[Scan]
initial_time=2016-01-18T19:30:15
final_time=2016-01-18T19:30:40
ip_count=19
run=1024
dataset=5
scan=358
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.81124E-1
ql1_imon=1.34281E-8
ql2_vset=
ql2_vmon=-8.97074E-1
ql2_imon=1.89751E-9
ql3_vset=
ql3_vmon=-9.04653E0
ql3_imon=2.25782E-10
ql4_vset=
ql4_vmon=-9.04214E0
ql4_imon=2.16365E-11
mult1=-9.67668E-9
mult2=-2.63703E-9
rf_tmon=-4.66875E-3
rf_agc=3.37869E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.73458E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.23494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19478E1
lens5a_imon=2.01876E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=3.16434E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04219E1
cs_ea1_imon=1.12185E-5
lens1_vset=-5.0E0
lens1_vmon=-5.405E0
lens1_imon=2.77928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0345E1
cs_ea2_imon=1.32733E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.05334E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.37711E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11646E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14825E1
os_ea1_imon=2.3706E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6411E1
os_ef1bup_imon=3.09875E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=9.49171E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.97071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.40109E-8
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.56093E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02996E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=4.10684E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=8.31289E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56272E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53285E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.45806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72974E1
iondef1_imon=1.09337E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68611E1
iondef4_imon=1.11044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.14852E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.98206E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47536E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.84281E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-6.69758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82679E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86032E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.43051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08729E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66711E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31807E1
cs_fil1_imon=6.94461E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02903E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69615E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.2519E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22848E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67101E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.81362E-1	-8.96811E-1	-9.04694E0	-9.04193E0	4.41074E-3	9.51767E-2	2.73228E1	-3.26201E1	-3.26573E1	2.68545E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01871E-1
2.0E0	2.1E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.81219E-1	-8.96764E-1	-9.04684E0	-9.04222E0	4.17233E-3	9.5129E-2	2.73375E1	-3.26963E1	-3.26122E1	2.67998E1	1.20158E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.8098E-1	-8.96549E-1	-9.04655E0	-9.04179E0	4.33922E-3	9.57012E-2	2.73761E1	-3.26668E1	-3.26305E1	2.68473E1	1.20017E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.81004E-1	-8.96859E-1	-9.04677E0	-9.04186E0	4.12464E-3	9.52482E-2	2.73429E1	-3.26561E1	-3.26104E1	2.68623E1	1.20276E-7	2.51886E-3	2.51886E-3	6.31779E-3	2.98768E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.80957E-1	-8.97193E-1	-9.04672E0	-9.04167E0	4.31538E-3	9.52005E-2	2.73003E1	-3.26969E1	-3.26032E1	2.68575E1	1.19809E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.81076E-1	-8.9705E-1	-9.04672E0	-9.04174E0	4.33922E-3	9.51052E-2	2.73718E1	-3.26717E1	-3.26338E1	2.68394E1	1.19902E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.81076E-1	-8.97217E-1	-9.04653E0	-9.04164E0	4.36306E-3	9.51052E-2	2.72927E1	-3.26313E1	-3.26166E1	2.68372E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.81028E-1	-8.96978E-1	-9.04651E0	-9.04171E0	4.55379E-3	9.52959E-2	2.72739E1	-3.26488E1	-3.2608E1	2.68304E1	1.20004E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.81076E-1	-8.96835E-1	-9.04651E0	-9.0416E0	4.43459E-3	9.50575E-2	2.73015E1	-3.26182E1	-3.26404E1	2.67878E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.8098E-1	-8.96502E-1	-9.04632E0	-9.042E0	4.31538E-3	9.4986E-2	2.73285E1	-3.26296E1	-3.26416E1	2.6828E1	1.19809E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.03712E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.80861E-1	-8.96287E-1	-9.04634E0	-9.04191E0	4.22001E-3	9.51052E-2	2.73145E1	-3.26667E1	-3.26467E1	2.6834E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.80766E-1	-8.96668E-1	-9.04632E0	-9.04195E0	4.69685E-3	9.52721E-2	2.73129E1	-3.26645E1	-3.25984E1	2.68046E1	1.2026E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.80742E-1	-8.97217E-1	-9.04646E0	-9.04212E0	4.74453E-3	9.51767E-2	2.73316E1	-3.2636E1	-3.26378E1	2.6834E1	1.19601E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.80551E-1	-8.96955E-1	-9.04663E0	-9.04212E0	4.673E-3	9.51767E-2	2.7358E1	-3.26783E1	-3.26374E1	2.68151E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.99941E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.80384E-1	-8.97098E-1	-9.04675E0	-9.04219E0	4.33922E-3	9.54151E-2	2.73541E1	-3.2688E1	-3.25953E1	2.68388E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09271E0	-8.80599E-1	-8.96764E-1	-9.0467E0	-9.04202E0	4.57764E-3	9.52721E-2	2.73039E1	-3.2647E1	-3.2638E1	2.68268E1	1.20106E-7	2.52169E-3	2.52169E-3	6.35059E-3	3.02253E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09294E0	-8.80861E-1	-8.96525E-1	-9.04665E0	-9.04181E0	4.50611E-3	9.52244E-2	2.73193E1	-3.26555E1	-3.26378E1	2.68412E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09333E0	-8.80933E-1	-8.96978E-1	-9.04663E0	-9.04188E0	4.69685E-3	9.5129E-2	2.73287E1	-3.26496E1	-3.259E1	2.68215E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09309E0	-8.811E-1	-8.96978E-1	-9.04651E0	-9.04219E0	4.64916E-3	9.50098E-2	2.7352E1	-3.26591E1	-3.25936E1	2.68304E1	1.19991E-7	2.52236E-3	2.52236E-3	6.30212E-3	2.98842E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-8.81124E-1	-8.97074E-1	-9.04653E0	-9.04214E0	4.3869E-3	9.51767E-2	2.72974E1	-3.2675E1	-3.26366E1	2.68611E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
