[Scan]
initial_time=2016-01-18T19:59:56
final_time=2016-01-18T20:00:16
ip_count=19
run=1024
dataset=6
scan=416
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.3636E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.93311E-9
ql3_vset=
ql3_vmon=-9.13215E0
ql3_imon=1.16134E-10
ql4_vset=
ql4_vmon=-9.14257E0
ql4_imon=-3.18527E-11
mult1=-1.00877E-8
mult2=-2.72039E-9
rf_tmon=-3.49666E-3
rf_agc=3.45284E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.67134E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1931E1
lens5a_imon=2.01299E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54001E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.49606E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.80091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.50614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.9427E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.37398E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=2.36556E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=1.19863E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93669E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=3.00468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.37121E-8
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=-3.49815E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26185E1
iondef3_imon=1.51587E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.02797E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=1.80607E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50985E0
os_ea2_imon=-8.65324E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00406E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.42923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.24461E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73161E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.07817E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=8.00271E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-7.34629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.85017E1
mask2_imon=-9.14827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.56306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.45634E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.07999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25419E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33367E1
os_fil1_imon=9.43297E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07203E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66679E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.99795E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62822E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68488E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.25706E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22927E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.26566E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.1687E-1	-7.98059E-1	-9.13191E0	-9.14249E0	4.8399E-3	9.54628E-2	2.73334E1	-3.26372E1	-3.26225E1	2.68279E1	1.20383E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16751E-1	-7.98082E-1	-9.13227E0	-9.14276E0	4.8399E-3	9.54628E-2	2.72997E1	-3.26506E1	-3.26146E1	2.68442E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16917E-1	-7.97796E-1	-9.1321E0	-9.14299E0	4.62532E-3	9.50336E-2	2.73222E1	-3.26349E1	-3.26301E1	2.68328E1	1.20017E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.01085E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16798E-1	-7.97796E-1	-9.13215E0	-9.14245E0	4.81606E-3	9.50575E-2	2.73243E1	-3.26621E1	-3.25996E1	2.68268E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16655E-1	-7.97558E-1	-9.13231E0	-9.14254E0	5.07832E-3	9.51529E-2	2.73234E1	-3.26614E1	-3.25871E1	2.6822E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16846E-1	-7.97915E-1	-9.13239E0	-9.14259E0	4.88758E-3	9.5129E-2	2.73405E1	-3.26615E1	-3.26326E1	2.68192E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16822E-1	-7.98154E-1	-9.13231E0	-9.14259E0	4.64916E-3	9.50336E-2	2.73322E1	-3.26396E1	-3.25871E1	2.68418E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16846E-1	-7.98154E-1	-9.13219E0	-9.14268E0	4.79221E-3	9.52005E-2	2.73105E1	-3.26789E1	-3.25918E1	2.68148E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16894E-1	-7.97987E-1	-9.13198E0	-9.14247E0	4.8399E-3	9.50336E-2	2.73087E1	-3.26518E1	-3.26452E1	2.68569E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.1706E-1	-7.98202E-1	-9.13191E0	-9.14261E0	4.86374E-3	9.50336E-2	2.72961E1	-3.26356E1	-3.26122E1	2.68352E1	1.19705E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01085E-1
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16965E-1	-7.98297E-1	-9.13222E0	-9.1429E0	4.88758E-3	9.51529E-2	2.73358E1	-3.26461E1	-3.26189E1	2.68695E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16798E-1	-7.98035E-1	-9.13196E0	-9.14257E0	4.74453E-3	9.52482E-2	2.73069E1	-3.26807E1	-3.26332E1	2.68346E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02511E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16846E-1	-7.97868E-1	-9.13229E0	-9.14266E0	4.3869E-3	9.52482E-2	2.73122E1	-3.26767E1	-3.26337E1	2.68708E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16989E-1	-7.97844E-1	-9.13203E0	-9.14247E0	4.50611E-3	9.53674E-2	2.73192E1	-3.26664E1	-3.26603E1	2.68656E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16727E-1	-7.9782E-1	-9.132E0	-9.14283E0	4.69685E-3	9.52721E-2	2.73488E1	-3.26443E1	-3.26425E1	2.6825E1	1.20031E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.00144E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.16894E-1	-7.97939E-1	-9.13208E0	-9.14264E0	4.72069E-3	9.5439E-2	2.73399E1	-3.26667E1	-3.26378E1	2.68569E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9943E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.17013E-1	-7.97868E-1	-9.13193E0	-9.14297E0	4.72069E-3	9.51529E-2	2.73261E1	-3.26609E1	-3.26332E1	2.68476E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.1687E-1	-7.97915E-1	-9.13184E0	-9.14299E0	4.81606E-3	9.4986E-2	2.73216E1	-3.26655E1	-3.2613E1	2.68436E1	1.198E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16751E-1	-7.98154E-1	-9.13203E0	-9.14247E0	4.79221E-3	9.5129E-2	2.73496E1	-3.26368E1	-3.2608E1	2.6828E1	1.20158E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16441E-1	-7.98225E-1	-9.13215E0	-9.14257E0	4.41074E-3	9.50575E-2	2.73161E1	-3.2659E1	-3.26185E1	2.68514E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
