[Scan]
initial_time=2016-01-18T19:37:19
final_time=2016-01-18T19:37:39
ip_count=19
run=1024
dataset=5
scan=372
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08713E-4
ql1_vset=
ql1_vmon=-8.80575E-1
ql1_imon=1.34015E-8
ql2_vset=
ql2_vmon=-8.96311E-1
ql2_imon=1.9212E-9
ql3_vset=
ql3_vmon=-9.04667E0
ql3_imon=1.78337E-10
ql4_vset=
ql4_vmon=-9.04167E0
ql4_imon=-3.04699E-11
mult1=-1.05953E-8
mult2=-2.92621E-9
rf_tmon=-3.12452E-3
rf_agc=3.50519E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=1.64964E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.30612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=2.00704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12433E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=3.15929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05106E1
cs_ea1_imon=1.08786E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38141E0
lens1_imon=2.87596E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03578E1
cs_ea2_imon=1.37172E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84028E1
cs_ef1a_imon=3.03856E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.36831E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10925E1
os_restr1_imon=4.26643E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15093E1
os_ea1_imon=2.36558E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=9.40971E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91942E2
cs_nozzle_imon=1.93668E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0223E1
cs_anode1_imon=1.97323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.38977E-8
tplens_vset=1.4E-1
tplens_vmon=1.65382E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27041E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.08813E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24915E0
ionrepsh_imon=8.41868E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.17162E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75096E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55472E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70855E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32863E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.44004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29327E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.08279E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.08786E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.97748E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15357E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47579E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=3.05039E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86987E1
mask2_imon=-9.36451E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.15865E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.65251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.36747E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47052E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.43688E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66584E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31784E1
cs_fil1_imon=7.34104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.44336E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69469E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.40962E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.29273E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2344E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36777E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.80313E-1	-8.96573E-1	-9.04686E0	-9.04179E0	4.36306E-3	9.48906E-2	2.72913E1	-3.26218E1	-3.26278E1	2.6843E1	1.198E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01995E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.80146E-1	-8.96645E-1	-9.04675E0	-9.04202E0	4.36306E-3	9.51529E-2	2.73526E1	-3.26591E1	-3.26392E1	2.68052E1	1.20122E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.80384E-1	-8.96478E-1	-9.04651E0	-9.04243E0	4.07696E-3	9.48429E-2	2.73353E1	-3.26476E1	-3.26118E1	2.68423E1	1.19819E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00676E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.80456E-1	-8.96621E-1	-9.04675E0	-9.04191E0	4.31538E-3	9.46522E-2	2.73186E1	-3.26682E1	-3.2645E1	2.6835E1	1.20064E-7	2.51854E-3	2.51854E-3	6.31251E-3	3.01853E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.80504E-1	-8.96955E-1	-9.0467E0	-9.04226E0	4.12464E-3	9.46999E-2	2.73124E1	-3.26272E1	-3.2615E1	2.6834E1	1.201E-7	2.51838E-3	2.51838E-3	6.33592E-3	3.01065E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.8048E-1	-8.96311E-1	-9.04691E0	-9.04217E0	4.22001E-3	9.48906E-2	2.73069E1	-3.26372E1	-3.2616E1	2.6834E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.80504E-1	-8.96287E-1	-9.04679E0	-9.04183E0	3.95775E-3	9.48906E-2	2.73098E1	-3.26349E1	-3.26378E1	2.68534E1	1.20122E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.80599E-1	-8.96287E-1	-9.04701E0	-9.04195E0	4.31538E-3	9.50336E-2	2.73257E1	-3.26526E1	-3.26071E1	2.68328E1	1.20293E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.02368E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.8079E-1	-8.96478E-1	-9.0467E0	-9.04171E0	4.36306E-3	9.48906E-2	2.73004E1	-3.26478E1	-3.2616E1	2.68334E1	1.20209E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.80718E-1	-8.96525E-1	-9.04677E0	-9.04183E0	4.45843E-3	9.47237E-2	2.73646E1	-3.26831E1	-3.25978E1	2.68528E1	1.19913E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.80909E-1	-8.96597E-1	-9.04691E0	-9.04214E0	4.24385E-3	9.45807E-2	2.73249E1	-3.26681E1	-3.26741E1	2.68328E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.81076E-1	-8.96311E-1	-9.0467E0	-9.04219E0	4.12464E-3	9.48429E-2	2.73243E1	-3.26476E1	-3.26332E1	2.68532E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.80814E-1	-8.96549E-1	-9.0467E0	-9.04179E0	4.55379E-3	9.52005E-2	2.7373E1	-3.26585E1	-3.26104E1	2.68322E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.80551E-1	-8.96525E-1	-9.04658E0	-9.04191E0	4.81606E-3	9.49144E-2	2.73392E1	-3.26629E1	-3.26187E1	2.68198E1	1.20122E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.80575E-1	-8.96835E-1	-9.04672E0	-9.04179E0	4.8399E-3	9.48906E-2	2.73479E1	-3.26909E1	-3.25997E1	2.68214E1	1.20113E-7	2.51956E-3	2.51956E-3	6.3023E-3	3.01365E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09271E0	-8.80885E-1	-8.96645E-1	-9.04694E0	-9.04212E0	4.69685E-3	9.51767E-2	2.73198E1	-3.26744E1	-3.26325E1	2.68142E1	1.19713E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.0041E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.81004E-1	-8.96573E-1	-9.04691E0	-9.04183E0	4.36306E-3	9.4986E-2	2.73412E1	-3.26505E1	-3.26303E1	2.6843E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.80599E-1	-8.96287E-1	-9.04708E0	-9.04155E0	4.19617E-3	9.5129E-2	2.73153E1	-3.26278E1	-3.26386E1	2.68184E1	1.20045E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.01065E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.80551E-1	-8.96049E-1	-9.04684E0	-9.04214E0	4.29153E-3	9.4986E-2	2.73243E1	-3.2644E1	-3.26056E1	2.68514E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.80575E-1	-8.96311E-1	-9.04667E0	-9.04167E0	4.05312E-3	9.50336E-2	2.73159E1	-3.27041E1	-3.26104E1	2.68334E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
