[Scan]
initial_time=2016-01-18T19:53:43
final_time=2016-01-18T19:54:02
ip_count=19
run=1024
dataset=6
scan=402
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.36346E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.96989E-9
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=1.14584E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=-2.22087E-11
mult1=-9.00591E-9
mult2=-2.66871E-9
rf_tmon=-4.67465E-3
rf_agc=3.24383E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.67147E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54183E1
cs_ef1b_imon=2.86784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.43982E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34432E0
lens1_imon=2.77207E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64904E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03618E1
cs_ea2_imon=1.49568E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84776E1
cs_ef1a_imon=2.9509E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.37927E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.25968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14849E1
os_ea1_imon=2.3551E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.07705E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=1.20692E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9195E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02197E1
cs_anode1_imon=3.03847E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.39103E-8
tplens_vset=1.4E-1
tplens_vmon=1.67868E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.48883E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.56345E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.04254E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=1.80463E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53929E0
os_ea2_imon=-8.68929E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06055E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71385E1
cs_ef2a_imon=3.16601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.52593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94335E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.43986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02012E1
cs_anode2_imon=2.25098E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.09914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.08642E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.02517E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=8.01903E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.84478E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47296E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.79905E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.70926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39039E-4
mask2_vset=0.0E0
mask2_vmon=-1.86385E1
mask2_imon=-5.62411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.71447E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50096E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33396E1
os_fil1_imon=9.43857E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07051E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67165E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30934E1
cs_fil1_imon=1.00595E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63843E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68756E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.03535E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.35641E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46637E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22918E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.90483E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.1656E-1	-7.97892E-1	-9.13193E0	-9.14283E0	4.81606E-3	9.46045E-2	2.73254E1	-3.26747E1	-3.26428E1	2.68292E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16631E-1	-7.97772E-1	-9.132E0	-9.14285E0	4.673E-3	9.48429E-2	2.72989E1	-3.2651E1	-3.26085E1	2.6834E1	1.19953E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16369E-1	-7.97796E-1	-9.1321E0	-9.14261E0	4.95911E-3	9.50813E-2	2.72761E1	-3.2648E1	-3.26283E1	2.68166E1	1.19978E-7	2.51248E-3	2.51248E-3	6.32418E-3	3.01209E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16679E-1	-7.97653E-1	-9.13196E0	-9.14237E0	4.64916E-3	9.51052E-2	2.73187E1	-3.26449E1	-3.25942E1	2.68401E1	1.19941E-7	2.51709E-3	2.51709E-3	6.29684E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.16369E-1	-7.98082E-1	-9.13184E0	-9.14285E0	4.57764E-3	9.48429E-2	2.73291E1	-3.26699E1	-3.26134E1	2.68112E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.16751E-1	-7.98106E-1	-9.13196E0	-9.1429E0	4.60148E-3	9.50336E-2	2.73369E1	-3.26807E1	-3.262E1	2.68671E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16679E-1	-7.98154E-1	-9.132E0	-9.1428E0	4.81606E-3	9.51052E-2	2.73257E1	-3.26944E1	-3.26124E1	2.68406E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16846E-1	-7.98011E-1	-9.13181E0	-9.14273E0	4.52995E-3	9.50098E-2	2.73472E1	-3.26897E1	-3.2635E1	2.68406E1	1.19861E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.17084E-1	-7.97963E-1	-9.13179E0	-9.14252E0	4.64916E-3	9.48191E-2	2.72907E1	-3.26224E1	-3.26176E1	2.68448E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16894E-1	-7.97939E-1	-9.13196E0	-9.1423E0	4.81606E-3	9.48668E-2	2.73357E1	-3.26915E1	-3.2626E1	2.68731E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16798E-1	-7.97629E-1	-9.13198E0	-9.14302E0	4.86374E-3	9.5129E-2	2.73417E1	-3.27173E1	-3.25966E1	2.6834E1	1.20174E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16774E-1	-7.97939E-1	-9.13234E0	-9.1429E0	4.72069E-3	9.51052E-2	2.73163E1	-3.26602E1	-3.26219E1	2.68659E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.16655E-1	-7.97844E-1	-9.13196E0	-9.14285E0	4.74453E-3	9.53197E-2	2.73524E1	-3.26489E1	-3.26425E1	2.68187E1	1.19919E-7	2.51498E-3	2.51498E-3	6.3304E-3	3.01121E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.16703E-1	-7.9782E-1	-9.13196E0	-9.14266E0	4.74453E-3	9.54151E-2	2.73281E1	-3.26508E1	-3.26579E1	2.68238E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99941E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-8.16584E-1	-7.97963E-1	-9.13198E0	-9.1429E0	4.60148E-3	9.50098E-2	2.72973E1	-3.26472E1	-3.26514E1	2.68359E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.1656E-1	-7.9782E-1	-9.13196E0	-9.14309E0	4.43459E-3	9.51529E-2	2.73016E1	-3.26927E1	-3.26248E1	2.68556E1	1.199E-7	2.51562E-3	2.51562E-3	6.3074E-3	3.00994E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.17084E-1	-7.98178E-1	-9.13203E0	-9.14283E0	4.3869E-3	9.50813E-2	2.73234E1	-3.26549E1	-3.26071E1	2.68298E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.16965E-1	-7.97987E-1	-9.1321E0	-9.14311E0	4.74453E-3	9.52959E-2	2.73105E1	-3.26819E1	-3.26536E1	2.68388E1	1.198E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16798E-1	-7.97892E-1	-9.13205E0	-9.14302E0	4.74453E-3	9.53436E-2	2.72921E1	-3.26579E1	-3.26372E1	2.68621E1	1.20055E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16655E-1	-7.98178E-1	-9.13191E0	-9.14297E0	4.3869E-3	9.50336E-2	2.73111E1	-3.26651E1	-3.26188E1	2.68154E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
