[Scan]
initial_time=2016-01-18T19:22:05
final_time=2016-01-18T19:22:25
ip_count=19
run=1024
dataset=5
scan=342
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08852E-4
ql1_vset=
ql1_vmon=-8.81386E-1
ql1_imon=1.34653E-8
ql2_vset=
ql2_vmon=-8.96811E-1
ql2_imon=1.95298E-9
ql3_vset=
ql3_vmon=-9.04648E0
ql3_imon=3.89171E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=1.719E-11
mult1=-9.47527E-9
mult2=-2.79311E-9
rf_tmon=-4.61955E-3
rf_agc=3.34447E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.70268E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68568E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.16462E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=1.09529E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36371E0
lens1_imon=2.8795E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64643E1
os_ef1alow_imon=2.98391E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03472E1
cs_ea2_imon=1.38517E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=3.05272E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.37739E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11511E1
os_restr1_imon=4.26002E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14816E1
os_ea1_imon=2.33479E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26979E0
cs_ionrep_imon=9.24336E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91984E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=1.96636E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.39821E-8
tplens_vset=1.4E-1
tplens_vmon=1.66385E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26823E1
iondef2_imon=1.57099E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.98201E-4
ql6_vset=1.0E-1
ql6_vmon=9.53913E-2
ql6_imon=4.09365E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29752E0
ionrepsh_imon=8.36559E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.16702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74542E1
cs_ef2b_imon=3.13439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58126E0
os_ea2_imon=-8.7935E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00729E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.17088E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0841E0
os_ef2alow_imon=-2.37302E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27929E-1
os_ef2bup_imon=-5.16712E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11193E1
os_restr2_imon=3.45481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.09633E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73382E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68352E1
iondef4_imon=1.09928E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.22877E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=8.01255E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-9.82917E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47497E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.93458E-6
window_vset=0.0E0
window_vmon=2.53018E-1
window_imon=-7.46599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-5.45035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.68956E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.94274E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50162E3
multb_neg_imon=6.98876E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.23486E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33248E1
os_fil1_imon=9.43214E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0803E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66673E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=6.60395E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0085E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69684E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88906E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05716E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.29273E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26364E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22783E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2987E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.81624E-1	-8.96716E-1	-9.04639E0	-9.04186E0	4.36306E-3	9.49144E-2	2.72915E1	-3.26573E1	-3.26708E1	2.68238E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01738E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.81529E-1	-8.96788E-1	-9.04636E0	-9.04212E0	4.26769E-3	9.49383E-2	2.73051E1	-3.26243E1	-3.26186E1	2.68222E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.81386E-1	-8.97145E-1	-9.04629E0	-9.04169E0	4.3869E-3	9.49621E-2	2.73115E1	-3.26553E1	-3.26101E1	2.68169E1	1.20127E-7	2.52093E-3	2.52093E-3	6.3074E-3	3.01237E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.81457E-1	-8.96835E-1	-9.04632E0	-9.04226E0	4.31538E-3	9.52005E-2	2.72997E1	-3.26416E1	-3.25791E1	2.6835E1	1.20045E-7	2.52977E-3	2.52977E-3	6.3074E-3	2.99981E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.81648E-1	-8.97121E-1	-9.04641E0	-9.04207E0	4.76837E-3	9.5129E-2	2.7337E1	-3.26703E1	-3.2616E1	2.68285E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.81648E-1	-8.96955E-1	-9.04641E0	-9.04167E0	4.55379E-3	9.52244E-2	2.73089E1	-3.26758E1	-3.26154E1	2.68342E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.8172E-1	-8.96978E-1	-9.0462E0	-9.042E0	4.29153E-3	9.5129E-2	2.73246E1	-3.2662E1	-3.26307E1	2.68394E1	1.20129E-7	2.51515E-3	2.51515E-3	6.31761E-3	3.00716E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.81505E-1	-8.97121E-1	-9.04613E0	-9.04214E0	4.3869E-3	9.48906E-2	2.73299E1	-3.26124E1	-3.26154E1	2.68482E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.81624E-1	-8.97002E-1	-9.04629E0	-9.04191E0	3.95775E-3	9.51052E-2	2.73571E1	-3.26395E1	-3.26327E1	2.68094E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.8172E-1	-8.97264E-1	-9.0466E0	-9.04179E0	4.26769E-3	9.47952E-2	2.73171E1	-3.26681E1	-3.26428E1	2.68328E1	1.20137E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.00144E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.81791E-1	-8.97193E-1	-9.04641E0	-9.04174E0	4.43459E-3	9.49383E-2	2.73315E1	-3.26152E1	-3.26278E1	2.68286E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.81791E-1	-8.97479E-1	-9.04627E0	-9.04191E0	4.52995E-3	9.5129E-2	2.73424E1	-3.26482E1	-3.26506E1	2.68707E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.81839E-1	-8.9736E-1	-9.04636E0	-9.04191E0	4.62532E-3	9.48668E-2	2.73207E1	-3.26813E1	-3.26158E1	2.68376E1	1.19766E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.00942E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.816E-1	-8.96883E-1	-9.04665E0	-9.04183E0	4.60148E-3	9.54151E-2	2.73369E1	-3.26705E1	-3.2614E1	2.67962E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.81696E-1	-8.96811E-1	-9.04663E0	-9.04229E0	4.3869E-3	9.5439E-2	2.73387E1	-3.2647E1	-3.26098E1	2.68298E1	1.20084E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.02277E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.81624E-1	-8.9705E-1	-9.04658E0	-9.04219E0	4.3869E-3	9.5439E-2	2.72769E1	-3.26705E1	-3.26278E1	2.6825E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.03185E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.81553E-1	-8.96883E-1	-9.04639E0	-9.042E0	4.45843E-3	9.52005E-2	2.73222E1	-3.26661E1	-3.26178E1	2.68325E1	1.20055E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.81696E-1	-8.97217E-1	-9.04646E0	-9.04214E0	4.19617E-3	9.53674E-2	2.73081E1	-3.26681E1	-3.26278E1	2.68581E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.97445E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.81553E-1	-8.97098E-1	-9.04651E0	-9.04195E0	4.36306E-3	9.53436E-2	2.733E1	-3.26764E1	-3.26237E1	2.68186E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.81386E-1	-8.96811E-1	-9.04648E0	-9.04176E0	4.60148E-3	9.53913E-2	2.73382E1	-3.26823E1	-3.26242E1	2.68352E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9943E-1
