[Scan]
initial_time=2016-01-18T19:54:36
final_time=2016-01-18T19:54:56
ip_count=19
run=1024
dataset=6
scan=404
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.3637E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.95277E-9
ql3_vset=
ql3_vmon=-9.13241E0
ql3_imon=1.01662E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=-1.81079E-11
mult1=-8.88551E-9
mult2=-2.68268E-9
rf_tmon=-2.60781E-3
rf_agc=3.62836E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.66156E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64179E0
bslens_imon=2.39673E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19434E1
lens5a_imon=2.00959E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05131E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53931E1
cs_ef1b_imon=2.84298E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=2.43786E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37061E0
lens1_imon=2.91844E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64634E1
os_ef1alow_imon=2.96987E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03496E1
cs_ea2_imon=1.4945E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8383E1
cs_ef1a_imon=2.9434E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.37983E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11279E1
os_restr1_imon=4.24459E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.37284E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63655E1
os_ef1bup_imon=3.0882E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23782E0
cs_ionrep_imon=1.20561E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02062E1
cs_anode1_imon=3.02086E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.39879E-8
tplens_vset=1.4E-1
tplens_vmon=1.63754E0
tplens_imon=-3.09151E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26008E1
iondef3_imon=1.50968E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.55212E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98217E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.10322E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2534E0
ionrepsh_imon=1.81025E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33639E1
lens5b_imon=2.19881E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12829E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56032E0
os_ea2_imon=-7.80247E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.16526E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0325E0
os_ef2alow_imon=-2.5839E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16669E-1
os_ef2bup_imon=-5.16059E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11357E1
os_restr2_imon=3.42644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.27709E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01925E1
cs_anode2_imon=2.24746E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73297E1
iondef1_imon=1.12346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.08484E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.10157E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=8.05294E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13468E0
cs_ionaccel_imon=-1.71592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56476E1
einzel_imon=7.76179E-6
window_vset=0.0E0
window_vmon=2.50307E-1
window_imon=-7.42846E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.38932E-4
mask2_vset=0.0E0
mask2_vmon=-1.86772E1
mask2_imon=-6.68893E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.45808E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.512E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.11936E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34502E0
defgridb_imon=5.86959E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33411E1
os_fil1_imon=9.44632E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06745E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67265E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=1.00546E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.645E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69022E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40027E-2
os_fil2_imon=-2.87284E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75898E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=8.18908E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35385E-1
cs_fil2_imon=-2.64579E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.31321E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.23002E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.73009E-1
res40_imon=-2.55276E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16965E-1	-7.98178E-1	-9.13215E0	-9.14245E0	4.36306E-3	9.52244E-2	2.73175E1	-3.26543E1	-3.26402E1	2.68376E1	1.19794E-7	2.51675E-3	2.51675E-3	6.3074E-3	3.01892E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17013E-1	-7.98368E-1	-9.13222E0	-9.14252E0	4.29153E-3	9.50575E-2	2.73553E1	-3.26591E1	-3.26517E1	2.68304E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16917E-1	-7.9813E-1	-9.13224E0	-9.14295E0	4.02927E-3	9.55105E-2	2.73145E1	-3.26862E1	-3.26107E1	2.68268E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.16894E-1	-7.97963E-1	-9.13203E0	-9.14266E0	4.3869E-3	9.51529E-2	2.73476E1	-3.26779E1	-3.26378E1	2.68331E1	1.20004E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16774E-1	-7.98035E-1	-9.13222E0	-9.14288E0	4.69685E-3	9.52244E-2	2.73153E1	-3.26753E1	-3.26008E1	2.6837E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.16631E-1	-7.98154E-1	-9.13229E0	-9.14278E0	4.673E-3	9.53913E-2	2.73424E1	-3.26756E1	-3.26052E1	2.68425E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16822E-1	-7.98368E-1	-9.13236E0	-9.14276E0	4.50611E-3	9.5129E-2	2.7278E1	-3.26667E1	-3.26248E1	2.68505E1	1.19872E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0201E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16917E-1	-7.97868E-1	-9.13229E0	-9.14276E0	4.62532E-3	9.50813E-2	2.72721E1	-3.26615E1	-3.26536E1	2.68178E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16965E-1	-7.9813E-1	-9.13248E0	-9.14288E0	4.57764E-3	9.53674E-2	2.73219E1	-3.26236E1	-3.26368E1	2.68526E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.99613E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16822E-1	-7.97987E-1	-9.13212E0	-9.14261E0	4.43459E-3	9.49383E-2	2.73462E1	-3.26793E1	-3.26283E1	2.68401E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.9943E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16822E-1	-7.9813E-1	-9.13236E0	-9.14242E0	4.43459E-3	9.50575E-2	2.73093E1	-3.26488E1	-3.26506E1	2.68448E1	1.20042E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.02621E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16751E-1	-7.97987E-1	-9.13212E0	-9.14285E0	4.60148E-3	9.52005E-2	2.73496E1	-3.26476E1	-3.26002E1	2.6834E1	1.19757E-7	2.50789E-3	2.50789E-3	6.33486E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.16751E-1	-7.98297E-1	-9.13222E0	-9.14233E0	4.50611E-3	9.5129E-2	2.73099E1	-3.26314E1	-3.2641E1	2.68358E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.17084E-1	-7.98082E-1	-9.13231E0	-9.14242E0	4.55379E-3	9.51767E-2	2.72847E1	-3.26603E1	-3.26284E1	2.68472E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.16941E-1	-7.9813E-1	-9.13203E0	-9.14233E0	4.45843E-3	9.51052E-2	2.72853E1	-3.26627E1	-3.2629E1	2.68298E1	1.20278E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16798E-1	-7.98059E-1	-9.13224E0	-9.14266E0	4.72069E-3	9.54151E-2	2.7298E1	-3.26502E1	-3.26248E1	2.68277E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16655E-1	-7.97963E-1	-9.13205E0	-9.1428E0	4.52995E-3	9.52244E-2	2.73399E1	-3.26747E1	-3.26392E1	2.68283E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.02253E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.1656E-1	-7.98011E-1	-9.13203E0	-9.1428E0	4.69685E-3	9.50336E-2	2.73216E1	-3.26661E1	-3.26296E1	2.68382E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-8.16512E-1	-7.97987E-1	-9.13217E0	-9.14278E0	4.43459E-3	9.46999E-2	2.73039E1	-3.26526E1	-3.26413E1	2.6831E1	1.20055E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16655E-1	-7.97939E-1	-9.13241E0	-9.14214E0	4.33922E-3	9.50098E-2	2.73297E1	-3.26549E1	-3.26008E1	2.68376E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
