[Scan]
initial_time=2016-01-18T19:45:58
final_time=2016-01-18T19:46:18
ip_count=19
run=1024
dataset=5
scan=391
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08725E-4
ql1_vset=
ql1_vmon=-8.80456E-1
ql1_imon=1.34315E-8
ql2_vset=
ql2_vmon=-8.96215E-1
ql2_imon=1.89923E-9
ql3_vset=
ql3_vmon=-9.0466E0
ql3_imon=1.68717E-10
ql4_vset=
ql4_vmon=-9.04164E0
ql4_imon=-3.34382E-11
mult1=-9.69223E-9
mult2=-2.7246E-9
rf_tmon=-3.82748E-3
rf_agc=3.33877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.6866E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.64236E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19565E1
lens5a_imon=2.01023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54163E1
cs_ef1b_imon=3.1802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04599E1
cs_ea1_imon=1.09317E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34896E0
lens1_imon=2.75916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.36181E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84688E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.34757E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.26175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.36488E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63203E1
os_ef1bup_imon=3.11064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19252E0
cs_ionrep_imon=9.53005E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02073E1
cs_anode1_imon=1.95665E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.36239E-8
tplens_vset=1.4E-1
tplens_vmon=1.70396E0
tplens_imon=-1.6439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98325E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.06941E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=8.47177E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.14791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56652E0
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00757E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70957E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.30956E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44275E-1
os_ef2bup_imon=-5.05939E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.45626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.28052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01413E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72847E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.12954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71774E1
olens3_imon=5.05381E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.88961E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17159E0
cs_ionaccel_imon=-1.13827E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=8.0122E-6
window_vset=0.0E0
window_vmon=2.80412E-1
window_imon=-6.76965E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.85017E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=6.95336E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.49678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.30022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34059E0
defgridb_imon=5.89508E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.41849E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31762E1
cs_fil1_imon=7.43114E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04344E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68747E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61048E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52052E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.851E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22615E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.30771E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-8.80003E-1	-8.96096E-1	-9.0466E0	-9.04188E0	4.72069E-3	9.52244E-2	2.73231E1	-3.26747E1	-3.25906E1	2.6828E1	1.19809E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.97963E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.79955E-1	-8.96096E-1	-9.04689E0	-9.04212E0	4.74453E-3	9.48906E-2	2.73165E1	-3.26753E1	-3.26278E1	2.68322E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.80194E-1	-8.9612E-1	-9.04682E0	-9.04157E0	4.57764E-3	9.4986E-2	2.7324E1	-3.26856E1	-3.26219E1	2.68418E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.80337E-1	-8.96239E-1	-9.04667E0	-9.0416E0	4.22001E-3	9.4986E-2	2.73617E1	-3.2659E1	-3.26236E1	2.6816E1	1.1979E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.80289E-1	-8.96168E-1	-9.04629E0	-9.04176E0	4.50611E-3	9.5129E-2	2.73075E1	-3.26272E1	-3.25948E1	2.68268E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.80146E-1	-8.95953E-1	-9.04655E0	-9.04224E0	4.60148E-3	9.52959E-2	2.73015E1	-3.26392E1	-3.26188E1	2.68472E1	1.19653E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.80098E-1	-8.96001E-1	-9.04651E0	-9.04217E0	4.62532E-3	9.52721E-2	2.72985E1	-3.26795E1	-3.26194E1	2.68442E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.80122E-1	-8.96239E-1	-9.04655E0	-9.04226E0	4.48227E-3	9.52005E-2	2.73234E1	-3.26714E1	-3.26349E1	2.6825E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.80051E-1	-8.96287E-1	-9.04655E0	-9.042E0	4.52995E-3	9.52721E-2	2.73279E1	-3.26567E1	-3.26446E1	2.68142E1	1.19757E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.80122E-1	-8.96215E-1	-9.04648E0	-9.04191E0	4.673E-3	9.52721E-2	2.73163E1	-3.26455E1	-3.26478E1	2.68406E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.80098E-1	-8.96358E-1	-9.04672E0	-9.04222E0	4.52995E-3	9.52005E-2	2.73357E1	-3.26861E1	-3.26104E1	2.68304E1	1.20174E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.80098E-1	-8.96144E-1	-9.04682E0	-9.04181E0	4.57764E-3	9.50813E-2	2.73429E1	-3.26524E1	-3.26266E1	2.68569E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-8.79931E-1	-8.96049E-1	-9.04677E0	-9.04193E0	4.45843E-3	9.52482E-2	2.72985E1	-3.26597E1	-3.26512E1	2.68196E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.80313E-1	-8.96192E-1	-9.04672E0	-9.04186E0	4.31538E-3	9.5129E-2	2.73454E1	-3.26596E1	-3.26243E1	2.68328E1	1.1979E-7	2.51498E-3	2.51498E-3	6.32858E-3	2.9972E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.80218E-1	-8.96096E-1	-9.04665E0	-9.04226E0	4.14848E-3	9.51052E-2	2.7314E1	-3.26546E1	-3.26279E1	2.68438E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.80313E-1	-8.96144E-1	-9.0466E0	-9.04193E0	4.43459E-3	9.52005E-2	2.73265E1	-3.26511E1	-3.26132E1	2.68519E1	1.2006E-7	2.51296E-3	2.51296E-3	6.31902E-3	3.0147E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.79908E-1	-8.96645E-1	-9.04651E0	-9.04188E0	4.22001E-3	9.50098E-2	2.73195E1	-3.26356E1	-3.26338E1	2.68322E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.03449E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.80098E-1	-8.96573E-1	-9.04655E0	-9.04186E0	4.26769E-3	9.47237E-2	2.73346E1	-3.26885E1	-3.25989E1	2.68241E1	1.20031E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01209E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.80218E-1	-8.96311E-1	-9.04648E0	-9.04179E0	4.41074E-3	9.48906E-2	2.73532E1	-3.26951E1	-3.25707E1	2.68241E1	1.20209E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.80456E-1	-8.96215E-1	-9.0466E0	-9.04164E0	4.48227E-3	9.49383E-2	2.72847E1	-3.26663E1	-3.2641E1	2.67974E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02253E-1
