[Scan]
initial_time=2016-01-18T19:37:46
final_time=2016-01-18T19:38:06
ip_count=19
run=1024
dataset=5
scan=373
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.80766E-1
ql1_imon=1.33845E-8
ql2_vset=
ql2_vmon=-8.96215E-1
ql2_imon=1.89501E-9
ql3_vset=
ql3_vmon=-9.04679E0
ql3_imon=1.8239E-10
ql4_vset=
ql4_vmon=-9.04212E0
ql4_imon=-1.42336E-11
mult1=-9.87283E-9
mult2=-2.98808E-9
rf_tmon=-3.19061E-3
rf_agc=3.45653E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.67812E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.34669E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05179E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=3.17401E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02334E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=1.09733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41041E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98634E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.36554E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.37281E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11564E1
os_restr1_imon=4.26524E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.37962E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.08817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=9.51334E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.9608E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.3835E-8
tplens_vset=1.4E-1
tplens_vmon=1.64924E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26825E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03012E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.05964E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27974E0
ionrepsh_imon=8.52198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74588E1
cs_ef2b_imon=3.133E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56693E0
os_ea2_imon=-5.26458E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00864E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71072E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09337E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.4936E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11118E1
os_restr2_imon=3.4555E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73562E1
iondef1_imon=1.09157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68358E1
iondef4_imon=1.1038E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.1029E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=8.0057E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-8.47382E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47463E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.806E-6
window_vset=0.0E0
window_vmon=2.53018E-1
window_imon=-8.2653E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86263E1
mask2_imon=-6.90995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92698E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=6.81323E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.43051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07833E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66722E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31809E1
cs_fil1_imon=7.38588E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70851E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68666E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.55914E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.173E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.28026E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33397E-1
cs_fil2_imon=-2.29849E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42582E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22701E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.3682E-1
res40_imon=-2.43557E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.80527E-1	-8.96358E-1	-9.04684E0	-9.0415E0	4.14848E-3	9.51529E-2	2.73175E1	-3.26744E1	-3.26178E1	2.68334E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.80766E-1	-8.96382E-1	-9.04665E0	-9.04207E0	4.05312E-3	9.50098E-2	2.73222E1	-3.26884E1	-3.26474E1	2.68394E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.97901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.80647E-1	-8.96645E-1	-9.04667E0	-9.04162E0	4.45843E-3	9.50575E-2	2.73057E1	-3.26521E1	-3.26196E1	2.68418E1	1.19766E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00942E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.80504E-1	-8.96215E-1	-9.04679E0	-9.04124E0	4.43459E-3	9.45807E-2	2.73039E1	-3.26396E1	-3.26419E1	2.68325E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.80647E-1	-8.96215E-1	-9.04694E0	-9.04164E0	4.62532E-3	9.46522E-2	2.73225E1	-3.26627E1	-3.26398E1	2.68214E1	1.1974E-7	2.51814E-3	2.51814E-3	6.29157E-3	3.01104E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.80361E-1	-8.96287E-1	-9.04701E0	-9.04193E0	4.8399E-3	9.46045E-2	2.72889E1	-3.26496E1	-3.26161E1	2.68469E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.80265E-1	-8.96072E-1	-9.04701E0	-9.04174E0	4.69685E-3	9.49144E-2	2.72861E1	-3.26669E1	-3.26415E1	2.67983E1	1.20014E-7	2.52308E-3	2.52308E-3	6.31696E-3	3.00697E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.80289E-1	-8.96263E-1	-9.04694E0	-9.04171E0	4.55379E-3	9.48429E-2	2.73352E1	-3.26596E1	-3.26178E1	2.68382E1	1.19838E-7	2.51562E-3	2.51562E-3	6.31384E-3	3.00994E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.80456E-1	-8.96335E-1	-9.04691E0	-9.04186E0	4.79221E-3	9.48906E-2	2.73309E1	-3.26777E1	-3.25966E1	2.68453E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.80623E-1	-8.96263E-1	-9.04698E0	-9.04195E0	4.72069E-3	9.48429E-2	2.7361E1	-3.26627E1	-3.26518E1	2.68238E1	1.19965E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01347E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.80432E-1	-8.96215E-1	-9.04667E0	-9.04169E0	4.79221E-3	9.48429E-2	2.73143E1	-3.26474E1	-3.26236E1	2.68346E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.8048E-1	-8.97098E-1	-9.04677E0	-9.0415E0	4.43459E-3	9.50575E-2	2.73358E1	-3.26213E1	-3.26001E1	2.68227E1	1.19872E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.80694E-1	-8.96931E-1	-9.04672E0	-9.04181E0	4.69685E-3	9.4986E-2	2.73393E1	-3.26549E1	-3.26248E1	2.68442E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.03286E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80551E-1	-8.96597E-1	-9.0467E0	-9.04205E0	4.29153E-3	9.5129E-2	2.7321E1	-3.26402E1	-3.2613E1	2.68683E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.80623E-1	-8.96668E-1	-9.04653E0	-9.04214E0	4.3869E-3	9.50336E-2	2.73039E1	-3.26512E1	-3.25936E1	2.68226E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.02769E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.80599E-1	-8.96478E-1	-9.0466E0	-9.04181E0	4.64916E-3	9.49383E-2	2.73499E1	-3.26714E1	-3.258E1	2.68354E1	1.19913E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00824E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.80551E-1	-8.96382E-1	-9.04672E0	-9.042E0	4.72069E-3	9.48906E-2	2.73128E1	-3.26496E1	-3.2626E1	2.68226E1	1.20311E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.80742E-1	-8.96502E-1	-9.0467E0	-9.04207E0	4.62532E-3	9.5129E-2	2.7364E1	-3.26627E1	-3.26338E1	2.681E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.80718E-1	-8.96478E-1	-9.04684E0	-9.04186E0	4.673E-3	9.50336E-2	2.73169E1	-3.26496E1	-3.26537E1	2.68394E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.80766E-1	-8.96215E-1	-9.04679E0	-9.04212E0	4.41074E-3	9.49621E-2	2.73562E1	-3.26825E1	-3.26194E1	2.68358E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02253E-1
