.26603E1	-3.26008E1	2.68298E1	1.1964E-7	2.51287E-3	2.51287E-3	6.3074E-3	2.96598E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.81958E-1	-8.97384E-1	-9.04679E0	-9.0421E0	4.3869E-3	9.49383E-2	2.73544E1	-3.2635E1	-3.26242E1	2.68298E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.96929E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.81815E-1	-8.97431E-1	-9.0467E0	-9.04231E0	4.55379E-3	9.50813E-2	2.73213E1	-3.26494E1	-3.2617E1	2.68286E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.96414E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.81243E-1	-8.96955E-1	-9.04675E0	-9.04241E0	4.60148E-3	9.51529E-2	2.73129E1	-3.26663E1	-3.25725E1	2.68502E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.81481E-1	-8.9705E-1	-9.04672E0	-9.042E0	4.52995E-3	9.52244E-2	2.73015E1	-3.26639E1	-3.26152E1	2.68436E1	1.19705E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.81648E-1	-8.96668E-1	-9.04686E0	-9.04191E0	4.33922E-3	9.50813E-2	2.73117E1	-3.26368E1	-3.25773E1	2.68454E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.81314E-1	-8.96978E-1	-9.04665E0	-9.04191E0	4.1008E-3	9.50575E-2	2.73193E1	-3.26697E1	-3.2593E1	2.6818E1	1.19809E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.81767E-1	-8.96907E-1	-9.0467E0	-9.042E0	4.07696E-3	9.48191E-2	2.73291E1	-3.26518E1	-3.26152E1	2.6849E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.81386E-1	-8.96955E-1	-9.04658E0	-9.04162E0	3.83854E-3	9.51052E-2	2.73339E1	-3.26699E1	-3.2611E1	2.6813E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.81553E-1	-8.97002E-1	-9.04663E0	-9.04157E0	4.26769E-3	9.52005E-2	2.73538E1	-3.26771E1	-3.26356E1	2.68106E1	1.19819E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.0041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.81147E-1	-8.96907E-1	-9.04648E0	-9.04219E0	4.24385E-3	9.49621E-2	2.73328E1	-3.26632E1	-3.26231E1	2.684E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99941E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.81481E-1	-8.9705E-1	-9.04639E0	-9.04202E0	4.33922E-3	9.47952E-2	2.72835E1	-3.26945E1	-3.26164E1	2.68124E1	1.19705E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.81433E-1	-8.96811E-1	-9.0467E0	-9.04219E0	4.55379E-3	9.50098E-2	2.73273E1	-3.26849E1	-3.26194E1	2.68442E1	1.2033E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.81457E-1	-8.96859E-1	-9.04627E0	-9.04224E0	4.76837E-3	9.48668E-2	2.73243E1	-3.26326E1	-3.26326E1	2.68388E1	1.20226E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.81624E-1	-8.96978E-1	-9.04634E0	-9.04179E0	4.45843E-3	9.53197E-2	2.73605E1	-3.26478E1	-3.26431E1	2.68354E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.81386E-1	-8.97002E-1	-9.04608E0	-9.04193E0	4.57764E-3	9.51052E-2	2.73189E1	-3.26506E1	-3.2593E1	2.681E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.81386E-1	-8.97002E-1	-9.04648E0	-9.04193E0	4.55379E-3	9.50098E-2	2.73322E1	-3.26219E1	-3.26225E1	2.68328E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01223E-1
