[Scan]
initial_time=2016-01-18T19:33:24
final_time=2016-01-18T19:33:45
ip_count=19
run=1024
dataset=5
scan=364
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08743E-4
ql1_vset=
ql1_vmon=-8.81004E-1
ql1_imon=1.34162E-8
ql2_vset=
ql2_vmon=-8.96549E-1
ql2_imon=1.91976E-9
ql3_vset=
ql3_vmon=-9.04646E0
ql3_imon=1.67584E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=-1.15871E-11
mult1=-9.56114E-9
mult2=-2.94361E-9
rf_tmon=-3.18709E-3
rf_agc=3.43139E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.69852E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69738E0
bslens_imon=2.33948E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.99353E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=3.17227E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.0246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04069E1
cs_ea1_imon=1.11031E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37496E0
lens1_imon=2.72881E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98775E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03534E1
cs_ea2_imon=1.34355E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84694E1
cs_ef1a_imon=3.02739E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.3768E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14831E1
os_ea1_imon=2.36087E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=9.28262E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91942E2
cs_nozzle_imon=1.93784E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=1.95161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.40029E-8
tplens_vset=1.4E-1
tplens_vmon=1.67268E0
tplens_imon=-2.63296E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26205E1
iondef3_imon=1.5202E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26952E1
iondef2_imon=1.55877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.08653E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=8.47872E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.16224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.14956E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57955E0
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11222E0
os_ef2alow_imon=-2.32398E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44876E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.43824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72984E1
iondef1_imon=1.10707E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.10985E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=8.01682E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-8.60768E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=2.85217E-1
window_imon=-7.09401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.31574E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.38281E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24216E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.42726E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07539E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66675E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31855E1
cs_fil1_imon=7.00467E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02963E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69697E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.28026E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22751E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.55087E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.80456E-1	-8.96764E-1	-9.04663E0	-9.04191E0	4.36306E-3	9.51767E-2	2.73747E1	-3.26903E1	-3.2613E1	2.68169E1	1.20217E-7	2.51918E-3	2.51918E-3	6.3074E-3	3.0012E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.80551E-1	-8.96835E-1	-9.04691E0	-9.04171E0	4.673E-3	9.50575E-2	2.72904E1	-3.26627E1	-3.2637E1	2.68406E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.80671E-1	-8.96788E-1	-9.04689E0	-9.04121E0	4.673E-3	9.50575E-2	2.73517E1	-3.26402E1	-3.26343E1	2.68123E1	1.19872E-7	2.52027E-3	2.52027E-3	6.29624E-3	3.0201E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.80766E-1	-8.9643E-1	-9.04717E0	-9.04188E0	4.673E-3	9.47237E-2	2.73393E1	-3.26467E1	-3.26567E1	2.6846E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.03804E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.80837E-1	-8.96525E-1	-9.04708E0	-9.04145E0	4.76837E-3	9.48191E-2	2.73435E1	-3.26681E1	-3.26362E1	2.68106E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.80957E-1	-8.96478E-1	-9.04675E0	-9.0416E0	4.69685E-3	9.50813E-2	2.72907E1	-3.26663E1	-3.26302E1	2.68364E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.81076E-1	-8.96859E-1	-9.04696E0	-9.04188E0	4.57764E-3	9.49144E-2	2.73063E1	-3.26362E1	-3.26056E1	2.68227E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.80957E-1	-8.96668E-1	-9.04658E0	-9.04157E0	4.41074E-3	9.5129E-2	2.73281E1	-3.2606E1	-3.26673E1	2.68334E1	1.19646E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.80933E-1	-8.96621E-1	-9.04644E0	-9.04207E0	4.76837E-3	9.49621E-2	2.73358E1	-3.26417E1	-3.26388E1	2.68592E1	1.19749E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.80885E-1	-8.96859E-1	-9.04655E0	-9.042E0	4.64916E-3	9.49383E-2	2.72913E1	-3.26549E1	-3.26284E1	2.68526E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.80814E-1	-8.96788E-1	-9.04655E0	-9.0421E0	4.52995E-3	9.47237E-2	2.73187E1	-3.26868E1	-3.26101E1	2.68196E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.80861E-1	-8.96716E-1	-9.04663E0	-9.04195E0	4.60148E-3	9.47237E-2	2.73009E1	-3.26464E1	-3.26248E1	2.6825E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.80909E-1	-8.96764E-1	-9.04667E0	-9.04174E0	4.36306E-3	9.48906E-2	2.72992E1	-3.26732E1	-3.26178E1	2.68436E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.80718E-1	-8.96883E-1	-9.04667E0	-9.04179E0	4.31538E-3	9.46522E-2	2.72865E1	-3.26236E1	-3.25996E1	2.68563E1	1.20069E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.80718E-1	-8.96788E-1	-9.04653E0	-9.04152E0	4.1008E-3	9.4986E-2	2.73339E1	-3.26578E1	-3.26193E1	2.68286E1	1.19809E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.80814E-1	-8.96478E-1	-9.0467E0	-9.04181E0	4.48227E-3	9.4676E-2	2.73482E1	-3.26266E1	-3.2675E1	2.6822E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.80909E-1	-8.96621E-1	-9.04641E0	-9.04181E0	4.64916E-3	9.49383E-2	2.73446E1	-3.26526E1	-3.26313E1	2.68442E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.8098E-1	-8.96263E-1	-9.04653E0	-9.04179E0	4.62532E-3	9.52005E-2	2.72968E1	-3.26579E1	-3.26325E1	2.68259E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.97963E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.81004E-1	-8.96335E-1	-9.04632E0	-9.04183E0	4.31538E-3	9.54628E-2	2.73246E1	-3.26472E1	-3.26585E1	2.6822E1	1.20158E-7	2.51203E-3	2.51203E-3	6.29128E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.81004E-1	-8.96549E-1	-9.04646E0	-9.04198E0	4.24385E-3	9.51529E-2	2.72984E1	-3.26952E1	-3.26205E1	2.6837E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
