[Scan]
initial_time=2016-01-18T19:23:52
final_time=2016-01-18T19:24:11
ip_count=19
run=1024
dataset=5
scan=346
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.81433E-1
ql1_imon=1.34892E-8
ql2_vset=
ql2_vmon=-8.97241E-1
ql2_imon=1.90327E-9
ql3_vset=
ql3_vmon=-9.04644E0
ql3_imon=3.64888E-10
ql4_vset=
ql4_vmon=-9.04183E0
ql4_imon=4.04119E-11
mult1=-1.00053E-8
mult2=-2.75055E-9
rf_tmon=-4.60856E-3
rf_agc=3.32314E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.73411E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61878E0
bslens_imon=1.65866E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18362E1
lens5a_imon=1.98914E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12632E2
lens4a_imon=2.06025E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54151E1
cs_ef1b_imon=3.1647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.01704E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03053E1
cs_ea1_imon=1.045E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45946E0
lens1_imon=3.74786E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04971E1
cs_ea2_imon=1.36516E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.847E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.38107E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13672E1
os_ea1_imon=2.25228E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.16983E0
cs_ionrep_imon=9.85555E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92037E2
cs_nozzle_imon=1.94008E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02079E1
cs_anode1_imon=1.97575E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.40419E-8
tplens_vset=1.4E-1
tplens_vmon=1.67504E0
tplens_imon=-1.10145E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.50281E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26242E1
iondef2_imon=1.63561E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03062E2
lens6_imon=2.9797E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.10112E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.15534E0
ionrepsh_imon=7.95754E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33959E1
lens5b_imon=2.24881E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.64085E0
os_ea2_imon=-4.37493E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.05999E2
lens4b_imon=1.99875E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71498E1
cs_ef2a_imon=3.17191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.28433E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53886E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11334E1
os_restr2_imon=3.43896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22973E2
cs_ionfoca_imon=6.33648E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.15519E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.1108E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.20402E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=8.03384E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02116E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.94012E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86032E1
mask2_imon=-4.06668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92696E3
multa_neg_imon=7.76635E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93661E3
defgrida_imon=7.16149E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=6.22292E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.04164E0
defgridb_imon=6.72001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.43567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66998E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31786E1
cs_fil1_imon=7.15484E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.05125E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69654E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.70522E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.08599E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22726E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73708E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.81195E-1	-8.96859E-1	-9.04634E0	-9.04157E0	4.14848E-3	9.52244E-2	2.73416E1	-3.25588E1	-3.25652E1	2.68209E1	1.20192E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.00852E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.81171E-1	-8.96811E-1	-9.04641E0	-9.04198E0	4.12464E-3	9.48191E-2	2.73363E1	-3.26616E1	-3.26129E1	2.684E1	1.19991E-7	2.51498E-3	2.51498E-3	6.33486E-3	2.9887E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.81171E-1	-8.9643E-1	-9.04648E0	-9.04195E0	4.26769E-3	9.5129E-2	2.73279E1	-3.26733E1	-3.26528E1	2.68279E1					
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.81171E-1	-8.96502E-1	-9.04658E0	-9.04205E0	4.60148E-3	9.49383E-2	2.73231E1	-3.26627E1	-3.26338E1	2.6837E1	1.19841E-7	2.52342E-3	2.52342E-3	6.30212E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.81481E-1	-8.96716E-1	-9.04641E0	-9.04195E0	4.60148E-3	9.48429E-2	2.73476E1	-3.26319E1	-3.26419E1	2.68388E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.81171E-1	-8.96668E-1	-9.04639E0	-9.04195E0	4.60148E-3	9.48191E-2	2.73267E1	-3.26512E1	-3.26398E1	2.68331E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.03027E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.81052E-1	-8.96931E-1	-9.04655E0	-9.04205E0	4.62532E-3	9.47952E-2	2.73255E1	-3.26969E1	-3.26176E1	2.68413E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.81219E-1	-8.97026E-1	-9.04634E0	-9.04171E0	4.74453E-3	9.51529E-2	2.72925E1	-3.265E1	-3.26446E1	2.68401E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.81386E-1	-8.97169E-1	-9.04629E0	-9.04181E0	4.62532E-3	9.51529E-2	2.73514E1	-3.26212E1	-3.26494E1	2.68419E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.81457E-1	-8.97026E-1	-9.04665E0	-9.04191E0	4.52995E-3	9.52005E-2	2.73369E1	-3.26729E1	-3.26086E1	2.6834E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3514E-3	3.02133E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.81386E-1	-8.96955E-1	-9.04641E0	-9.04183E0	4.62532E-3	9.52721E-2	2.73243E1	-3.26687E1	-3.26206E1	2.68118E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.81481E-1	-8.97074E-1	-9.04651E0	-9.04195E0	4.55379E-3	9.53674E-2	2.73147E1	-3.26735E1	-3.26104E1	2.68395E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.82316E-1	-8.97002E-1	-9.04634E0	-9.04229E0	4.55379E-3	9.54866E-2	2.73105E1	-3.26687E1	-3.26428E1	2.6835E1	1.2033E-7	2.52209E-3	2.52209E-3	6.28006E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.82149E-1	-8.96764E-1	-9.04646E0	-9.04174E0	4.64916E-3	9.50336E-2	2.7321E1	-3.26767E1	-3.258E1	2.68169E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.816E-1	-8.96883E-1	-9.04636E0	-9.04195E0	4.69685E-3	9.51529E-2	2.73351E1	-3.26789E1	-3.2599E1	2.6822E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0071E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.81624E-1	-8.96811E-1	-9.04641E0	-9.04183E0	4.8399E-3	9.51052E-2	2.73297E1	-3.26386E1	-3.26428E1	2.68484E1	1.19965E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.81433E-1	-8.96621E-1	-9.04655E0	-9.04162E0	4.50611E-3	9.47475E-2	2.73393E1	-3.26434E1	-3.265E1	2.68316E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.81243E-1	-8.96716E-1	-9.04646E0	-9.04195E0	4.3869E-3	9.47475E-2	2.73411E1	-3.26762E1	-3.26307E1	2.68514E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.81243E-1	-8.97098E-1	-9.04636E0	-9.04202E0	4.62532E-3	9.47475E-2	2.72985E1	-3.26663E1	-3.26476E1	2.68268E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.81433E-1	-8.97241E-1	-9.04644E0	-9.04183E0	4.76837E-3	9.48191E-2	2.72835E1	-3.26242E1	-3.26446E1	2.68337E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00563E-1
