[Scan]
initial_time=2016-01-18T19:33:53
final_time=2016-01-18T19:34:15
ip_count=19
run=1024
dataset=5
scan=365
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.80408E-1
ql1_imon=1.34089E-8
ql2_vset=
ql2_vmon=-8.96549E-1
ql2_imon=1.90228E-9
ql3_vset=
ql3_vmon=-9.04639E0
ql3_imon=2.02692E-10
ql4_vset=
ql4_vmon=-9.0421E0
ql4_imon=-1.71304E-11
mult1=-1.04387E-8
mult2=-2.90425E-9
rf_tmon=-3.74938E-3
rf_agc=3.4403E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.64572E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66313E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19598E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05388E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54001E1
cs_ef1b_imon=3.16254E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.07859E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34432E0
lens1_imon=3.01E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64999E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.3623E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.37763E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.34573E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63335E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=9.62509E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.936E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=1.95197E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.40491E-8
tplens_vset=1.4E-1
tplens_vmon=1.66306E0
tplens_imon=-2.77716E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.53029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98094E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.13213E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=8.41022E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55191E0
os_ea2_imon=-7.71595E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.3456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47879E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.45626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7349E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.01169E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.9909E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-7.70669E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47489E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.91825E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.87281E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.47654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.7952E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.66903E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=6.27609E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.45021E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07828E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67027E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=6.96263E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.94191E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69643E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.08305E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72817E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09309E0	-8.80837E-1	-8.9674E-1	-9.04615E0	-9.04183E0	5.07832E-3	9.54151E-2	2.73193E1	-3.26443E1	-3.2577E1	2.6836E1	1.19705E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01871E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.80909E-1	-8.96692E-1	-9.04615E0	-9.04205E0	4.81606E-3	9.5129E-2	2.73329E1	-3.26666E1	-3.26417E1	2.6829E1	1.19646E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.80957E-1	-8.96549E-1	-9.04644E0	-9.04183E0	5.05447E-3	9.49621E-2	2.73007E1	-3.2679E1	-3.26379E1	2.68356E1	1.19831E-7	2.52197E-3	2.52197E-3	6.30221E-3	3.03227E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.80814E-1	-8.96549E-1	-9.04667E0	-9.04176E0	4.76837E-3	9.51052E-2	2.73611E1	-3.2649E1	-3.26065E1	2.68436E1	1.19775E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.02426E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.80694E-1	-8.96764E-1	-9.04667E0	-9.04157E0	4.79221E-3	9.52005E-2	2.73504E1	-3.26573E1	-3.26255E1	2.68473E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.8048E-1	-8.96931E-1	-9.04679E0	-9.04143E0	4.8399E-3	9.4986E-2	2.73265E1	-3.26621E1	-3.26309E1	2.68154E1	1.19967E-7	2.52364E-3	2.52364E-3	6.32273E-3	2.99906E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.81124E-1	-8.9674E-1	-9.04694E0	-9.04174E0	4.50611E-3	9.48906E-2	2.73045E1	-3.26795E1	-3.2599E1	2.68381E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.80599E-1	-8.96716E-1	-9.04672E0	-9.04176E0	4.48227E-3	9.47952E-2	2.73187E1	-3.26425E1	-3.26178E1	2.68308E1	1.20031E-7	2.51804E-3	2.51804E-3	6.29624E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.80575E-1	-8.96478E-1	-9.04648E0	-9.04181E0	4.26769E-3	9.49144E-2	2.73195E1	-3.2653E1	-3.26098E1	2.68388E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.80337E-1	-8.96597E-1	-9.04691E0	-9.04179E0	4.31538E-3	9.51529E-2	2.73345E1	-3.26903E1	-3.26957E1	2.68388E1	1.19497E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.80098E-1	-8.96835E-1	-9.04698E0	-9.04183E0	4.36306E-3	9.52005E-2	2.73116E1	-3.26502E1	-3.26372E1	2.68298E1	1.19902E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.8048E-1	-8.96478E-1	-9.04691E0	-9.04171E0	4.33922E-3	9.50098E-2	2.73291E1	-3.26717E1	-3.26032E1	2.68118E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.80265E-1	-8.96573E-1	-9.04665E0	-9.04179E0	4.57764E-3	9.52244E-2	2.73339E1	-3.26681E1	-3.26338E1	2.68466E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0934E0	-8.80337E-1	-8.96597E-1	-9.04684E0	-9.04176E0	4.26769E-3	9.52005E-2	2.73316E1	-3.26508E1	-3.26189E1	2.68319E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02659E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.80289E-1	-8.96454E-1	-9.04708E0	-9.04198E0	4.57764E-3	9.52005E-2	2.72947E1	-3.26848E1	-3.26376E1	2.68298E1	1.198E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.80265E-1	-8.96645E-1	-9.04689E0	-9.04179E0	4.48227E-3	9.50336E-2	2.7324E1	-3.27281E1	-3.2606E1	2.6828E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.80384E-1	-8.96955E-1	-9.04679E0	-9.04186E0	4.64916E-3	9.52005E-2	2.73003E1	-3.26771E1	-3.26128E1	2.6825E1	1.20069E-7	2.51662E-3	2.51662E-3	6.28006E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.8048E-1	-8.96502E-1	-9.04663E0	-9.04169E0	4.52995E-3	9.50813E-2	2.73434E1	-3.26661E1	-3.26254E1	2.68244E1	1.20069E-7	2.52318E-3	2.52318E-3	6.34588E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.80694E-1	-8.96406E-1	-9.04632E0	-9.04179E0	4.17233E-3	9.52005E-2	2.73249E1	-3.26428E1	-3.26206E1	2.68511E1	1.19595E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.80408E-1	-8.96549E-1	-9.04639E0	-9.0421E0	4.36306E-3	9.4986E-2	2.7349E1	-3.26783E1	-3.26296E1	2.68214E1	1.19902E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02511E-1
