[Scan]
initial_time=2016-01-18T19:46:52
final_time=2016-01-18T19:47:12
ip_count=19
run=1024
dataset=5
scan=393
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.80837E-1
ql1_imon=1.34212E-8
ql2_vset=
ql2_vmon=-8.96382E-1
ql2_imon=1.89441E-9
ql3_vset=
ql3_vmon=-9.04696E0
ql3_imon=1.89137E-10
ql4_vset=
ql4_vmon=-9.04162E0
ql4_imon=-5.81384E-11
mult1=-1.04806E-8
mult2=-2.65662E-9
rf_tmon=-4.09065E-3
rf_agc=3.3781E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.66694E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65668E0
bslens_imon=2.47514E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19353E1
lens5a_imon=1.98825E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05004E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=3.17965E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.0209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04442E1
cs_ea1_imon=1.102E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40045E0
lens1_imon=2.70737E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03713E1
cs_ea2_imon=1.36907E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84366E1
cs_ef1a_imon=3.0404E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.35033E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.27419E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14964E1
os_ea1_imon=2.37178E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63926E1
os_ef1bup_imon=3.10315E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26405E0
cs_ionrep_imon=9.54806E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02173E1
cs_anode1_imon=1.966E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.34954E-8
tplens_vset=1.4E-1
tplens_vmon=1.679E0
tplens_imon=-2.33129E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26626E1
iondef3_imon=1.5091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.57638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.9825E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.02702E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27202E0
ionrepsh_imon=8.57814E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33948E1
lens5b_imon=2.18155E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74445E1
cs_ef2b_imon=3.13603E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58622E0
os_ea2_imon=-6.36125E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.15616E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06966E0
os_ef2alow_imon=-2.44216E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64719E-1
os_ef2bup_imon=-5.08288E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11325E1
os_restr2_imon=3.44909E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.29177E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01692E1
cs_anode2_imon=2.08914E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.11122E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.11003E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.02816E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.90592E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15139E0
cs_ionaccel_imon=-8.95316E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47485E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56551E1
einzel_imon=7.90594E-6
window_vset=0.0E0
window_vmon=2.54356E-1
window_imon=-8.21497E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39067E-4
mask2_vset=0.0E0
mask2_vmon=-1.86601E1
mask2_imon=-6.13461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.09252E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.69977E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.20522E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41597E0
defgridb_imon=6.18407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.44674E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07989E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66112E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=7.48914E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.61424E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6896E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66224E-2
os_fil2_imon=-2.63863E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49464E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30616E-1
cs_fil2_imon=-1.96195E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37669E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22891E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.37419E-1
res40_imon=-2.42539E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.80289E-1	-8.96215E-1	-9.04684E0	-9.0421E0	4.36306E-3	9.49144E-2	2.73302E1	-3.26652E1	-3.26334E1	2.68176E1	1.19683E-7	2.52405E-3	2.52405E-3	6.31779E-3	3.00494E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.80337E-1	-8.96263E-1	-9.04663E0	-9.04222E0	4.57764E-3	9.50813E-2	2.73149E1	-3.2686E1	-3.26395E1	2.68418E1	1.20208E-7	2.51158E-3	2.51158E-3	6.33592E-3	3.01065E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.80194E-1	-8.96168E-1	-9.04653E0	-9.04231E0	4.64916E-3	9.51052E-2	2.72985E1	-3.26392E1	-3.26104E1	2.68406E1	1.20191E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.0201E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.80265E-1	-8.96573E-1	-9.04694E0	-9.04217E0	4.31538E-3	9.51529E-2	2.73117E1	-3.26741E1	-3.26242E1	2.68316E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.80098E-1	-8.96668E-1	-9.04675E0	-9.04248E0	4.14848E-3	9.51052E-2	2.73093E1	-3.26512E1	-3.26188E1	2.68316E1	1.19861E-7	2.51334E-3	2.51334E-3	6.35692E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.80313E-1	-8.96502E-1	-9.04717E0	-9.04207E0	4.69685E-3	9.52959E-2	2.73267E1	-3.26493E1	-3.26084E1	2.68516E1	1.20017E-7	2.52977E-3	2.52977E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.80432E-1	-8.96454E-1	-9.04703E0	-9.04214E0	4.41074E-3	9.52005E-2	2.73185E1	-3.26381E1	-3.26184E1	2.68512E1	1.19991E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.01862E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.8017E-1	-8.96597E-1	-9.04698E0	-9.04202E0	4.60148E-3	9.49621E-2	2.7301E1	-3.26472E1	-3.25865E1	2.68292E1	1.19829E-7	2.51952E-3	2.51952E-3	6.3131E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.80218E-1	-8.96382E-1	-9.04698E0	-9.04219E0	4.57764E-3	9.49383E-2	2.73123E1	-3.26633E1	-3.25749E1	2.68274E1	1.19705E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.80384E-1	-8.96549E-1	-9.0467E0	-9.04222E0	4.31538E-3	9.50575E-2	2.73224E1	-3.2654E1	-3.26523E1	2.68468E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.8017E-1	-8.96573E-1	-9.04715E0	-9.04212E0	4.22001E-3	9.47952E-2	2.73286E1	-3.26712E1	-3.26095E1	2.68207E1	1.19622E-7	2.51723E-3	2.51723E-3	6.3275E-3	2.99101E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.80384E-1	-8.96955E-1	-9.04706E0	-9.04229E0	4.45843E-3	9.50336E-2	2.73458E1	-3.26726E1	-3.26101E1	2.68418E1	1.19895E-7	2.51758E-3	2.51758E-3	6.3074E-3	3.00363E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.80504E-1	-8.96335E-1	-9.04698E0	-9.04212E0	4.76837E-3	9.50336E-2	2.73253E1	-3.26566E1	-3.26401E1	2.68364E1	1.20106E-7	2.51096E-3	2.51096E-3	6.28592E-3	3.00966E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.80098E-1	-8.96573E-1	-9.04691E0	-9.04183E0	4.45843E-3	9.50098E-2	2.73201E1	-3.26723E1	-3.26657E1	2.68322E1	1.19819E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.01209E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.79955E-1	-8.96668E-1	-9.04665E0	-9.04217E0	4.673E-3	9.49621E-2	2.73493E1	-3.26791E1	-3.26443E1	2.68298E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.80265E-1	-8.96955E-1	-9.04675E0	-9.04179E0	4.57764E-3	9.52482E-2	2.73305E1	-3.26826E1	-3.26738E1	2.68308E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01738E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.80098E-1	-8.96335E-1	-9.04691E0	-9.04195E0	4.33922E-3	9.5129E-2	2.72925E1	-3.27197E1	-3.26056E1	2.68316E1	1.19601E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.80551E-1	-8.95953E-1	-9.04675E0	-9.04179E0	4.36306E-3	9.52005E-2	2.73305E1	-3.26626E1	-3.26608E1	2.684E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.80837E-1	-8.96049E-1	-9.04665E0	-9.0421E0	4.43459E-3	9.51052E-2	2.73333E1	-3.26909E1	-3.26182E1	2.68316E1	1.19697E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.80837E-1	-8.96382E-1	-9.04696E0	-9.04162E0	4.36306E-3	9.4986E-2	2.73039E1	-3.26573E1	-3.26626E1	2.68337E1	1.20158E-7	2.51203E-3	2.51203E-3	6.33436E-3	2.9892E-1
