[Scan]
initial_time=2016-01-18T19:45:31
final_time=2016-01-18T19:45:51
ip_count=19
run=1024
dataset=5
scan=390
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-8.80361E-1
ql1_imon=1.33649E-8
ql2_vset=
ql2_vmon=-8.96335E-1
ql2_imon=1.9559E-9
ql3_vset=
ql3_vmon=-9.0467E0
ql3_imon=1.74117E-10
ql4_vset=
ql4_vmon=-9.0421E0
ql4_imon=-9.54866E-12
mult1=-1.01377E-8
mult2=-2.80644E-9
rf_tmon=-4.4944E-3
rf_agc=3.28709E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.74962E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69317E0
bslens_imon=2.40797E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=2.01624E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04808E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.16218E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04718E1
cs_ea1_imon=1.09157E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=2.80452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.34644E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=3.05226E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.3541E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.27761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14807E1
os_ea1_imon=2.37169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=9.41961E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=1.96638E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.35817E-8
tplens_vset=1.4E-1
tplens_vmon=1.64684E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.56958E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.9822E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.05349E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=8.3958E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55011E0
os_ea2_imon=-7.3194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00803E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34665E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.44581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.08711E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7349E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68677E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.15862E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.9039E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-7.70669E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47496E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.78009E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=6.99347E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.41783E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07599E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66235E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31807E1
cs_fil1_imon=7.53326E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.59953E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68915E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.38596E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45457E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22691E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10348E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.80218E-1	-8.96168E-1	-9.04698E0	-9.04174E0	4.50611E-3	9.5129E-2	2.73352E1	-3.26531E1	-3.26142E1	2.68366E1	1.19925E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.01209E-1
2.0E0	4.8E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.80599E-1	-8.96645E-1	-9.04665E0	-9.04205E0	4.3869E-3	9.5129E-2	2.73225E1	-3.26873E1	-3.26224E1	2.68316E1	1.20055E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.80384E-1	-8.96597E-1	-9.04675E0	-9.04191E0	4.45843E-3	9.49383E-2	2.73358E1	-3.26667E1	-3.26254E1	2.68599E1	1.19913E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.8048E-1	-8.96549E-1	-9.0467E0	-9.04224E0	4.3869E-3	9.49621E-2	2.73273E1	-3.26741E1	-3.26302E1	2.68502E1	1.20363E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.80742E-1	-8.9643E-1	-9.04672E0	-9.04198E0	4.64916E-3	9.5129E-2	2.73328E1	-3.26791E1	-3.26001E1	2.68372E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.80694E-1	-8.9643E-1	-9.04686E0	-9.04171E0	4.50611E-3	9.52005E-2	2.7329E1	-3.26493E1	-3.26517E1	2.68325E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.80527E-1	-8.9643E-1	-9.0472E0	-9.04181E0	4.50611E-3	9.53436E-2	2.73177E1	-3.26554E1	-3.26194E1	2.6843E1	1.19925E-7	2.51915E-3	2.51915E-3	6.33538E-3	3.02813E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.8048E-1	-8.96382E-1	-9.0471E0	-9.04214E0	4.55379E-3	9.52005E-2	2.73147E1	-3.2644E1	-3.26374E1	2.68184E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.80098E-1	-8.96311E-1	-9.04675E0	-9.04212E0	4.55379E-3	9.5129E-2	2.73075E1	-3.26621E1	-3.26062E1	2.68376E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.80146E-1	-8.96311E-1	-9.04639E0	-9.04188E0	4.55379E-3	9.53436E-2	2.73255E1	-3.26446E1	-3.26254E1	2.68394E1	1.19978E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.79931E-1	-8.96335E-1	-9.04663E0	-9.0421E0	4.19617E-3	9.53436E-2	2.7349E1	-3.26819E1	-3.26002E1	2.6828E1	1.20278E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00824E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09302E0	-8.80265E-1	-8.96144E-1	-9.0467E0	-9.04179E0	4.33922E-3	9.51529E-2	2.73045E1	-3.26302E1	-3.26038E1	2.68106E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.80289E-1	-8.96144E-1	-9.04672E0	-9.04198E0	4.50611E-3	9.52721E-2	2.73014E1	-3.26327E1	-3.26034E1	2.68418E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80337E-1	-8.9612E-1	-9.04689E0	-9.04207E0	4.31538E-3	9.50098E-2	2.73196E1	-3.26764E1	-3.26191E1	2.68215E1	1.19925E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.99083E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.80313E-1	-8.9643E-1	-9.04686E0	-9.04214E0	4.45843E-3	9.52721E-2	2.73369E1	-3.26681E1	-3.26308E1	2.6828E1	1.19891E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.00348E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.80432E-1	-8.96406E-1	-9.04667E0	-9.04193E0	4.48227E-3	9.49144E-2	2.73167E1	-3.26891E1	-3.26346E1	2.68169E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01871E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.80432E-1	-8.96382E-1	-9.04682E0	-9.04171E0	4.52995E-3	9.48429E-2	2.73033E1	-3.26679E1	-3.26071E1	2.68273E1	1.20137E-7	2.52921E-3	2.52921E-3	6.30182E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80408E-1	-8.96215E-1	-9.04701E0	-9.04181E0	4.3869E-3	9.4986E-2	2.73411E1	-3.26693E1	-3.26008E1	2.68196E1	1.19876E-7	2.51578E-3	2.51578E-3	6.31817E-3	2.99302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.80504E-1	-8.96549E-1	-9.04651E0	-9.04219E0	4.74453E-3	9.50813E-2	2.73122E1	-3.2639E1	-3.26296E1	2.68545E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.80361E-1	-8.96335E-1	-9.0467E0	-9.0421E0	4.3869E-3	9.49383E-2	2.7349E1	-3.26639E1	-3.26146E1	2.68677E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
