[Scan]
initial_time=2016-01-18T19:24:18
final_time=2016-01-18T19:24:38
ip_count=19
run=1024
dataset=5
scan=347
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.8141E-1
ql1_imon=1.34662E-8
ql2_vset=
ql2_vmon=-8.97098E-1
ql2_imon=1.89732E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=3.19457E-10
ql4_vset=
ql4_vmon=-9.04181E0
ql4_imon=2.94685E-11
mult1=-9.13289E-9
mult2=-2.58411E-9
rf_tmon=-4.9578E-3
rf_agc=3.31085E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.71187E-9
bslens_vset=-6.2E0
bslens_vmon=-6.47748E0
bslens_imon=2.01503E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2068E1
lens5a_imon=2.09555E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12598E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=3.16866E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04442E2
lens23_imon=1.01313E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04718E1
cs_ea1_imon=1.18061E-5
lens1_vset=-5.0E0
lens1_vmon=-5.58045E0
lens1_imon=3.29119E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64879E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02717E1
cs_ea2_imon=1.23396E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.37622E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.26499E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13942E1
os_ea1_imon=2.38827E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64314E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.35244E0
cs_ionrep_imon=1.03461E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92001E2
cs_nozzle_imon=1.93099E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.96206E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.39406E-8
tplens_vset=1.4E-1
tplens_vmon=1.49363E0
tplens_imon=-8.22064E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25989E1
iondef3_imon=1.60203E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26413E1
iondef2_imon=1.55264E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02869E2
lens6_imon=2.97217E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.08871E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=8.91492E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.35298E1
lens5b_imon=2.2347E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.1474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45998E0
os_ea2_imon=-1.49259E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.05985E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.45158E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23119E2
cs_ionfoca_imon=6.36129E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.08351E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72791E1
iondef1_imon=1.04867E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68406E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.25165E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=8.0364E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-7.41837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-5.68847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-4.39104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=6.78078E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93764E3
defgrida_imon=7.62434E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50032E3
multb_neg_imon=7.59911E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.79255E0
defgridb_imon=5.45055E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66951E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31792E1
cs_fil1_imon=8.30811E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.05486E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69805E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.70568E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=9.91528E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22882E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.14553E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.8141E-1	-8.97026E-1	-9.04651E0	-9.04167E0	4.72069E-3	9.48906E-2	2.7278E1	-3.27033E1	-3.27375E1	2.68238E1	1.19757E-7	2.52099E-3	2.52099E-3	6.26371E-3	3.02396E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.81505E-1	-8.97408E-1	-9.04617E0	-9.04176E0	4.64916E-3	9.48429E-2	2.73267E1	-3.26603E1	-3.26272E1	2.68462E1	1.19697E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.81147E-1	-8.96978E-1	-9.04636E0	-9.04207E0	4.8399E-3	9.48906E-2	2.73405E1	-3.26891E1	-3.26231E1	2.68499E1	1.19819E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.00942E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.80957E-1	-8.97217E-1	-9.04665E0	-9.04195E0	4.62532E-3	9.49383E-2	2.73189E1	-3.2632E1	-3.26194E1	2.68412E1	1.19891E-7	2.52553E-3	2.52553E-3	6.31269E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.81219E-1	-8.97145E-1	-9.04632E0	-9.04207E0	4.62532E-3	9.49144E-2	2.73622E1	-3.26627E1	-3.26356E1	2.68286E1	1.19913E-7	2.51334E-3	2.51334E-3	6.27461E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.81338E-1	-8.96955E-1	-9.04655E0	-9.04217E0	4.45843E-3	9.47237E-2	2.73541E1	-3.2649E1	-3.26178E1	2.68304E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.81243E-1	-8.9736E-1	-9.04641E0	-9.04193E0	4.52995E-3	9.49383E-2	2.72898E1	-3.26555E1	-3.26449E1	2.68273E1	1.20004E-7	2.51096E-3	2.51096E-3	6.34518E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.81171E-1	-8.97026E-1	-9.04629E0	-9.04169E0	4.45843E-3	9.4676E-2	2.73303E1	-3.26741E1	-3.2602E1	2.68238E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.80909E-1	-8.97217E-1	-9.04636E0	-9.04207E0	4.33922E-3	9.49383E-2	2.73165E1	-3.26374E1	-3.26176E1	2.68382E1	1.19861E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.80909E-1	-8.97288E-1	-9.04658E0	-9.04195E0	4.55379E-3	9.50098E-2	2.73004E1	-3.26531E1	-3.25782E1	2.68221E1	1.19933E-7	2.52134E-3	2.52134E-3	6.32099E-3	3.00378E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.81004E-1	-8.97264E-1	-9.04651E0	-9.04202E0	4.45843E-3	9.49621E-2	2.7308E1	-3.26573E1	-3.2613E1	2.68214E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.81338E-1	-8.97384E-1	-9.04679E0	-9.04193E0	4.72069E-3	9.54151E-2	2.73267E1	-3.26698E1	-3.25998E1	2.68238E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9892E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.81052E-1	-8.96978E-1	-9.04675E0	-9.04179E0	4.69685E-3	9.52482E-2	2.73051E1	-3.26425E1	-3.25948E1	2.68419E1	1.19732E-7	2.5199E-3	2.5199E-3	6.3126E-3	2.98768E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.81076E-1	-8.97074E-1	-9.04694E0	-9.04143E0	4.60148E-3	9.48906E-2	2.73033E1	-3.26573E1	-3.2623E1	2.68154E1	1.20116E-7	2.52338E-3	2.52338E-3	6.31321E-3	2.97887E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09719E0	-8.81076E-1	-8.97288E-1	-9.0471E0	-9.04195E0	4.72069E-3	9.49621E-2	2.73417E1	-3.26366E1	-3.26183E1	2.68647E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.81028E-1	-8.97193E-1	-9.04684E0	-9.04174E0	4.76837E-3	9.50575E-2	2.73129E1	-3.2647E1	-3.26164E1	2.684E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.0071E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.81171E-1	-8.97026E-1	-9.04663E0	-9.04202E0	4.76837E-3	9.51529E-2	2.72967E1	-3.26747E1	-3.25954E1	2.6828E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.81362E-1	-8.97098E-1	-9.04646E0	-9.04191E0	4.45843E-3	9.52482E-2	2.73462E1	-3.2677E1	-3.26341E1	2.68238E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09704E0	-8.816E-1	-8.97169E-1	-9.04651E0	-9.04195E0	4.45843E-3	9.5129E-2	2.73321E1	-3.2638E1	-3.26248E1	2.68292E1	1.20293E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.98342E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.8141E-1	-8.97098E-1	-9.04672E0	-9.04181E0	4.19617E-3	9.51052E-2	2.72791E1	-3.26413E1	-3.25989E1	2.68406E1	1.20069E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9952E-1
