[Scan]
initial_time=2016-01-18T19:45:04
final_time=2016-01-18T19:45:24
ip_count=19
run=1024
dataset=5
scan=389
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.80814E-1
ql1_imon=1.34025E-8
ql2_vset=
ql2_vmon=-8.96215E-1
ql2_imon=1.95603E-9
ql3_vset=
ql3_vmon=-9.04658E0
ql3_imon=1.86896E-10
ql4_vset=
ql4_vmon=-9.04188E0
ql4_imon=-2.40564E-11
mult1=-9.98405E-9
mult2=-2.84868E-9
rf_tmon=-3.89008E-3
rf_agc=3.36984E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.69129E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19459E1
lens5a_imon=2.00987E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53939E1
cs_ef1b_imon=3.1615E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02309E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04221E1
cs_ea1_imon=1.08679E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37551E0
lens1_imon=2.71669E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.36747E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.03673E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.35895E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.28018E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14946E1
os_ea1_imon=2.36806E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63438E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=9.45218E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.9354E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=1.97574E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.36426E-8
tplens_vset=1.4E-1
tplens_vmon=1.65146E0
tplens_imon=-2.03323E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26708E1
iondef3_imon=1.50728E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26496E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98211E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=4.01078E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=8.64166E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74791E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56534E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00768E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.17957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07946E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.42988E-1
os_ef2bup_imon=-5.05939E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11025E1
os_restr2_imon=3.45203E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02099E1
cs_anode2_imon=2.07513E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73311E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68319E1
iondef4_imon=1.11874E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.05736E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.93552E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15679E0
cs_ionaccel_imon=-9.93342E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47598E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56672E1
einzel_imon=7.73302E-6
window_vset=0.0E0
window_vmon=2.31008E-1
window_imon=-5.90213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.86211E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.75681E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.12679E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48824E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.43063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08227E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65959E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31808E1
cs_fil1_imon=7.89558E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.88806E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6358E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73693E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32024E-1
cs_fil2_imon=-2.02626E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25206E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32087E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19876E-7
chamber_cvt_pmon=2.51793E-3
foreline_cvt_pmon=2.51793E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20602E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.8017E-1	-8.96597E-1	-9.04667E0	-9.04195E0	4.76837E-3	9.53197E-2	2.73405E1	-3.26861E1	-3.26152E1	2.68388E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02769E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.80241E-1	-8.96931E-1	-9.04689E0	-9.042E0	4.60148E-3	9.52005E-2	2.73442E1	-3.26543E1	-3.2593E1	2.68394E1	1.19902E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.80075E-1	-8.96478E-1	-9.04677E0	-9.04236E0	4.52995E-3	9.48191E-2	2.73254E1	-3.26515E1	-3.26254E1	2.68337E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.80194E-1	-8.9674E-1	-9.04698E0	-9.04202E0	4.52995E-3	9.52244E-2	2.73147E1	-3.26843E1	-3.2626E1	2.68346E1	1.1979E-7	2.51287E-3	2.51287E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.8017E-1	-8.96335E-1	-9.04689E0	-9.04198E0	4.50611E-3	9.52482E-2	2.73279E1	-3.26458E1	-3.26597E1	2.68202E1	1.198E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.80027E-1	-8.96263E-1	-9.04713E0	-9.04157E0	4.8399E-3	9.49144E-2	2.73399E1	-3.2626E1	-3.26272E1	2.68064E1	1.19713E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.80361E-1	-8.96096E-1	-9.04689E0	-9.0421E0	4.36306E-3	9.50098E-2	2.73006E1	-3.26545E1	-3.26467E1	2.68138E1	1.19697E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.79931E-1	-8.96573E-1	-9.04644E0	-9.042E0	4.57764E-3	9.49144E-2	2.73106E1	-3.26585E1	-3.26444E1	2.6855E1	1.20113E-7	2.52262E-3	2.52262E-3	6.31251E-3	3.01853E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.79836E-1	-8.96263E-1	-9.04655E0	-9.04169E0	4.48227E-3	9.50813E-2	2.73243E1	-3.26627E1	-3.26512E1	2.68809E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.02277E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.79669E-1	-8.96168E-1	-9.04679E0	-9.04214E0	4.57764E-3	9.52482E-2	2.73261E1	-3.26609E1	-3.26116E1	2.68502E1	1.20226E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.80289E-1	-8.96192E-1	-9.04691E0	-9.04188E0	4.55379E-3	9.52959E-2	2.7376E1	-3.26416E1	-3.26687E1	2.68328E1	1.2033E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.03712E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.80337E-1	-8.96049E-1	-9.04679E0	-9.04217E0	4.55379E-3	9.53436E-2	2.73291E1	-3.26518E1	-3.26194E1	2.68334E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.80265E-1	-8.96311E-1	-9.04689E0	-9.04193E0	4.69685E-3	9.49144E-2	2.7406E1	-3.27003E1	-3.25588E1	2.684E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.80432E-1	-8.96502E-1	-9.04708E0	-9.04222E0	4.93526E-3	9.49144E-2	2.73249E1	-3.26476E1	-3.26428E1	2.68202E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.80361E-1	-8.96549E-1	-9.04696E0	-9.0421E0	4.52995E-3	9.47952E-2	2.7324E1	-3.26756E1	-3.26278E1	2.68401E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9978E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.80456E-1	-8.96573E-1	-9.04684E0	-9.04198E0	4.69685E-3	9.48429E-2	2.73108E1	-3.27068E1	-3.25919E1	2.6847E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.80766E-1	-8.96287E-1	-9.0466E0	-9.04229E0	4.69685E-3	9.50098E-2	2.73408E1	-3.26747E1	-3.26202E1	2.68348E1	1.19782E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.00741E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.80742E-1	-8.96335E-1	-9.04684E0	-9.04179E0	4.55379E-3	9.52005E-2	2.73092E1	-3.2688E1	-3.25629E1	2.68221E1	1.19963E-7	2.51793E-3	2.51793E-3	6.30149E-3	2.99634E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.80623E-1	-8.96358E-1	-9.04651E0	-9.04207E0	4.57764E-3	9.51529E-2	2.73151E1	-3.27033E1	-3.2616E1	2.68328E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.80814E-1	-8.96215E-1	-9.04658E0	-9.04188E0	4.29153E-3	9.53674E-2	2.73311E1	-3.26496E1	-3.26708E1	2.68319E1	1.19876E-7	2.51793E-3	2.51793E-3	6.32087E-3	3.02253E-1
