[Scan]
initial_time=2016-01-18T19:58:36
final_time=2016-01-18T19:58:56
ip_count=19
run=1024
dataset=6
scan=413
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=1.36094E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.90316E-9
ql3_vset=
ql3_vmon=-9.13241E0
ql3_imon=7.92384E-11
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=-2.62499E-11
mult1=-9.45207E-9
mult2=-2.80165E-9
rf_tmon=-6.53874E-3
rf_agc=3.15453E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.67261E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68981E0
bslens_imon=2.24949E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53928E1
cs_ef1b_imon=2.85081E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02018E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=2.49229E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3466E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.96236E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.50126E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.94777E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.37669E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.24647E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14928E1
os_ea1_imon=2.3578E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.07774E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21906E0
cs_ionrep_imon=1.19793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=3.01588E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.37847E-8
tplens_vset=1.4E-1
tplens_vmon=1.67683E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.514E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.56603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.05561E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28395E0
ionrepsh_imon=1.79361E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56298E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.15802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07483E0
os_ef2alow_imon=-2.46337E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27929E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11332E1
os_restr2_imon=3.44021E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0207E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68538E1
iondef4_imon=1.09824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71773E1
olens3_imon=5.13392E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=8.01068E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14578E0
cs_ionaccel_imon=-1.71967E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47501E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56521E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=2.37958E-1
window_imon=-8.82134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86217E1
mask2_imon=-7.57025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.49489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.30919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=5.89508E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.42385E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07381E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66683E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=1.00123E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62841E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68634E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.28007E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.3077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22859E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09597E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09317E0	-8.16798E-1	-7.97701E-1	-9.13215E0	-9.14264E0	4.43459E-3	9.4986E-2	2.73328E1	-3.27086E1	-3.26012E1	2.6843E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99175E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.1687E-1	-7.97582E-1	-9.13215E0	-9.14245E0	4.57764E-3	9.52244E-2	2.73137E1	-3.2664E1	-3.25776E1	2.68088E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-8.16631E-1	-7.97868E-1	-9.13229E0	-9.14283E0	4.76837E-3	9.50336E-2	2.73305E1	-3.26897E1	-3.26413E1	2.68478E1					
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16917E-1	-7.97892E-1	-9.13234E0	-9.14247E0	4.74453E-3	9.51529E-2	2.7326E1	-3.26671E1	-3.26335E1	2.68389E1	1.19749E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16631E-1	-7.97868E-1	-9.13224E0	-9.14245E0	4.72069E-3	9.52959E-2	2.73027E1	-3.26793E1	-3.26021E1	2.68556E1	1.20055E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16584E-1	-7.97725E-1	-9.13203E0	-9.14276E0	4.69685E-3	9.52244E-2	2.72985E1	-3.26735E1	-3.26338E1	2.68325E1	1.20435E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16679E-1	-7.97915E-1	-9.13196E0	-9.14266E0	4.74453E-3	9.51767E-2	2.73153E1	-3.26404E1	-3.26212E1	2.68232E1	1.20244E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16679E-1	-7.9782E-1	-9.13198E0	-9.14288E0	4.74453E-3	9.5129E-2	2.73075E1	-3.26536E1	-3.26032E1	2.68365E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.02511E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16798E-1	-7.97963E-1	-9.13184E0	-9.1428E0	4.673E-3	9.5129E-2	2.7298E1	-3.26537E1	-3.26154E1	2.68483E1	1.20226E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16393E-1	-7.9813E-1	-9.13215E0	-9.14278E0	4.48227E-3	9.49144E-2	2.72937E1	-3.26987E1	-3.26152E1	2.68575E1	1.19601E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97445E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16703E-1	-7.97868E-1	-9.13184E0	-9.14254E0	4.57764E-3	9.4986E-2	2.73277E1	-3.26517E1	-3.26291E1	2.68358E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16393E-1	-7.98106E-1	-9.13184E0	-9.14257E0	4.19617E-3	9.48906E-2	2.73472E1	-3.26789E1	-3.26428E1	2.68647E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16393E-1	-7.97987E-1	-9.13177E0	-9.14249E0	4.55379E-3	9.46999E-2	2.73207E1	-3.26874E1	-3.26214E1	2.6819E1	1.19757E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16727E-1	-7.98249E-1	-9.13203E0	-9.14252E0	4.8399E-3	9.52959E-2	2.72898E1	-3.27031E1	-3.26266E1	2.68418E1	1.19697E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.02253E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16727E-1	-7.98154E-1	-9.13198E0	-9.14276E0	4.57764E-3	9.50575E-2	2.73087E1	-3.26765E1	-3.2605E1	2.68611E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16727E-1	-7.98082E-1	-9.13174E0	-9.14278E0	4.86374E-3	9.52244E-2	2.73393E1	-3.26815E1	-3.26089E1	2.68376E1	1.19861E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9874E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16798E-1	-7.9813E-1	-9.13181E0	-9.14292E0	4.74453E-3	9.52721E-2	2.734E1	-3.26701E1	-3.26725E1	2.68376E1	1.20069E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16727E-1	-7.98202E-1	-9.13196E0	-9.14285E0	4.43459E-3	9.52721E-2	2.73161E1	-3.26521E1	-3.26115E1	2.68464E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.16846E-1	-7.98082E-1	-9.13186E0	-9.1429E0	4.24385E-3	9.52482E-2	2.73165E1	-3.26669E1	-3.26446E1	2.6804E1	1.19749E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16751E-1	-7.98035E-1	-9.13241E0	-9.14278E0	4.52995E-3	9.51529E-2	2.73375E1	-3.26885E1	-3.2639E1	2.68538E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01347E-1
