[Scan]
initial_time=2016-01-18T19:27:25
final_time=2016-01-18T19:27:50
ip_count=19
run=1024
dataset=5
scan=353
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-8.80861E-1
ql1_imon=1.34458E-8
ql2_vset=
ql2_vmon=-8.96907E-1
ql2_imon=1.9118E-9
ql3_vset=
ql3_vmon=-9.04646E0
ql3_imon=3.01325E-10
ql4_vset=
ql4_vmon=-9.04202E0
ql4_imon=3.69668E-11
mult1=-9.75743E-9
mult2=-2.56736E-9
rf_tmon=-6.05201E-3
rf_agc=3.18592E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.71776E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68993E0
bslens_imon=2.54673E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19945E1
lens5a_imon=2.01072E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04766E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=3.15821E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=1.10644E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3744E0
lens1_imon=2.52102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03464E1
cs_ea2_imon=1.35693E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=3.04036E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.37632E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.27436E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15349E1
os_ea1_imon=2.39198E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63407E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23924E0
cs_ionrep_imon=9.52538E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93556E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=1.96386E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.39244E-8
tplens_vset=1.4E-1
tplens_vmon=1.66102E0
tplens_imon=-2.80222E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.51267E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26652E1
iondef2_imon=1.52993E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98107E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.04989E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30719E0
ionrepsh_imon=8.721E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.15874E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52818E0
os_ea2_imon=-7.99346E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00854E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.16866E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38869E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=3.44725E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.28937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73002E1
iondef1_imon=1.09468E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.11332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.36505E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=8.00892E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-8.42748E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56663E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.85521E1
mask2_imon=-4.39104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.40975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.64944E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.11223E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29936E0
defgridb_imon=6.12788E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.43964E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07882E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66704E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=6.58421E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.61154E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69441E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60737E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.17802E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22706E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.1959E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.60804E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.8098E-1	-8.96788E-1	-9.04648E0	-9.04198E0	4.05312E-3	9.50575E-2	2.73482E1	-3.26732E1	-3.25959E1	2.68304E1	1.2035E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0041E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.8141E-1	-8.96859E-1	-9.04651E0	-9.04186E0	4.12464E-3	9.52244E-2	2.73155E1	-3.26634E1	-3.26309E1	2.6828E1	1.19697E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.81195E-1	-8.9643E-1	-9.04653E0	-9.04171E0	4.07696E-3	9.50813E-2	2.73097E1	-3.26515E1	-3.25872E1	2.68395E1	1.19554E-7	2.51248E-3	2.51248E-3	6.33538E-3	3.03081E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.81529E-1	-8.96621E-1	-9.04667E0	-9.04188E0	3.93391E-3	9.50575E-2	2.73063E1	-3.26675E1	-3.26386E1	2.68352E1	1.1988E-7	2.5199E-3	2.5199E-3	6.33863E-3	3.00741E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.81219E-1	-8.96621E-1	-9.04651E0	-9.04205E0	4.12464E-3	9.52005E-2	2.73177E1	-3.26176E1	-3.26164E1	2.68532E1	1.19713E-7	2.51804E-3	2.51804E-3	6.34099E-3	2.98026E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.81219E-1	-8.97026E-1	-9.04636E0	-9.04202E0	4.33922E-3	9.48429E-2	2.73381E1	-3.26693E1	-3.26074E1	2.68346E1	1.198E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.81147E-1	-8.96788E-1	-9.04622E0	-9.04212E0	4.24385E-3	9.4986E-2	2.7324E1	-3.26337E1	-3.26248E1	2.6822E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-8.81219E-1	-8.9674E-1	-9.04641E0	-9.04179E0	4.41074E-3	9.51529E-2	2.73375E1	-3.26765E1	-3.26392E1	2.68436E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.8079E-1	-8.9674E-1	-9.04663E0	-9.04167E0	4.07696E-3	9.48191E-2	2.72829E1	-3.26717E1	-3.25725E1	2.68352E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.8141E-1	-8.96597E-1	-9.04634E0	-9.04171E0	4.31538E-3	9.49621E-2	2.73195E1	-3.26603E1	-3.2584E1	2.68545E1	1.20383E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.81386E-1	-8.9674E-1	-9.04617E0	-9.04152E0	4.3869E-3	9.49621E-2	2.73321E1	-3.2644E1	-3.26452E1	2.68277E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.81124E-1	-8.96907E-1	-9.04655E0	-9.04171E0	4.41074E-3	9.48191E-2	2.73291E1	-3.26717E1	-3.26344E1	2.68461E1	1.2026E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09302E0	-8.81147E-1	-8.97026E-1	-9.04629E0	-9.04202E0	4.31538E-3	9.49383E-2	2.72974E1	-3.2672E1	-3.26113E1	2.68325E1	1.20084E-7	2.52362E-3	2.52362E-3	6.31299E-3	2.98819E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0934E0	-8.81457E-1	-8.96907E-1	-9.04617E0	-9.04222E0	4.41074E-3	9.5129E-2	2.73493E1	-3.26585E1	-3.26378E1	2.6831E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.0071E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.81314E-1	-8.96955E-1	-9.04624E0	-9.04202E0	4.45843E-3	9.51529E-2	2.73399E1	-3.26392E1	-3.26008E1	2.6807E1	1.19851E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.01995E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.81219E-1	-8.96502E-1	-9.04651E0	-9.04222E0	4.57764E-3	9.50575E-2	2.73225E1	-3.26897E1	-3.26254E1	2.68142E1	1.19705E-7	2.52647E-3	2.52647E-3	6.29645E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09309E0	-8.8098E-1	-8.96692E-1	-9.04667E0	-9.04188E0	4.55379E-3	9.52721E-2	2.73357E1	-3.26639E1	-3.26332E1	2.68238E1	1.19861E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.80885E-1	-8.96692E-1	-9.04644E0	-9.04212E0	4.52995E-3	9.53436E-2	2.73248E1	-3.26399E1	-3.26503E1	2.68412E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.81219E-1	-8.9674E-1	-9.04624E0	-9.04231E0	4.33922E-3	9.49383E-2	2.73393E1	-3.26219E1	-3.26284E1	2.68319E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.80861E-1	-8.96907E-1	-9.04646E0	-9.04202E0	4.36306E-3	9.49144E-2	2.73002E1	-3.26652E1	-3.26419E1	2.68346E1	1.1959E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.01609E-1
