[Scan]
initial_time=2016-01-18T19:48:13
final_time=2016-01-18T19:48:32
ip_count=19
run=1024
dataset=5
scan=396
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.80122E-1
ql1_imon=1.34301E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.95789E-9
ql3_vset=
ql3_vmon=-9.04696E0
ql3_imon=1.45984E-10
ql4_vset=
ql4_vmon=-9.04174E0
ql4_imon=-4.62174E-11
mult1=-9.45141E-9
mult2=-2.77251E-9
rf_tmon=-4.03777E-3
rf_agc=3.35559E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.69506E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.55578E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=3.1647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04195E1
cs_ea1_imon=1.10923E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.79731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.35437E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.04181E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.35504E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.28085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=2.3652E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=9.5566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01563E1
cs_anode1_imon=1.95449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.37856E-8
tplens_vset=1.4E-1
tplens_vmon=1.65705E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.51299E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.54151E-2
ql6_imon=4.05672E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=8.71664E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52968E0
os_ea2_imon=-7.86015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00749E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08279E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38869E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.44329E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73429E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.11657E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.09639E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.92748E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-9.18431E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-3.92252E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.7397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.63298E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.21698E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54893E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.45177E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07449E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66382E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31826E1
cs_fil1_imon=6.62626E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.85181E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6876E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6541E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4272E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22708E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42183E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.80194E-1	-8.96335E-1	-9.04658E0	-9.0414E0	4.72069E-3	9.50575E-2	2.73329E1	-3.26741E1	-3.25999E1	2.6803E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9943E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.80313E-1	-8.96549E-1	-9.04655E0	-9.042E0	4.57764E-3	9.48429E-2	2.73309E1	-3.26296E1	-3.26639E1	2.68424E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.80146E-1	-8.96525E-1	-9.04667E0	-9.04183E0	4.45843E-3	9.51529E-2	2.73594E1	-3.26531E1	-3.26065E1	2.68268E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.80218E-1	-8.9674E-1	-9.04696E0	-9.04183E0	4.8399E-3	9.50336E-2	2.73299E1	-3.2639E1	-3.26189E1	2.68331E1	1.20158E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.80027E-1	-8.96716E-1	-9.04698E0	-9.04179E0	4.52995E-3	9.50336E-2	2.73249E1	-3.26675E1	-3.25936E1	2.6834E1	1.19851E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.8017E-1	-8.96502E-1	-9.04684E0	-9.0421E0	4.55379E-3	9.54866E-2	2.73213E1	-3.26332E1	-3.2602E1	2.68202E1	1.20017E-7	2.51007E-3	2.51007E-3	6.29645E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.80408E-1	-8.96549E-1	-9.0466E0	-9.04176E0	4.55379E-3	9.5439E-2	2.7334E1	-3.26649E1	-3.25653E1	2.6837E1	1.19913E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.80051E-1	-8.96311E-1	-9.04667E0	-9.04195E0	4.48227E-3	9.53197E-2	2.73039E1	-3.26536E1	-3.26242E1	2.68316E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.80218E-1	-8.96502E-1	-9.04675E0	-9.04188E0	4.36306E-3	9.5129E-2	2.73195E1	-3.26861E1	-3.26284E1	2.68346E1	1.20055E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.80241E-1	-8.96478E-1	-9.04641E0	-9.04188E0	4.62532E-3	9.50098E-2	2.73231E1	-3.26422E1	-3.26615E1	2.68112E1	1.19913E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.02659E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.80408E-1	-8.96549E-1	-9.0466E0	-9.04171E0	4.673E-3	9.48906E-2	2.73249E1	-3.26651E1	-3.26242E1	2.68376E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.80551E-1	-8.96502E-1	-9.04641E0	-9.04193E0	4.52995E-3	9.48668E-2	2.73021E1	-3.2647E1	-3.26062E1	2.68388E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.80384E-1	-8.96478E-1	-9.04663E0	-9.04183E0	4.50611E-3	9.4986E-2	2.73594E1	-3.26638E1	-3.26166E1	2.68516E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.80313E-1	-8.96525E-1	-9.04655E0	-9.04205E0	4.45843E-3	9.49144E-2	2.73247E1	-3.26468E1	-3.25979E1	2.68194E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.80194E-1	-8.96192E-1	-9.04648E0	-9.04164E0	4.43459E-3	9.4986E-2	2.73139E1	-3.26685E1	-3.26313E1	2.68406E1	1.20137E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.03887E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.80384E-1	-8.96192E-1	-9.04641E0	-9.0416E0	4.55379E-3	9.47952E-2	2.7349E1	-3.26723E1	-3.25743E1	2.6828E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.80289E-1	-8.96358E-1	-9.04663E0	-9.04164E0	4.48227E-3	9.51529E-2	2.73399E1	-3.27041E1	-3.26206E1	2.6822E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.80432E-1	-8.96168E-1	-9.04677E0	-9.04181E0	4.69685E-3	9.4986E-2	2.73175E1	-3.26791E1	-3.26172E1	2.6801E1	1.20122E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.80265E-1	-8.96001E-1	-9.04694E0	-9.04195E0	4.48227E-3	9.51529E-2	2.73623E1	-3.2698E1	-3.26655E1	2.68134E1	1.20004E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.80122E-1	-8.96168E-1	-9.04696E0	-9.04174E0	4.81606E-3	9.54151E-2	2.73429E1	-3.26621E1	-3.26188E1	2.68478E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00041E-1
