[Scan]
initial_time=2016-01-18T19:41:54
final_time=2016-01-18T19:42:14
ip_count=19
run=1024
dataset=5
scan=382
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.80218E-1
ql1_imon=1.34542E-8
ql2_vset=
ql2_vmon=-8.96645E-1
ql2_imon=1.89409E-9
ql3_vset=
ql3_vmon=-9.04667E0
ql3_imon=1.81615E-10
ql4_vset=
ql4_vmon=-9.04186E0
ql4_imon=-3.0005E-11
mult1=-8.89755E-9
mult2=-2.16968E-9
rf_tmon=-7.87104E-3
rf_agc=3.06659E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.69165E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68416E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19322E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.16045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02085E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=1.10166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38398E0
lens1_imon=2.77568E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.34896E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=3.04785E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.36564E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1121E1
os_restr1_imon=4.26385E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.35943E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63253E1
os_ef1bup_imon=3.08365E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=9.44484E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93763E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02064E1
cs_anode1_imon=1.97192E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.38875E-8
tplens_vset=1.4E-1
tplens_vmon=1.64023E0
tplens_imon=-3.49815E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25876E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.07549E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=8.44267E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74449E1
cs_ef2b_imon=3.13995E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51165E0
os_ea2_imon=-8.29274E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.16984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09742E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36038E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11112E1
os_restr2_imon=3.44438E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.28018E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.09842E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.08642E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.97974E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-9.30788E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56428E1
einzel_imon=7.8755E-6
window_vset=0.0E0
window_vmon=2.41433E-1
window_imon=-7.32698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39164E-4
mask2_vset=0.0E0
mask2_vmon=-1.85533E1
mask2_imon=-4.44252E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=7.65318E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.81323E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59706E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.43011E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07856E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66586E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=6.99202E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01024E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69375E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.28026E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31899E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32736E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22827E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.95696E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80098E-1	-8.96621E-1	-9.04655E0	-9.04131E0	4.60148E-3	9.50575E-2	2.73228E1	-3.26596E1	-3.26284E1	2.68352E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.03027E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.80146E-1	-8.96478E-1	-9.04636E0	-9.04179E0	4.55379E-3	9.50575E-2	2.73039E1	-3.26826E1	-3.25977E1	2.68267E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.80432E-1	-8.96287E-1	-9.04648E0	-9.04205E0	4.50611E-3	9.53436E-2	2.73688E1	-3.2708E1	-3.26296E1	2.68376E1	1.20106E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.99941E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.80337E-1	-8.96668E-1	-9.04651E0	-9.04207E0	4.17233E-3	9.51052E-2	2.73087E1	-3.2653E1	-3.26266E1	2.68304E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.80504E-1	-8.96406E-1	-9.04634E0	-9.04229E0	4.41074E-3	9.53197E-2	2.73175E1	-3.26573E1	-3.26213E1	2.68508E1	1.19861E-7	2.52318E-3	2.52318E-3	6.27461E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.80313E-1	-8.96525E-1	-9.04655E0	-9.04222E0	4.07696E-3	9.52005E-2	2.73216E1	-3.26505E1	-3.26291E1	2.6822E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.80456E-1	-8.96668E-1	-9.04617E0	-9.04214E0	4.62532E-3	9.53436E-2	2.72974E1	-3.26779E1	-3.2616E1	2.68256E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.80527E-1	-8.96549E-1	-9.04634E0	-9.04207E0	4.52995E-3	9.50575E-2	2.73075E1	-3.26655E1	-3.2616E1	2.68364E1	1.198E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.04063E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09302E0	-8.80361E-1	-8.96263E-1	-9.04672E0	-9.04195E0	4.64916E-3	9.50575E-2	2.72931E1	-3.2632E1	-3.26392E1	2.68262E1	1.19965E-7	2.5188E-3	2.5188E-3	6.35692E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.80456E-1	-8.96406E-1	-9.04646E0	-9.04219E0	4.69685E-3	9.52005E-2	2.7321E1	-3.26119E1	-3.26107E1	2.68298E1	1.19705E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.8048E-1	-8.96668E-1	-9.04672E0	-9.04229E0	4.62532E-3	9.50098E-2	2.73381E1	-3.26626E1	-3.2649E1	2.6819E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.8017E-1	-8.96335E-1	-9.04644E0	-9.04207E0	4.74453E-3	9.49383E-2	2.73351E1	-3.26879E1	-3.26134E1	2.6819E1	1.20174E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.80551E-1	-8.96573E-1	-9.04655E0	-9.04229E0	4.76837E-3	9.52721E-2	2.72979E1	-3.26368E1	-3.26224E1	2.68226E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.80432E-1	-8.96573E-1	-9.04672E0	-9.04179E0	4.55379E-3	9.49144E-2	2.73051E1	-3.26645E1	-3.26332E1	2.67607E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.80742E-1	-8.96502E-1	-9.04665E0	-9.04214E0	4.57764E-3	9.52244E-2	2.72985E1	-3.26392E1	-3.2623E1	2.68232E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.8098E-1	-8.96978E-1	-9.04658E0	-9.04191E0	4.72069E-3	9.52721E-2	2.73075E1	-3.26378E1	-3.26089E1	2.68209E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01347E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.80432E-1	-8.96764E-1	-9.04675E0	-9.04186E0	4.81606E-3	9.48191E-2	2.72955E1	-3.26392E1	-3.2626E1	2.68118E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.80432E-1	-8.96597E-1	-9.04636E0	-9.04214E0	4.36306E-3	9.51529E-2	2.73016E1	-3.26844E1	-3.26443E1	2.6825E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.80122E-1	-8.96382E-1	-9.04684E0	-9.042E0	4.60148E-3	9.47952E-2	2.72967E1	-3.26446E1	-3.26398E1	2.68454E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.80218E-1	-8.96645E-1	-9.04667E0	-9.04186E0	4.69685E-3	9.50575E-2	2.72967E1	-3.25876E1	-3.26152E1	2.68334E1	1.19749E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00966E-1
