[Scan]
initial_time=2016-01-18T19:55:30
final_time=2016-01-18T19:55:49
ip_count=19
run=1024
dataset=6
scan=406
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36149E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.94517E-9
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=1.10507E-10
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=-2.39015E-11
mult1=-9.58386E-9
mult2=-2.80844E-9
rf_tmon=-5.19136E-3
rf_agc=3.40846E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.66824E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.31785E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1946E1
lens5a_imon=2.01191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54145E1
cs_ef1b_imon=2.85764E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04659E2
lens23_imon=1.02618E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04718E1
cs_ea1_imon=2.45388E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39058E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65017E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.51335E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.93441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.38112E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.26067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.31761E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.21954E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.01117E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=3.3884E-8
tplens_vset=1.4E-1
tplens_vmon=1.67688E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.52272E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.54723E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=4.04452E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29956E0
ionrepsh_imon=1.82481E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.15323E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53509E0
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.43572E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68719E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.15578E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=8.06502E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.68999E-1
window_imon=-7.56253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.85791E1
mask2_imon=-7.92292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.10305E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=6.89975E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33405E1
os_fil1_imon=9.45495E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06981E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67078E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=1.00476E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63729E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6886E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=9.74772E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22917E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=3.00942E-1
chamber_ion_pmon=1.20084E-7
chamber_cvt_pmon=2.51136E-3
foreline_cvt_pmon=2.51136E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19959E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.16917E-1	-7.97844E-1	-9.132E0	-9.14264E0	4.57764E-3	9.50575E-2	2.73189E1	-3.26663E1	-3.2614E1	2.68157E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01609E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16941E-1	-7.97653E-1	-9.13191E0	-9.14271E0	4.45843E-3	9.50098E-2	2.73045E1	-3.26903E1	-3.2596E1	2.68094E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16941E-1	-7.97725E-1	-9.13177E0	-9.14261E0	4.3869E-3	9.50813E-2	2.73141E1	-3.26891E1	-3.26152E1	2.6831E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16941E-1	-7.9782E-1	-9.13179E0	-9.14321E0	4.41074E-3	9.49383E-2	2.73466E1	-3.26344E1	-3.26591E1	2.68464E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.17108E-1	-7.97629E-1	-9.13196E0	-9.14283E0	4.22001E-3	9.50575E-2	2.73605E1	-3.26443E1	-3.26054E1	2.68496E1	1.20174E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16751E-1	-7.98106E-1	-9.13186E0	-9.14307E0	4.29153E-3	9.49144E-2	2.73093E1	-3.26951E1	-3.2608E1	2.68484E1	1.20209E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16727E-1	-7.97987E-1	-9.13196E0	-9.14252E0	4.45843E-3	9.51767E-2	2.73416E1	-3.2681E1	-3.26301E1	2.68389E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16846E-1	-7.98106E-1	-9.13208E0	-9.14278E0	4.31538E-3	9.48191E-2	2.73302E1	-3.26609E1	-3.25972E1	2.68338E1	1.20192E-7	2.52448E-3	2.52448E-3	6.30212E-3	3.01356E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16798E-1	-7.98273E-1	-9.13234E0	-9.14245E0	4.45843E-3	9.48429E-2	2.72935E1	-3.26548E1	-3.26597E1	2.68358E1	1.19925E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16584E-1	-7.97844E-1	-9.13198E0	-9.1423E0	4.36306E-3	9.49383E-2	2.73255E1	-3.26705E1	-3.26182E1	2.6846E1	1.19925E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00942E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.17013E-1	-7.98178E-1	-9.13222E0	-9.14278E0	4.69685E-3	9.48906E-2	2.73429E1	-3.2638E1	-3.26368E1	2.68232E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9952E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16727E-1	-7.98082E-1	-9.1321E0	-9.14288E0	5.05447E-3	9.49144E-2	2.73246E1	-3.26673E1	-3.26284E1	2.68593E1	1.19757E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01609E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16751E-1	-7.98225E-1	-9.13215E0	-9.14283E0	4.69685E-3	9.52482E-2	2.73594E1	-3.26555E1	-3.26148E1	2.68453E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16607E-1	-7.97915E-1	-9.13212E0	-9.1428E0	4.64916E-3	9.5129E-2	2.73363E1	-3.26494E1	-3.2638E1	2.68262E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16631E-1	-7.97915E-1	-9.13212E0	-9.14254E0	4.26769E-3	9.54866E-2	2.73157E1	-3.26537E1	-3.26325E1	2.68268E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00302E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16655E-1	-7.97892E-1	-9.13193E0	-9.14259E0	4.43459E-3	9.49621E-2	2.73405E1	-3.2653E1	-3.26332E1	2.68184E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16679E-1	-7.97868E-1	-9.13184E0	-9.14273E0	4.50611E-3	9.4986E-2	2.73664E1	-3.26693E1	-3.2608E1	2.68274E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16631E-1	-7.97725E-1	-9.13191E0	-9.1429E0	4.86374E-3	9.51052E-2	2.73176E1	-3.26368E1	-3.26306E1	2.68216E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16631E-1	-7.97844E-1	-9.13184E0	-9.14254E0	4.673E-3	9.49383E-2	2.73406E1	-3.26413E1	-3.26285E1	2.685E1	1.19979E-7	2.52093E-3	2.52093E-3	6.31779E-3	3.00247E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16631E-1	-7.98392E-1	-9.13193E0	-9.14235E0	4.41074E-3	9.53436E-2	2.73183E1	-3.26693E1	-3.26236E1	2.68719E1	1.20084E-7	2.51136E-3	2.51136E-3	6.32418E-3	3.00942E-1
