[Scan]
initial_time=2016-01-18T19:56:50
final_time=2016-01-18T19:57:09
ip_count=19
run=1024
dataset=6
scan=409
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36246E-8
ql2_vset=
ql2_vmon=-7.97391E-1
ql2_imon=1.92181E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=1.24836E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=7.98702E-13
mult1=-9.23928E-9
mult2=-2.6919E-9
rf_tmon=-4.67465E-3
rf_agc=3.29552E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.65199E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64427E0
bslens_imon=2.34347E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19457E1
lens5a_imon=1.97975E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.0486E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53986E1
cs_ef1b_imon=2.85011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02201E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04287E1
cs_ea1_imon=2.47754E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35344E0
lens1_imon=2.84404E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64799E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03742E1
cs_ea2_imon=1.51707E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=2.94082E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.38305E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11483E1
os_restr1_imon=4.24612E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15114E1
os_ea1_imon=2.33537E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63705E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23356E0
cs_ionrep_imon=1.20664E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.93333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02024E1
cs_anode1_imon=3.01762E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.38995E-8
tplens_vset=1.4E-1
tplens_vmon=1.65766E0
tplens_imon=-2.60206E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.51533E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.5494E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0301E2
lens6_imon=2.98266E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.0516E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25094E0
ionrepsh_imon=1.81637E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.15947E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74698E1
cs_ef2b_imon=3.12049E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58755E0
os_ea2_imon=-7.46875E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.47032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1229E-1
os_ef2bup_imon=-5.28528E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11233E1
os_restr2_imon=3.43674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.27843E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73281E1
iondef1_imon=1.11244E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.09051E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=8.04752E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47372E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=2.39696E-1
window_imon=-8.1958E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.85406E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.48478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.38282E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.17887E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.334E0
defgridb_imon=6.1082E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33405E1
os_fil1_imon=9.43845E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0715E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67095E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=1.00159E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62818E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6871E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3943E-2
os_fil2_imon=-2.66339E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.04622E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33397E-1
cs_fil2_imon=-2.60547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22754E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.26394E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16846E-1	-7.97701E-1	-9.132E0	-9.14268E0	4.43459E-3	9.4986E-2	2.72877E1	-3.26681E1	-3.25779E1	2.68406E1	1.20209E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.98156E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17013E-1	-7.97987E-1	-9.13229E0	-9.14271E0	4.52995E-3	9.49383E-2	2.72984E1	-3.26689E1	-3.26181E1	2.68406E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16679E-1	-7.97629E-1	-9.13188E0	-9.14266E0	4.62532E-3	9.52005E-2	2.73464E1	-3.26437E1	-3.26113E1	2.68435E1	1.19925E-7	2.52362E-3	2.52362E-3	6.32418E-3	2.99613E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16703E-1	-7.97987E-1	-9.13205E0	-9.14297E0	4.26769E-3	9.51529E-2	2.7301E1	-3.26514E1	-3.25953E1	2.68376E1	1.198E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16894E-1	-7.97606E-1	-9.13181E0	-9.14271E0	4.26769E-3	9.4986E-2	2.73326E1	-3.26738E1	-3.26187E1	2.68388E1	1.20209E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16751E-1	-7.98154E-1	-9.13224E0	-9.14273E0	4.05312E-3	9.5129E-2	2.73364E1	-3.26531E1	-3.26083E1	2.68286E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16894E-1	-7.98082E-1	-9.13193E0	-9.14249E0	4.62532E-3	9.47952E-2	2.73428E1	-3.26474E1	-3.2626E1	2.68334E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16774E-1	-7.98321E-1	-9.13203E0	-9.1429E0	4.81606E-3	9.51052E-2	2.73288E1	-3.26535E1	-3.26273E1	2.68426E1	1.19732E-7	2.51472E-3	2.51472E-3	6.33863E-3	3.01485E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16965E-1	-7.98202E-1	-9.132E0	-9.1423E0	4.79221E-3	9.51052E-2	2.73195E1	-3.26921E1	-3.2641E1	2.68556E1	1.1984E-7	2.51296E-3	2.51296E-3	6.3016E-3	3.00087E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16894E-1	-7.9813E-1	-9.13203E0	-9.14252E0	4.48227E-3	9.49144E-2	2.72979E1	-3.26699E1	-3.26194E1	2.67944E1	1.19757E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16751E-1	-7.97534E-1	-9.13219E0	-9.14247E0	4.52995E-3	9.4986E-2	2.73087E1	-3.26392E1	-3.26254E1	2.68534E1	1.20017E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16727E-1	-7.97629E-1	-9.13234E0	-9.14254E0	4.36306E-3	9.48191E-2	2.73163E1	-3.26697E1	-3.26478E1	2.6843E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9841E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16417E-1	-7.97415E-1	-9.13222E0	-9.14283E0	4.36306E-3	9.49144E-2	2.73417E1	-3.26494E1	-3.26212E1	2.68322E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16655E-1	-7.97749E-1	-9.13208E0	-9.14268E0	4.22001E-3	9.49621E-2	2.73216E1	-3.26744E1	-3.26052E1	2.68328E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16488E-1	-7.97629E-1	-9.13224E0	-9.14268E0	4.26769E-3	9.50098E-2	2.73207E1	-3.26837E1	-3.26056E1	2.6804E1	1.19757E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16417E-1	-7.97415E-1	-9.13222E0	-9.14271E0	4.29153E-3	9.50098E-2	2.73255E1	-3.26759E1	-3.2599E1	2.68587E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.98481E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16774E-1	-7.97462E-1	-9.13205E0	-9.14295E0	4.17233E-3	9.50098E-2	2.73269E1	-3.26909E1	-3.26178E1	2.68244E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16584E-1	-7.97462E-1	-9.13191E0	-9.14276E0	4.60148E-3	9.51529E-2	2.73321E1	-3.26837E1	-3.26248E1	2.6825E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16655E-1	-7.97606E-1	-9.13215E0	-9.14288E0	4.50611E-3	9.49383E-2	2.73252E1	-3.26785E1	-3.26048E1	2.68146E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.16679E-1	-7.97391E-1	-9.13203E0	-9.14283E0	4.45843E-3	9.50336E-2	2.73281E1	-3.26425E1	-3.26278E1	2.68262E1	1.20004E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.0148E-1
