[Scan]
initial_time=2016-01-18T19:30:49
final_time=2016-01-18T19:31:14
ip_count=19
run=1024
dataset=5
scan=359
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.81052E-1
ql1_imon=1.33652E-8
ql2_vset=
ql2_vmon=-8.96907E-1
ql2_imon=1.91178E-9
ql3_vset=
ql3_vmon=-9.04639E0
ql3_imon=2.35665E-10
ql4_vset=
ql4_vmon=-9.04205E0
ql4_imon=4.43459E-11
mult1=-9.32499E-9
mult2=-2.76046E-9
rf_tmon=-5.31775E-3
rf_agc=3.26656E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.70958E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.38995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=2.00686E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54001E1
cs_ef1b_imon=3.16506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02363E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=1.10887E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39359E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.36626E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=3.04144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.37804E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.27292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14741E1
os_ea1_imon=2.35438E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=9.42682E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=1.9653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.39336E-8
tplens_vset=1.4E-1
tplens_vmon=1.68589E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26017E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.9814E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=4.07732E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=8.56163E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74429E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56453E0
os_ea2_imon=-5.37273E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00716E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.13507E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.44581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23011E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.08711E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73526E1
iondef1_imon=1.115E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68626E1
iondef4_imon=1.11224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.14234E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=8.01498E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-8.28332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=2.80412E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-4.5352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.63876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.06918E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24818E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.43423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07714E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6662E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31837E1
cs_fil1_imon=8.09788E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01101E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6959E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.26092E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.73688E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=3.02115E-1
chamber_ion_pmon=1.20192E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.58401E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.80861E-1	-8.96692E-1	-9.04665E0	-9.04188E0	4.43459E-3	9.52005E-2	2.72866E1	-3.26446E1	-3.26104E1	2.67949E1	1.20435E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.0934E0	-8.81052E-1	-8.96692E-1	-9.04675E0	-9.04219E0	4.52995E-3	9.49383E-2	2.73339E1	-3.26554E1	-3.26128E1	2.68166E1	1.19891E-7	2.51919E-3	2.51919E-3	6.3445E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.81052E-1	-8.96692E-1	-9.04665E0	-9.04176E0	4.74453E-3	9.50575E-2	2.73564E1	-3.26343E1	-3.26213E1	2.6846E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.81004E-1	-8.96549E-1	-9.04694E0	-9.04188E0	4.3869E-3	9.50098E-2	2.7346E1	-3.26603E1	-3.26152E1	2.68464E1	1.2026E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.81314E-1	-8.9674E-1	-9.04722E0	-9.04152E0	4.26769E-3	9.47237E-2	2.73086E1	-3.26455E1	-3.26107E1	2.68154E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.81076E-1	-8.96215E-1	-9.04689E0	-9.04195E0	4.29153E-3	9.50336E-2	2.73478E1	-3.26567E1	-3.26422E1	2.68106E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09317E0	-8.81124E-1	-8.96263E-1	-9.04684E0	-9.04186E0	4.60148E-3	9.53674E-2	2.73143E1	-3.26511E1	-3.26199E1	2.6813E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.81124E-1	-8.96549E-1	-9.04694E0	-9.04179E0	4.3869E-3	9.52244E-2	2.73134E1	-3.26756E1	-3.26183E1	2.68286E1	1.20403E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.00676E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.81004E-1	-8.96549E-1	-9.04682E0	-9.04181E0	4.22001E-3	9.4986E-2	2.73273E1	-3.2623E1	-3.26272E1	2.68454E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.81124E-1	-8.96406E-1	-9.04672E0	-9.04186E0	4.19617E-3	9.49621E-2	2.72919E1	-3.26434E1	-3.26416E1	2.6834E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.81505E-1	-8.96263E-1	-9.0466E0	-9.04143E0	4.3869E-3	9.48429E-2	2.73273E1	-3.26747E1	-3.26098E1	2.68148E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09286E0	-8.81147E-1	-8.96358E-1	-9.04682E0	-9.04167E0	4.673E-3	9.51767E-2	2.73428E1	-3.26502E1	-3.26272E1	2.68418E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09317E0	-8.80742E-1	-8.96502E-1	-9.04675E0	-9.04148E0	4.74453E-3	9.5129E-2	2.73308E1	-3.26517E1	-3.2593E1	2.68388E1	1.19902E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.8098E-1	-8.96096E-1	-9.04672E0	-9.04152E0	4.50611E-3	9.52005E-2	2.7334E1	-3.26638E1	-3.26242E1	2.68609E1	1.20084E-7	2.51693E-3	2.51693E-3	6.29067E-3	3.00676E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.81052E-1	-8.96311E-1	-9.04677E0	-9.04143E0	4.1008E-3	9.51529E-2	2.73321E1	-3.26867E1	-3.26561E1	2.68325E1	1.20209E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09325E0	-8.81028E-1	-8.96358E-1	-9.04689E0	-9.04188E0	4.12464E-3	9.52244E-2	2.73482E1	-3.26569E1	-3.26083E1	2.68472E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.98481E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09286E0	-8.81267E-1	-8.96502E-1	-9.04689E0	-9.04155E0	4.05312E-3	9.52482E-2	2.73721E1	-3.27024E1	-3.26159E1	2.68258E1	1.19772E-7	2.51406E-3	2.51406E-3	6.31203E-3	3.01167E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09294E0	-8.81314E-1	-8.96263E-1	-9.04667E0	-9.04171E0	4.05312E-3	9.49144E-2	2.73532E1	-3.27029E1	-3.2626E1	2.6855E1	1.19976E-7	2.52647E-3	2.52647E-3	6.28115E-3	2.98948E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-8.81171E-1	-8.96668E-1	-9.04679E0	-9.04162E0	4.14848E-3	9.50098E-2	2.733E1	-3.26266E1	-3.2655E1	2.67931E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.81052E-1	-8.96907E-1	-9.04639E0	-9.04205E0	4.19617E-3	9.46999E-2	2.73526E1	-3.26596E1	-3.26017E1	2.68626E1	1.20192E-7	2.51393E-3	2.51393E-3	6.33388E-3	3.02115E-1
