[Scan]
initial_time=2016-01-18T19:22:58
final_time=2016-01-18T19:23:18
ip_count=19
run=1024
dataset=5
scan=344
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.81577E-1
ql1_imon=1.34602E-8
ql2_vset=
ql2_vmon=-8.96978E-1
ql2_imon=1.91604E-9
ql3_vset=
ql3_vmon=-9.04667E0
ql3_imon=3.76058E-10
ql4_vset=
ql4_vmon=-9.04164E0
ql4_imon=3.49164E-11
mult1=-1.0511E-8
mult2=-2.63278E-9
rf_tmon=-4.04378E-3
rf_agc=3.36881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.71282E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61096E0
bslens_imon=2.37043E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19156E1
lens5a_imon=1.99162E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05298E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54054E1
cs_ef1b_imon=3.16666E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02055E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04535E1
cs_ea1_imon=1.07558E-5
lens1_vset=-5.0E0
lens1_vmon=-5.405E0
lens1_imon=2.90668E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64683E1
os_ef1alow_imon=2.97915E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04094E1
cs_ea2_imon=1.3595E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84288E1
cs_ef1a_imon=3.05288E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.37597E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11654E1
os_restr1_imon=4.27371E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14669E1
os_ea1_imon=2.33431E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64228E1
os_ef1bup_imon=3.08582E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.16884E0
cs_ionrep_imon=9.46294E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93824E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01859E1
cs_anode1_imon=1.96678E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.40029E-8
tplens_vset=1.4E-1
tplens_vmon=1.71244E0
tplens_imon=-4.43068E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.48328E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26422E1
iondef2_imon=1.58723E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03027E2
lens6_imon=2.98368E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.13606E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20496E0
ionrepsh_imon=8.33533E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33639E1
lens5b_imon=2.19363E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74626E1
cs_ef2b_imon=3.13933E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57287E0
os_ea2_imon=-5.38565E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.0038E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71283E1
cs_ef2a_imon=3.16404E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07826E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19464E-1
os_ef2bup_imon=-5.1305E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11329E1
os_restr2_imon=3.45147E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30259E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01753E1
cs_anode2_imon=2.09141E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.11782E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.10487E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.21901E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=8.01801E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11143E0
cs_ionaccel_imon=-9.23837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47436E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56424E1
einzel_imon=7.69532E-6
window_vset=0.0E0
window_vmon=2.60636E-1
window_imon=-6.65599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82694E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86843E1
mask2_imon=-5.9449E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.89458E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.62373E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50092E3
multb_neg_imon=7.18937E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56289E0
defgridb_imon=6.20134E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33228E1
os_fil1_imon=9.4194E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66768E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=7.36761E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.78158E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69667E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7125E-2
os_fil2_imon=-2.5128E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.21348E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31534E-1
cs_fil2_imon=-2.24458E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.40474E-1
res40_imon=-2.40964E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.81815E-1	-8.97074E-1	-9.04665E0	-9.04188E0	4.52995E-3	9.4986E-2	2.73216E1	-3.26785E1	-3.26691E1	2.68458E1	1.19925E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.0041E-1
2.0E0	3.8E1	2.0E0	3.16E2	1.6E2	-2.09433E0	-8.81791E-1	-8.96835E-1	-9.04667E0	-9.04198E0	4.41074E-3	9.49144E-2	2.73399E1	-3.26506E1	-3.26386E1	2.68478E1	1.19851E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.81815E-1	-8.96859E-1	-9.04706E0	-9.04205E0	4.26769E-3	9.48906E-2	2.73342E1	-3.26103E1	-3.26378E1	2.68473E1	1.20244E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.99083E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.81672E-1	-8.97193E-1	-9.04665E0	-9.04188E0	4.43459E-3	9.50098E-2	2.73101E1	-3.26672E1	-3.26035E1	2.68188E1	1.19956E-7	2.51423E-3	2.51423E-3	6.3074E-3	3.00771E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09325E0	-8.81481E-1	-8.96978E-1	-9.04677E0	-9.0415E0	4.24385E-3	9.51767E-2	2.73253E1	-3.26609E1	-3.26376E1	2.68313E1	1.20171E-7	2.51758E-3	2.51758E-3	6.33648E-3	3.0147E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-8.81481E-1	-8.97288E-1	-9.0466E0	-9.04174E0	4.3869E-3	9.51529E-2	2.73178E1	-3.26434E1	-3.26092E1	2.68343E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.816E-1	-8.97121E-1	-9.04636E0	-9.04162E0	4.57764E-3	9.50336E-2	2.73195E1	-3.26801E1	-3.26176E1	2.68569E1	1.20209E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.81743E-1	-8.96811E-1	-9.04655E0	-9.04212E0	4.33922E-3	9.53197E-2	2.73311E1	-3.26714E1	-3.26307E1	2.68493E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.81672E-1	-8.96955E-1	-9.04682E0	-9.04195E0	4.36306E-3	9.50813E-2	2.72922E1	-3.26395E1	-3.26223E1	2.68581E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.81553E-1	-8.97026E-1	-9.0467E0	-9.04162E0	4.50611E-3	9.52959E-2	2.73598E1	-3.26591E1	-3.26434E1	2.68238E1	1.19601E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.81672E-1	-8.97145E-1	-9.04658E0	-9.04157E0	4.26769E-3	9.50336E-2	2.73003E1	-3.26699E1	-3.26512E1	2.68204E1	1.19965E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.81577E-1	-8.97026E-1	-9.04639E0	-9.04162E0	4.48227E-3	9.46045E-2	2.73273E1	-3.27083E1	-3.2593E1	2.68456E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.81433E-1	-8.9705E-1	-9.04634E0	-9.04202E0	4.36306E-3	9.48668E-2	2.73253E1	-3.26529E1	-3.26309E1	2.6828E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09302E0	-8.81624E-1	-8.96931E-1	-9.04648E0	-9.04195E0	4.60148E-3	9.50336E-2	2.73283E1	-3.26689E1	-3.26567E1	2.68273E1	1.20191E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.00144E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.81791E-1	-8.96883E-1	-9.04655E0	-9.04152E0	4.41074E-3	9.52482E-2	2.73346E1	-3.26626E1	-3.26071E1	2.68298E1	1.19891E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.00097E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.81553E-1	-8.97098E-1	-9.04682E0	-9.04198E0	4.1008E-3	9.49383E-2	2.72978E1	-3.26125E1	-3.26187E1	2.68244E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.81863E-1	-8.97098E-1	-9.04651E0	-9.042E0	4.31538E-3	9.4986E-2	2.73137E1	-3.26634E1	-3.26199E1	2.68424E1	1.20191E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0201E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.8191E-1	-8.96692E-1	-9.04675E0	-9.04169E0	4.72069E-3	9.48191E-2	2.73387E1	-3.26708E1	-3.26478E1	2.68274E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.81672E-1	-8.97217E-1	-9.04648E0	-9.0415E0	4.41074E-3	9.49144E-2	2.7324E1	-3.26938E1	-3.26166E1	2.68262E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.81577E-1	-8.96978E-1	-9.04667E0	-9.04164E0	4.07696E-3	9.50813E-2	2.72955E1	-3.26422E1	-3.26164E1	2.68268E1	1.20311E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
