[Scan]
initial_time=2016-01-18T19:31:56
final_time=2016-01-18T19:32:18
ip_count=19
run=1024
dataset=5
scan=361
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.81076E-1
ql1_imon=1.34647E-8
ql2_vset=
ql2_vmon=-8.96931E-1
ql2_imon=1.89133E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=2.53117E-10
ql4_vset=
ql4_vmon=-9.04181E0
ql4_imon=6.42538E-12
mult1=-9.85401E-9
mult2=-2.70954E-9
rf_tmon=-5.24095E-3
rf_agc=3.30083E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.69998E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69798E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=2.02525E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=3.14848E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04549E1
cs_ea1_imon=1.10635E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41041E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.36302E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.05586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.37301E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.27076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.36844E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=9.46287E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=1.96098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.39766E-8
tplens_vset=1.4E-1
tplens_vmon=1.65405E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25741E1
iondef3_imon=1.52416E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03028E2
lens6_imon=2.97971E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.12613E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=8.69141E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56092E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36467E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.44653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.09901E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.13194E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.1737E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=8.00929E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-9.54471E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.86443E-6
window_vset=0.0E0
window_vmon=2.75006E-1
window_imon=-6.6255E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.75412E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.72671E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.32874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29931E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.44252E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07768E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66807E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=7.5693E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.53946E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6961E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.08949E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24764E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.80861E-1	-8.96955E-1	-9.04639E0	-9.04198E0	4.43459E-3	9.4676E-2	2.7374E1	-3.26306E1	-3.26411E1	2.68308E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.80599E-1	-8.96692E-1	-9.04648E0	-9.04222E0	4.3869E-3	9.4986E-2	2.7317E1	-3.2679E1	-3.26011E1	2.68494E1	1.20209E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.80599E-1	-8.96835E-1	-9.04653E0	-9.04217E0	4.29153E-3	9.48191E-2	2.7347E1	-3.2613E1	-3.26449E1	2.68412E1	1.20262E-7	2.52179E-3	2.52179E-3	6.34164E-3	3.00522E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.80718E-1	-8.9674E-1	-9.04641E0	-9.04181E0	4.43459E-3	9.47237E-2	2.73228E1	-3.26856E1	-3.25782E1	2.68214E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.80766E-1	-8.96811E-1	-9.04651E0	-9.04179E0	4.43459E-3	9.48429E-2	2.73417E1	-3.265E1	-3.26591E1	2.68526E1	1.19851E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.05102E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09309E0	-8.80885E-1	-8.96764E-1	-9.04655E0	-9.04181E0	4.673E-3	9.47237E-2	2.73213E1	-3.26506E1	-3.26356E1	2.68256E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.80933E-1	-8.96573E-1	-9.04655E0	-9.04181E0	4.57764E-3	9.47952E-2	2.7324E1	-3.26207E1	-3.26065E1	2.6825E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.8079E-1	-8.96978E-1	-9.04672E0	-9.04133E0	4.76837E-3	9.4986E-2	2.72965E1	-3.26358E1	-3.26297E1	2.68244E1	1.20311E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09333E0	-8.80742E-1	-8.96931E-1	-9.04694E0	-9.04181E0	4.43459E-3	9.49383E-2	2.73445E1	-3.26544E1	-3.26353E1	2.68516E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99613E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.80671E-1	-8.96692E-1	-9.04658E0	-9.04167E0	4.52995E-3	9.48429E-2	2.72426E1	-3.2635E1	-3.26224E1	2.68046E1	1.19841E-7	2.52025E-3	2.52025E-3	6.29157E-3	2.99845E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.80861E-1	-8.9643E-1	-9.04675E0	-9.04191E0	4.74453E-3	9.49144E-2	2.73216E1	-3.26363E1	-3.2601E1	2.68306E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.81028E-1	-8.9674E-1	-9.04706E0	-9.04155E0	4.69685E-3	9.46283E-2	2.73045E1	-3.26699E1	-3.26076E1	2.6805E1	1.19979E-7	2.51369E-3	2.51369E-3	6.3074E-3	3.01981E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.80647E-1	-8.96907E-1	-9.04663E0	-9.04183E0	4.52995E-3	9.50575E-2	2.73246E1	-3.26838E1	-3.25812E1	2.68202E1	1.19883E-7	2.51271E-3	2.51271E-3	6.3245E-3	2.99981E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.8048E-1	-8.96668E-1	-9.04651E0	-9.04205E0	4.69685E-3	9.48668E-2	2.73604E1	-3.26819E1	-3.26098E1	2.68454E1	1.19757E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.80766E-1	-8.96311E-1	-9.04696E0	-9.04207E0	4.36306E-3	9.5129E-2	2.73253E1	-3.26774E1	-3.2637E1	2.68208E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.80957E-1	-8.9674E-1	-9.04689E0	-9.04155E0	4.43459E-3	9.52005E-2	2.73063E1	-3.26585E1	-3.2611E1	2.68166E1	1.19978E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.02813E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.8098E-1	-8.96835E-1	-9.04696E0	-9.04162E0	4.55379E-3	9.49621E-2	2.73421E1	-3.26533E1	-3.26141E1	2.68343E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.80885E-1	-8.96597E-1	-9.04646E0	-9.04167E0	4.52995E-3	9.49383E-2	2.7267E1	-3.26722E1	-3.25873E1	2.68118E1	1.19979E-7	2.52301E-3	2.52301E-3	6.34907E-3	3.00741E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.80885E-1	-8.96692E-1	-9.0467E0	-9.04181E0	4.26769E-3	9.47714E-2	2.72626E1	-3.26219E1	-3.26319E1	2.68647E1	1.20045E-7	2.51158E-3	2.51158E-3	6.30171E-3	3.01881E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.81076E-1	-8.96931E-1	-9.04672E0	-9.04181E0	4.45843E-3	9.50575E-2	2.73051E1	-3.26744E1	-3.25741E1	2.68196E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
