[Scan]
initial_time=2016-01-18T19:25:42
final_time=2016-01-18T19:26:07
ip_count=19
run=1024
dataset=5
scan=350
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08854E-4
ql1_vset=
ql1_vmon=-8.81338E-1
ql1_imon=1.35403E-8
ql2_vset=
ql2_vmon=-8.96859E-1
ql2_imon=1.87137E-9
ql3_vset=
ql3_vmon=-9.04648E0
ql3_imon=2.9695E-10
ql4_vset=
ql4_vmon=-9.04174E0
ql4_imon=1.65224E-11
mult1=-1.04147E-8
mult2=-2.80045E-9
rf_tmon=-2.91423E-3
rf_agc=3.37842E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.70387E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60125E0
bslens_imon=2.26378E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20331E1
lens5a_imon=2.06562E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=3.17011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04531E2
lens23_imon=1.01973E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=1.12653E-5
lens1_vset=-5.0E0
lens1_vmon=-5.48972E0
lens1_imon=2.81533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03186E1
cs_ea2_imon=1.31904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.0573E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.38122E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.25923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14735E1
os_ea1_imon=2.38502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6283E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30437E0
cs_ionrep_imon=9.73324E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=1.95989E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.39795E-8
tplens_vset=1.4E-1
tplens_vmon=1.57594E0
tplens_imon=-4.75989E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.55516E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.55408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.9783E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.0985E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=8.85724E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34487E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51526E0
os_ea2_imon=-1.04197E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00835E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.36002E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37668E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.45086E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23156E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.07967E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.21232E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=8.03247E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.61191E-1
window_imon=-7.56253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.51619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=7.10883E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.28908E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=5.67767E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.44312E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08206E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66933E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31806E1
cs_fil1_imon=7.23293E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.29319E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69384E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.1114E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22745E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.2863E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.1974E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17556E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.81171E-1	-8.96883E-1	-9.04648E0	-9.04191E0	4.48227E-3	9.50575E-2	2.73647E1	-3.26632E1	-3.25729E1	2.6846E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.81124E-1	-8.96716E-1	-9.04665E0	-9.04171E0	4.62532E-3	9.53436E-2	2.73141E1	-3.26819E1	-3.26206E1	2.6834E1	1.20004E-7	2.50989E-3	2.50989E-3	6.29665E-3	3.03545E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.81076E-1	-8.96716E-1	-9.04651E0	-9.04183E0	4.76837E-3	9.52959E-2	2.73255E1	-3.26302E1	-3.26278E1	2.68296E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.81004E-1	-8.96716E-1	-9.0462E0	-9.04202E0	4.93526E-3	9.51529E-2	2.73252E1	-3.26378E1	-3.26113E1	2.6813E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.80504E-1	-8.96931E-1	-9.04677E0	-9.04152E0	4.79221E-3	9.5129E-2	2.73057E1	-3.26074E1	-3.26098E1	2.6831E1	1.19544E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.811E-1	-8.9674E-1	-9.04648E0	-9.04191E0	4.57764E-3	9.4986E-2	2.73069E1	-3.26741E1	-3.26212E1	2.68166E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.81052E-1	-8.97026E-1	-9.04644E0	-9.04179E0	4.64916E-3	9.52959E-2	2.73476E1	-3.26673E1	-3.26018E1	2.68538E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.811E-1	-8.96716E-1	-9.0466E0	-9.04195E0	4.1008E-3	9.53436E-2	2.73189E1	-3.2638E1	-3.2635E1	2.68383E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.81124E-1	-8.97074E-1	-9.04667E0	-9.04193E0	4.52995E-3	9.50575E-2	2.73145E1	-3.26815E1	-3.26136E1	2.68235E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.81004E-1	-8.96835E-1	-9.04665E0	-9.04205E0	4.673E-3	9.50336E-2	2.73075E1	-3.26634E1	-3.26297E1	2.68244E1	1.19902E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99175E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.81004E-1	-8.96978E-1	-9.0466E0	-9.04193E0	4.57764E-3	9.50575E-2	2.73405E1	-3.26555E1	-3.26242E1	2.68334E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.80933E-1	-8.96859E-1	-9.04634E0	-9.04171E0	4.50611E-3	9.50813E-2	2.73123E1	-3.26615E1	-3.2644E1	2.68286E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.81004E-1	-8.96955E-1	-9.04639E0	-9.04174E0	4.69685E-3	9.51052E-2	2.73598E1	-3.26669E1	-3.26266E1	2.68202E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09317E0	-8.80957E-1	-8.9674E-1	-9.04639E0	-9.04191E0	4.3869E-3	9.53197E-2	2.72927E1	-3.26378E1	-3.26136E1	2.68364E1	1.20004E-7	2.51954E-3	2.51954E-3	6.28592E-3	2.98156E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.8098E-1	-8.96811E-1	-9.04665E0	-9.04157E0	4.52995E-3	9.50336E-2	2.73346E1	-3.26496E1	-3.2649E1	2.68343E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.81219E-1	-8.97145E-1	-9.04639E0	-9.04198E0	4.48227E-3	9.51529E-2	2.73311E1	-3.26903E1	-3.25995E1	2.68154E1	1.19851E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99686E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.81052E-1	-8.97074E-1	-9.04653E0	-9.04193E0	4.3869E-3	9.52005E-2	2.73237E1	-3.26518E1	-3.26182E1	2.6807E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02253E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.81219E-1	-8.96621E-1	-9.04667E0	-9.04167E0	4.36306E-3	9.51529E-2	2.73381E1	-3.26711E1	-3.26302E1	2.68328E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02922E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.811E-1	-8.97121E-1	-9.04655E0	-9.04181E0	4.12464E-3	9.52005E-2	2.73323E1	-3.26614E1	-3.26133E1	2.68372E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-8.81338E-1	-8.96859E-1	-9.04648E0	-9.04174E0	4.45843E-3	9.50336E-2	2.73237E1	-3.26573E1	-3.26074E1	2.68304E1	1.1974E-7	2.52236E-3	2.52236E-3	6.2863E-3	3.00852E-1
