[Scan]
initial_time=2016-01-18T19:56:23
final_time=2016-01-18T19:56:42
ip_count=19
run=1024
dataset=6
scan=408
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36324E-8
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=1.97425E-9
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=1.27554E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=2.57492E-12
mult1=-1.01498E-8
mult2=-2.71063E-9
rf_tmon=-6.03251E-3
rf_agc=3.25165E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.65632E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.41584E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19488E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04753E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54103E1
cs_ef1b_imon=2.85872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05454E1
cs_ea1_imon=2.49017E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.59989E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.48852E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84857E1
cs_ef1a_imon=2.94774E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.37644E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.25346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14651E1
os_ea1_imon=2.34222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.19156E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93558E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=3.01261E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.39863E-8
tplens_vset=1.4E-1
tplens_vmon=1.66562E0
tplens_imon=-3.66136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.97882E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.0516E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28395E0
ionrepsh_imon=1.80919E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57064E0
os_ea2_imon=-8.75811E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00665E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07034E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.44653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.09458E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68556E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.12139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=8.0227E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.50379E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86032E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.62939E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.67729E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.00291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28744E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33434E1
os_fil1_imon=9.4445E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07029E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67213E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3087E1
cs_fil1_imon=1.00341E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63681E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6885E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=8.61178E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22884E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.70104E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.1656E-1	-7.97868E-1	-9.13198E0	-9.1429E0	4.76837E-3	9.51052E-2	2.73027E1	-3.26732E1	-3.26236E1	2.68597E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16655E-1	-7.97892E-1	-9.13186E0	-9.14295E0	4.74453E-3	9.5129E-2	2.72973E1	-3.26561E1	-3.26032E1	2.68196E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16751E-1	-7.97892E-1	-9.13177E0	-9.14302E0	4.55379E-3	9.52721E-2	2.73134E1	-3.26349E1	-3.25942E1	2.68505E1	1.19653E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.01085E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16751E-1	-7.98106E-1	-9.13186E0	-9.14288E0	4.62532E-3	9.50575E-2	2.73202E1	-3.26561E1	-3.26515E1	2.68298E1	1.20251E-7	2.51883E-3	2.51883E-3	6.32609E-3	2.99766E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16512E-1	-7.97796E-1	-9.13153E0	-9.14254E0	4.29153E-3	9.50098E-2	2.73449E1	-3.26548E1	-3.2634E1	2.68484E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16822E-1	-7.97558E-1	-9.13153E0	-9.14254E0	4.48227E-3	9.52482E-2	2.73069E1	-3.2698E1	-3.2593E1	2.68325E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.1656E-1	-7.97439E-1	-9.13153E0	-9.14278E0	4.64916E-3	9.5439E-2	2.73255E1	-3.26891E1	-3.25888E1	2.68208E1	1.19757E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16369E-1	-7.97725E-1	-9.13196E0	-9.14237E0	4.64916E-3	9.48668E-2	2.73261E1	-3.26398E1	-3.2617E1	2.6849E1	1.20106E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16393E-1	-7.97892E-1	-9.13172E0	-9.1428E0	4.673E-3	9.52482E-2	2.73351E1	-3.26927E1	-3.26092E1	2.68268E1	1.2035E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.01742E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16607E-1	-7.9782E-1	-9.13174E0	-9.14297E0	4.72069E-3	9.53436E-2	2.73219E1	-3.26783E1	-3.26194E1	2.68412E1	1.20209E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00453E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16655E-1	-7.9782E-1	-9.13177E0	-9.14264E0	4.79221E-3	9.52244E-2	2.73281E1	-3.2636E1	-3.26296E1	2.68412E1	1.20069E-7	2.51334E-3	2.51334E-3	6.28006E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16441E-1	-7.97772E-1	-9.13198E0	-9.14276E0	4.43459E-3	9.52721E-2	2.7378E1	-3.2659E1	-3.26209E1	2.68499E1	1.19965E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16703E-1	-7.97915E-1	-9.13191E0	-9.14233E0	4.57764E-3	9.48668E-2	2.73197E1	-3.26527E1	-3.26254E1	2.68182E1	1.20127E-7	2.51783E-3	2.51783E-3	6.3282E-3	2.99506E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16894E-1	-7.97796E-1	-9.13169E0	-9.14245E0	4.45843E-3	9.51052E-2	2.73454E1	-3.26741E1	-3.2602E1	2.68286E1	1.19785E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.00363E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16846E-1	-7.97892E-1	-9.13205E0	-9.14245E0	4.26769E-3	9.51529E-2	2.73448E1	-3.2641E1	-3.26278E1	2.68172E1	1.20069E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16941E-1	-7.97987E-1	-9.13222E0	-9.1428E0	4.43459E-3	9.51767E-2	2.7337E1	-3.2652E1	-3.25995E1	2.68447E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01085E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16655E-1	-7.98106E-1	-9.13227E0	-9.14278E0	4.41074E-3	9.51052E-2	2.73207E1	-3.26789E1	-3.26248E1	2.68627E1	1.1979E-7	2.52131E-3	2.52131E-3	6.29684E-3	2.99343E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16727E-1	-7.97772E-1	-9.13191E0	-9.14292E0	4.74453E-3	9.47237E-2	2.73311E1	-3.26555E1	-3.2616E1	2.68283E1	1.19978E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.97762E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16703E-1	-7.97796E-1	-9.13184E0	-9.14259E0	4.72069E-3	9.48191E-2	2.73327E1	-3.26603E1	-3.26026E1	2.68088E1	1.20106E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16679E-1	-7.97582E-1	-9.13196E0	-9.14264E0	4.62532E-3	9.49383E-2	2.73387E1	-3.26482E1	-3.26488E1	2.68556E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
