[Scan]
initial_time=2016-01-18T19:34:52
final_time=2016-01-18T19:35:14
ip_count=19
run=1024
dataset=5
scan=367
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.80527E-1
ql1_imon=1.34215E-8
ql2_vset=
ql2_vmon=-8.96692E-1
ql2_imon=1.9227E-9
ql3_vset=
ql3_vmon=-9.04655E0
ql3_imon=1.9871E-10
ql4_vset=
ql4_vmon=-9.0416E0
ql4_imon=-2.83122E-11
mult1=-9.61758E-9
mult2=-2.74677E-9
rf_tmon=-5.32944E-3
rf_agc=3.26248E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.65825E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68509E0
bslens_imon=2.39106E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54008E1
cs_ef1b_imon=3.16148E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02425E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.049E1
cs_ea1_imon=1.10201E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3584E0
lens1_imon=2.79102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64853E1
os_ef1alow_imon=2.98208E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03673E1
cs_ea2_imon=1.35898E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.04542E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.37439E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11318E1
os_restr1_imon=4.26795E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.36098E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63974E1
os_ef1bup_imon=3.09672E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.25752E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.9365E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01874E1
cs_anode1_imon=1.96902E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.39168E-8
tplens_vset=1.4E-1
tplens_vmon=1.69157E0
tplens_imon=-2.31638E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26838E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.09871E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23971E0
ionrepsh_imon=8.49654E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.16667E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74655E1
cs_ef2b_imon=3.13883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57359E0
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71482E1
cs_ef2a_imon=3.16148E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.44271E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.50107E-1
os_ef2bup_imon=-5.14254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11365E1
os_restr2_imon=3.44809E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01721E1
cs_anode2_imon=2.08225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73458E1
iondef1_imon=1.10803E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.10883E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.07357E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.98664E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47477E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56576E1
einzel_imon=7.85415E-6
window_vset=0.0E0
window_vmon=2.56145E-1
window_imon=-7.76107E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.8678E1
mask2_imon=-5.67339E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.84883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.00645E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.43493E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07948E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66869E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31854E1
cs_fil1_imon=6.80362E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00236E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69492E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.47299E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.20794E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30732E-1
cs_fil2_imon=-2.49658E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51365E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22878E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.84646E-1
res40_imon=-2.40379E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.80647E-1	-8.96311E-1	-9.04703E0	-9.04155E0	4.81606E-3	9.51529E-2	2.73706E1	-3.26868E1	-3.26219E1	2.68406E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02396E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.80527E-1	-8.96144E-1	-9.04644E0	-9.04186E0	4.76837E-3	9.52244E-2	2.73772E1	-3.26741E1	-3.26044E1	2.68352E1	1.19851E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.80432E-1	-8.96072E-1	-9.04665E0	-9.0421E0	4.76837E-3	9.5129E-2	2.72961E1	-3.2617E1	-3.26242E1	2.6816E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.01609E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.80432E-1	-8.96001E-1	-9.0467E0	-9.04169E0	4.64916E-3	9.53197E-2	2.73393E1	-3.26838E1	-3.26354E1	2.68322E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.80504E-1	-8.96239E-1	-9.04672E0	-9.0415E0	4.3869E-3	9.52244E-2	2.73394E1	-3.26731E1	-3.26064E1	2.68538E1	1.20226E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.8048E-1	-8.96263E-1	-9.04677E0	-9.04181E0	4.52995E-3	9.51529E-2	2.72786E1	-3.26478E1	-3.26378E1	2.68424E1	1.19913E-7	2.51116E-3	2.51116E-3	6.34588E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.80337E-1	-8.96764E-1	-9.04651E0	-9.04183E0	4.64916E-3	9.51529E-2	2.73082E1	-3.26621E1	-3.26076E1	2.68256E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.80361E-1	-8.97121E-1	-9.04663E0	-9.04155E0	4.48227E-3	9.51052E-2	2.73057E1	-3.26789E1	-3.26308E1	2.68376E1	1.19809E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.80456E-1	-8.96978E-1	-9.04658E0	-9.04143E0	4.41074E-3	9.49383E-2	2.73454E1	-3.26789E1	-3.26122E1	2.68665E1	1.20174E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.80504E-1	-8.97288E-1	-9.04655E0	-9.04155E0	4.79221E-3	9.51052E-2	2.72918E1	-3.26724E1	-3.26741E1	2.6807E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.8079E-1	-8.96692E-1	-9.04617E0	-9.04155E0	4.86374E-3	9.46999E-2	2.73231E1	-3.26428E1	-3.26398E1	2.68346E1	1.20209E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.80671E-1	-8.96454E-1	-9.04658E0	-9.04164E0	4.79221E-3	9.49383E-2	2.73063E1	-3.26218E1	-3.2617E1	2.6852E1	1.19965E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.80599E-1	-8.96764E-1	-9.04632E0	-9.04109E0	4.55379E-3	9.50336E-2	2.73381E1	-3.26561E1	-3.26408E1	2.68406E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99686E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09309E0	-8.81028E-1	-8.9674E-1	-9.04648E0	-9.04164E0	4.72069E-3	9.48429E-2	2.73033E1	-3.26573E1	-3.26134E1	2.68419E1	1.19902E-7	2.51847E-3	2.51847E-3	6.28592E-3	2.9892E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.80265E-1	-8.96883E-1	-9.04679E0	-9.04195E0	5.00679E-3	9.47952E-2	2.73015E1	-3.26536E1	-3.26272E1	2.68296E1	1.19925E-7	2.52362E-3	2.52362E-3	6.32418E-3	2.98554E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.80647E-1	-8.96931E-1	-9.0467E0	-9.04162E0	4.79221E-3	9.49144E-2	2.72426E1	-3.26789E1	-3.27155E1	2.68364E1	1.20055E-7	2.51096E-3	2.51096E-3	6.29128E-3	2.9841E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.80623E-1	-8.96764E-1	-9.04663E0	-9.04148E0	4.52995E-3	9.51529E-2	2.72727E1	-3.26446E1	-3.26284E1	2.68394E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.80504E-1	-8.96835E-1	-9.04634E0	-9.04152E0	4.79221E-3	9.53197E-2	2.73317E1	-3.26503E1	-3.26115E1	2.68292E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.80623E-1	-8.96931E-1	-9.04622E0	-9.04191E0	4.45843E-3	9.51052E-2	2.72835E1	-3.26597E1	-3.26374E1	2.68482E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.80527E-1	-8.96692E-1	-9.04655E0	-9.0416E0	4.50611E-3	9.52244E-2	2.73458E1	-3.26838E1	-3.26325E1	2.6822E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
