[Scan]
initial_time=2016-01-18T19:35:51
final_time=2016-01-18T19:36:12
ip_count=19
run=1024
dataset=5
scan=369
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.80432E-1
ql1_imon=1.34223E-8
ql2_vset=
ql2_vmon=-8.96239E-1
ql2_imon=1.89011E-9
ql3_vset=
ql3_vmon=-9.04694E0
ql3_imon=1.83117E-10
ql4_vset=
ql4_vmon=-9.04222E0
ql4_imon=-3.93391E-13
mult1=-1.0222E-8
mult2=-2.7226E-9
rf_tmon=-4.03777E-3
rf_agc=3.38743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.70894E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=2.00386E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=3.16686E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04569E1
cs_ea1_imon=1.10591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43332E0
lens1_imon=2.72023E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0349E1
cs_ea2_imon=1.35437E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.04649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.36903E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.3532E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24266E0
cs_ionrep_imon=9.47342E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93703E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.38973E-8
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2635E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98056E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=4.14021E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29516E0
ionrepsh_imon=8.59565E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.16631E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5677E0
os_ea2_imon=-7.23616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71492E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03774E0
os_ef2alow_imon=-2.32398E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.62295E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.44977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28371E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73508E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.10684E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=8.01473E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-8.57164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56639E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.67197E-1
window_imon=-6.73362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82668E2
mask1_imon=2.3929E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.42764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.44369E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.17634E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38193E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.4409E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08038E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66904E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31831E1
cs_fil1_imon=7.15484E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.79174E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69518E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73711E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.22439E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22782E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72216E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.80885E-1	-8.96788E-1	-9.04675E0	-9.04179E0	4.3869E-3	9.49144E-2	2.73322E1	-3.26431E1	-3.26124E1	2.6843E1	1.20055E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.0148E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.8079E-1	-8.96335E-1	-9.04689E0	-9.04174E0	4.69685E-3	9.49383E-2	2.73198E1	-3.26505E1	-3.26168E1	2.68188E1	1.19991E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00171E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.80408E-1	-8.96597E-1	-9.04694E0	-9.04188E0	4.69685E-3	9.48429E-2	2.73045E1	-3.26509E1	-3.26005E1	2.68447E1					
4.0E0	1.2E1	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.80647E-1	-8.96406E-1	-9.04679E0	-9.04174E0	4.673E-3	9.49621E-2	2.73538E1	-3.26717E1	-3.26218E1	2.68184E1	1.19902E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.80861E-1	-8.96239E-1	-9.04686E0	-9.04181E0	4.52995E-3	9.51529E-2	2.7324E1	-3.26779E1	-3.26166E1	2.68424E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.8048E-1	-8.96645E-1	-9.04675E0	-9.042E0	4.57764E-3	9.50575E-2	2.73339E1	-3.26392E1	-3.26308E1	2.6902E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.80384E-1	-8.96335E-1	-9.04684E0	-9.04171E0	4.43459E-3	9.49144E-2	2.73151E1	-3.26549E1	-3.26095E1	2.68202E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.80456E-1	-8.96764E-1	-9.04665E0	-9.04207E0	4.45843E-3	9.48429E-2	2.73186E1	-3.26554E1	-3.26174E1	2.68454E1	1.19861E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.8017E-1	-8.96573E-1	-9.04667E0	-9.04198E0	4.76837E-3	9.51052E-2	2.72992E1	-3.26531E1	-3.26242E1	2.68304E1	1.19653E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.80647E-1	-8.96645E-1	-9.04675E0	-9.04205E0	4.41074E-3	9.5129E-2	2.73273E1	-3.26663E1	-3.2593E1	2.6831E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01223E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.80718E-1	-8.96478E-1	-9.04696E0	-9.04207E0	4.22001E-3	9.51052E-2	2.73213E1	-3.26705E1	-3.26446E1	2.68232E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.80694E-1	-8.96168E-1	-9.04672E0	-9.04212E0	4.45843E-3	9.52005E-2	2.72528E1	-3.26693E1	-3.26194E1	2.68076E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.80647E-1	-8.9643E-1	-9.04663E0	-9.04171E0	4.43459E-3	9.52244E-2	2.72949E1	-3.26843E1	-3.26188E1	2.68256E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.03449E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.80909E-1	-8.96311E-1	-9.04648E0	-9.04171E0	4.26769E-3	9.52005E-2	2.73123E1	-3.26687E1	-3.26476E1	2.68322E1	1.19965E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.02133E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.80694E-1	-8.96621E-1	-9.04632E0	-9.04179E0	4.17233E-3	9.53197E-2	2.73198E1	-3.26325E1	-3.26248E1	2.68418E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.80599E-1	-8.96311E-1	-9.04655E0	-9.04171E0	4.1008E-3	9.53197E-2	2.73008E1	-3.26058E1	-3.2593E1	2.68512E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00197E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.80647E-1	-8.96525E-1	-9.04667E0	-9.04188E0	4.22001E-3	9.4676E-2	2.73352E1	-3.26927E1	-3.26042E1	2.68418E1	1.19978E-7	2.52473E-3	2.52473E-3	6.31299E-3	3.00676E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.80647E-1	-8.96335E-1	-9.04636E0	-9.04202E0	4.3869E-3	9.48906E-2	2.73393E1	-3.26783E1	-3.26242E1	2.68569E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.80742E-1	-8.96239E-1	-9.04672E0	-9.04222E0	4.26769E-3	9.5129E-2	2.73139E1	-3.26384E1	-3.26337E1	2.68334E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.03804E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.80432E-1	-8.96239E-1	-9.04694E0	-9.04222E0	4.29153E-3	9.54866E-2	2.73508E1	-3.2635E1	-3.26464E1	2.68286E1	1.20017E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00824E-1
