[Scan]
initial_time=2016-01-18T19:49:06
final_time=2016-01-18T19:49:26
ip_count=19
run=1024
dataset=5
scan=398
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.80027E-1
ql1_imon=1.33715E-8
ql2_vset=
ql2_vmon=-8.96335E-1
ql2_imon=1.91981E-9
ql3_vset=
ql3_vmon=-9.04655E0
ql3_imon=1.2728E-10
ql4_vset=
ql4_vmon=-9.04222E0
ql4_imon=-2.321E-11
mult1=-1.02914E-8
mult2=-2.62919E-9
rf_tmon=-4.99909E-3
rf_agc=3.32737E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.69693E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6845E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.194E1
lens5a_imon=2.00315E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=3.1683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04528E1
cs_ea1_imon=1.08715E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38967E0
lens1_imon=2.55388E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65101E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.34765E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84736E1
cs_ef1a_imon=3.04937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.36044E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.26715E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14863E1
os_ea1_imon=2.3939E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22201E0
cs_ionrep_imon=9.54067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93675E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=1.95341E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.37766E-8
tplens_vset=1.4E-1
tplens_vmon=1.67034E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26449E1
iondef2_imon=1.55364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98268E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.10143E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25151E0
ionrepsh_imon=8.76554E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56888E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0966E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40671E-1
os_ef2bup_imon=-5.10984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.43824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73358E1
iondef1_imon=1.11759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.11044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.09902E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.92184E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-7.49045E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.4197E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.43826E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.35874E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.30376E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66541E0
defgridb_imon=6.10036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33363E1
os_fil1_imon=9.43495E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66185E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31815E1
cs_fil1_imon=7.42514E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.85781E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68875E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57249E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4408E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.04128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70084E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.03027E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.92038E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.80146E-1	-8.96502E-1	-9.04675E0	-9.04231E0	4.69685E-3	9.50336E-2	2.73141E1	-3.26687E1	-3.25641E1	2.68352E1	1.198E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.99941E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.79955E-1	-8.96239E-1	-9.04717E0	-9.04224E0	4.57764E-3	9.4986E-2	2.73526E1	-3.26717E1	-3.26134E1	2.68328E1	1.19913E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.79979E-1	-8.96335E-1	-9.0471E0	-9.04205E0	4.45843E-3	9.48668E-2	2.73097E1	-3.26573E1	-3.25884E1	2.68198E1	1.19882E-7	2.51809E-3	2.51809E-3	6.31827E-3	3.02064E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.80122E-1	-8.96144E-1	-9.04698E0	-9.04202E0	4.3869E-3	9.50336E-2	2.73147E1	-3.26398E1	-3.2629E1	2.68358E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.80146E-1	-8.96072E-1	-9.04689E0	-9.04226E0	4.29153E-3	9.52005E-2	2.73231E1	-3.26718E1	-3.26376E1	2.68383E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.03545E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-8.80218E-1	-8.96239E-1	-9.04689E0	-9.04217E0	3.86238E-3	9.47714E-2	2.73247E1	-3.2675E1	-3.26438E1	2.68292E1	1.20092E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.01356E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.80218E-1	-8.96311E-1	-9.04715E0	-9.04205E0	4.29153E-3	9.49144E-2	2.73027E1	-3.26596E1	-3.26349E1	2.68346E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.02277E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.8017E-1	-8.9643E-1	-9.04703E0	-9.0421E0	4.24385E-3	9.48906E-2	2.73161E1	-3.26695E1	-3.2604E1	2.68322E1	1.20311E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.80194E-1	-8.96549E-1	-9.04679E0	-9.04236E0	4.26769E-3	9.49144E-2	2.73488E1	-3.26703E1	-3.2639E1	2.68587E1	1.20084E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.02545E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.80075E-1	-8.96502E-1	-9.04665E0	-9.04207E0	4.29153E-3	9.50813E-2	2.73303E1	-3.26554E1	-3.2635E1	2.68436E1	1.20311E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.79931E-1	-8.96144E-1	-9.04679E0	-9.04198E0	4.19617E-3	9.52244E-2	2.73177E1	-3.26903E1	-3.26795E1	2.68262E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.79622E-1	-8.96239E-1	-9.04694E0	-9.04193E0	4.29153E-3	9.53197E-2	2.73399E1	-3.26344E1	-3.26482E1	2.68418E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.79955E-1	-8.9612E-1	-9.04677E0	-9.04198E0	4.3869E-3	9.50575E-2	2.73484E1	-3.26633E1	-3.26308E1	2.68262E1	1.19705E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.79836E-1	-8.96335E-1	-9.04639E0	-9.04183E0	4.41074E-3	9.54151E-2	2.73287E1	-3.26844E1	-3.26024E1	2.68233E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.79788E-1	-8.96502E-1	-9.04682E0	-9.04191E0	4.41074E-3	9.53197E-2	2.73544E1	-3.26807E1	-3.26044E1	2.68448E1	1.20055E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.79979E-1	-8.9643E-1	-9.04663E0	-9.04181E0	4.29153E-3	9.53197E-2	2.73279E1	-3.26937E1	-3.26055E1	2.6814E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3514E-3	2.97704E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.79908E-1	-8.96335E-1	-9.04651E0	-9.04198E0	4.57764E-3	9.51767E-2	2.73712E1	-3.26879E1	-3.25948E1	2.68448E1	1.20226E-7	2.51886E-3	2.51886E-3	6.33341E-3	2.97541E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.80003E-1	-8.96358E-1	-9.04675E0	-9.04186E0	4.76837E-3	9.5129E-2	2.73769E1	-3.26865E1	-3.26216E1	2.68307E1	1.19913E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.8017E-1	-8.96049E-1	-9.04665E0	-9.04169E0	4.81606E-3	9.5129E-2	2.74018E1	-3.27003E1	-3.25163E1	2.68262E1	1.19829E-7	2.51838E-3	2.51838E-3	6.31879E-3	3.00794E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.80027E-1	-8.96335E-1	-9.04655E0	-9.04222E0	4.48227E-3	9.4986E-2	2.73358E1	-3.26449E1	-3.26366E1	2.68448E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.03027E-1
