[Scan]
initial_time=2016-01-18T19:32:25
final_time=2016-01-18T19:32:47
ip_count=19
run=1024
dataset=5
scan=362
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08719E-4
ql1_vset=
ql1_vmon=-8.80837E-1
ql1_imon=1.3433E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.88677E-9
ql3_vset=
ql3_vmon=-9.0467E0
ql3_imon=2.15101E-10
ql4_vset=
ql4_vmon=-9.04174E0
ql4_imon=8.67844E-12
mult1=-9.36713E-9
mult2=-2.63078E-9
rf_tmon=-5.16132E-3
rf_agc=3.28769E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.7048E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.37691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19394E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=3.15723E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=1.08715E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41267E0
lens1_imon=2.86888E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64717E1
os_ef1alow_imon=2.975E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.348E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84427E1
cs_ef1a_imon=3.05002E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.37761E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.23964E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14887E1
os_ea1_imon=2.36877E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63556E1
os_ef1bup_imon=3.09106E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21847E0
cs_ionrep_imon=9.37078E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.93555E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=1.97327E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.4083E-8
tplens_vset=1.4E-1
tplens_vmon=1.67742E0
tplens_imon=-4.36924E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25641E1
iondef3_imon=1.47932E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27095E1
iondef2_imon=1.58125E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.10465E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=8.46115E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.20135E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74719E1
cs_ef2b_imon=3.13282E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5618E0
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71387E1
cs_ef2a_imon=3.18978E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.38256E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.4303E-1
os_ef2bup_imon=-5.139E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11289E1
os_restr2_imon=3.45694E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02104E1
cs_anode2_imon=2.08261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.106E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.13587E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=8.01945E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15727E0
cs_ionaccel_imon=-9.67183E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47389E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56488E1
einzel_imon=7.81169E-6
window_vset=0.0E0
window_vmon=2.39043E-1
window_imon=-7.40723E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39229E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-5.28417E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.85591E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.67729E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.4418E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57092E0
defgridb_imon=5.98002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.4275E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08184E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66885E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31869E1
cs_fil1_imon=8.08925E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.74052E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69536E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73711E-2
os_fil2_imon=-2.40812E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09749E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.07885E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31495E-1
cs_fil2_imon=-2.31376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51955E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22825E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.19601E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23235E-1
res40_imon=-2.38256E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09325E0	-8.8098E-1	-8.96502E-1	-9.0471E0	-9.04152E0	4.52995E-3	9.50336E-2	2.72957E1	-3.26567E1	-3.26384E1	2.68642E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.02253E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.81195E-1	-8.96287E-1	-9.04682E0	-9.04143E0	4.29153E-3	9.51052E-2	2.73186E1	-3.26554E1	-3.26364E1	2.68412E1	1.19595E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.81195E-1	-8.96573E-1	-9.04672E0	-9.04148E0	4.3869E-3	9.48668E-2	2.7308E1	-3.26631E1	-3.26098E1	2.68111E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.0201E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.8098E-1	-8.96811E-1	-9.04686E0	-9.04152E0	4.29153E-3	9.50813E-2	2.73222E1	-3.26408E1	-3.26183E1	2.68701E1	1.20042E-7	2.51182E-3	2.51182E-3	6.35514E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.81004E-1	-8.96645E-1	-9.04708E0	-9.04188E0	4.52995E-3	9.52721E-2	2.73369E1	-3.26567E1	-3.26152E1	2.68286E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.80885E-1	-8.9674E-1	-9.04684E0	-9.04214E0	4.48227E-3	9.52005E-2	2.73231E1	-3.26789E1	-3.26164E1	2.68406E1	1.19809E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.80933E-1	-8.96573E-1	-9.04706E0	-9.0421E0	4.36306E-3	9.51529E-2	2.73904E1	-3.27005E1	-3.26254E1	2.68466E1	1.19913E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.80957E-1	-8.9674E-1	-9.04696E0	-9.04212E0	4.41074E-3	9.51529E-2	2.72974E1	-3.26585E1	-3.25888E1	2.68454E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09317E0	-8.8079E-1	-8.96907E-1	-9.04658E0	-9.04179E0	4.48227E-3	9.51529E-2	2.73216E1	-3.26401E1	-3.26223E1	2.68346E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.02769E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09302E0	-8.81314E-1	-8.9674E-1	-9.04639E0	-9.04171E0	4.50611E-3	9.54866E-2	2.73219E1	-3.26801E1	-3.26458E1	2.68346E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02659E-1
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-2.09325E0	-8.81171E-1	-8.96788E-1	-9.04634E0	-9.0414E0	4.33922E-3	9.54151E-2	2.73069E1	-3.26885E1	-3.26284E1	2.6819E1	1.19766E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.02545E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.81028E-1	-8.96573E-1	-9.04653E0	-9.04138E0	4.45843E-3	9.50336E-2	2.73033E1	-3.26384E1	-3.26272E1	2.68154E1	1.19757E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.80933E-1	-8.96525E-1	-9.0466E0	-9.04155E0	4.673E-3	9.50098E-2	2.73243E1	-3.26855E1	-3.26134E1	2.68346E1	1.20158E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.80957E-1	-8.9643E-1	-9.04644E0	-9.04174E0	4.50611E-3	9.48429E-2	2.72997E1	-3.26176E1	-3.26182E1	2.68389E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.80909E-1	-8.96287E-1	-9.04636E0	-9.04183E0	4.24385E-3	9.49144E-2	2.73147E1	-3.26416E1	-3.26458E1	2.68298E1	1.19902E-7	2.52061E-3	2.52061E-3	6.35059E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.80694E-1	-8.96454E-1	-9.04632E0	-9.04188E0	4.24385E-3	9.49144E-2	2.73311E1	-3.26555E1	-3.26142E1	2.68226E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.99E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.80861E-1	-8.9643E-1	-9.04665E0	-9.04169E0	4.62532E-3	9.48191E-2	2.73267E1	-3.26627E1	-3.26302E1	2.6837E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.80814E-1	-8.96525E-1	-9.04624E0	-9.04145E0	4.673E-3	9.47475E-2	2.72919E1	-3.26356E1	-3.26308E1	2.6837E1	1.19705E-7	2.52099E-3	2.52099E-3	6.35692E-3	2.9952E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.80408E-1	-8.96859E-1	-9.04646E0	-9.04174E0	4.52995E-3	9.49383E-2	2.73117E1	-3.26735E1	-3.26284E1	2.68322E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.80837E-1	-8.96597E-1	-9.0467E0	-9.04174E0	4.22001E-3	9.4986E-2	2.73327E1	-3.27095E1	-3.25641E1	2.68412E1	1.19601E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02396E-1
