[Scan]
initial_time=2016-01-18T19:32:55
final_time=2016-01-18T19:33:16
ip_count=19
run=1024
dataset=5
scan=363
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.80671E-1
ql1_imon=1.3435E-8
ql2_vset=
ql2_vmon=-8.97145E-1
ql2_imon=1.87749E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=2.25043E-10
ql4_vset=
ql4_vmon=-9.042E0
ql4_imon=-2.02656E-13
mult1=-9.42843E-9
mult2=-2.81733E-9
rf_tmon=-5.06398E-3
rf_agc=3.31026E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.66152E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2006E1
lens5a_imon=2.02545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.04948E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.17371E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=1.11546E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35486E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.36676E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=3.03928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.37462E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15016E1
os_ea1_imon=2.35673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=9.29645E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.93583E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02079E1
cs_anode1_imon=1.95737E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.38995E-8
tplens_vset=1.4E-1
tplens_vmon=1.66621E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26036E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98109E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.07413E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=8.61688E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54233E0
os_ea2_imon=-9.89072E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00924E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10261E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.4848E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.46707E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29079E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73305E1
iondef1_imon=1.10414E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68285E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.18484E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=8.02016E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.01574E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-7.31025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82708E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.43472E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.81178E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.3073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.4442E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0778E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66696E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31855E1
cs_fil1_imon=6.96263E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04945E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69544E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.68646E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.19655E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44856E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02124E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.36467E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.80289E-1	-8.96668E-1	-9.04679E0	-9.04169E0	4.26769E-3	9.45807E-2	2.72955E1	-3.26729E1	-3.25761E1	2.68214E1	1.20158E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01738E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.80527E-1	-8.96835E-1	-9.04672E0	-9.0415E0	4.22001E-3	9.47237E-2	2.73381E1	-3.26536E1	-3.25936E1	2.68196E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.80742E-1	-8.96454E-1	-9.04658E0	-9.0414E0	4.17233E-3	9.48906E-2	2.73134E1	-3.26543E1	-3.26183E1	2.68383E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.80694E-1	-8.96525E-1	-9.04698E0	-9.042E0	4.17233E-3	9.49383E-2	2.73898E1	-3.27041E1	-3.26302E1	2.68593E1	1.19779E-7	2.52134E-3	2.52134E-3	6.31012E-3	3.01414E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.80623E-1	-8.96573E-1	-9.0467E0	-9.04207E0	4.14848E-3	9.47952E-2	2.73249E1	-3.2635E1	-3.2635E1	2.68358E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.8079E-1	-8.96716E-1	-9.04682E0	-9.04198E0	4.24385E-3	9.50098E-2	2.73063E1	-3.26689E1	-3.25825E1	2.6822E1	1.20017E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.80623E-1	-8.96692E-1	-9.0466E0	-9.04181E0	4.24385E-3	9.5129E-2	2.73358E1	-3.26508E1	-3.26573E1	2.68238E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.80718E-1	-8.96645E-1	-9.04665E0	-9.04138E0	4.19617E-3	9.53674E-2	2.72943E1	-3.26855E1	-3.26452E1	2.6846E1	1.20209E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.97394E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.80718E-1	-8.96668E-1	-9.04655E0	-9.0416E0	3.95775E-3	9.51767E-2	2.73303E1	-3.26545E1	-3.26383E1	2.68501E1	1.19872E-7	2.51136E-3	2.51136E-3	6.32978E-3	2.98819E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.80527E-1	-8.96454E-1	-9.04672E0	-9.04157E0	4.02927E-3	9.49144E-2	2.73267E1	-3.26563E1	-3.26687E1	2.68325E1	1.19851E-7	2.51459E-3	2.51459E-3	6.30998E-3	3.01301E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.8048E-1	-8.96621E-1	-9.04655E0	-9.04188E0	4.14848E-3	9.49621E-2	2.73219E1	-3.26422E1	-3.26482E1	2.68444E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.80575E-1	-8.96835E-1	-9.04644E0	-9.04179E0	3.91006E-3	9.51052E-2	2.73025E1	-3.26883E1	-3.26148E1	2.68258E1	1.20142E-7	2.51445E-3	2.51445E-3	6.33123E-3	3.00348E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.80456E-1	-8.96788E-1	-9.04677E0	-9.04205E0	4.14848E-3	9.48429E-2	2.73171E1	-3.26768E1	-3.26197E1	2.68357E1					
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0934E0	-8.80218E-1	-8.96573E-1	-9.0466E0	-9.04181E0	4.45843E-3	9.52482E-2	2.73438E1	-3.26575E1	-3.26333E1	2.6822E1	1.19777E-7	2.51819E-3	2.51819E-3	6.32673E-3	2.98853E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.8079E-1	-8.96215E-1	-9.04682E0	-9.04157E0	4.07696E-3	9.53436E-2	2.73273E1	-3.26837E1	-3.2599E1	2.68172E1	1.19876E-7	2.51344E-3	2.51344E-3	6.31182E-3	2.98771E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.80551E-1	-8.96668E-1	-9.04667E0	-9.04181E0	3.83854E-3	9.5129E-2	2.72986E1	-3.27062E1	-3.25776E1	2.68334E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.80575E-1	-8.96621E-1	-9.04634E0	-9.04136E0	4.12464E-3	9.48191E-2	2.73123E1	-3.26428E1	-3.26272E1	2.68319E1	1.19902E-7	2.52492E-3	2.52492E-3	6.33436E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.80575E-1	-8.96716E-1	-9.04644E0	-9.0414E0	4.29153E-3	9.48191E-2	2.73228E1	-3.26585E1	-3.26343E1	2.68388E1	1.19544E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.02769E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.80957E-1	-8.96883E-1	-9.04658E0	-9.04169E0	4.31538E-3	9.49383E-2	2.72847E1	-3.26476E1	-3.26248E1	2.68436E1	1.19705E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.02922E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.80671E-1	-8.97145E-1	-9.04672E0	-9.042E0	4.29153E-3	9.47952E-2	2.73305E1	-3.26573E1	-3.26036E1	2.68285E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02124E-1
