[Scan]
initial_time=2016-01-18T20:00:49
final_time=2016-01-18T20:01:09
ip_count=19
run=1024
dataset=6
scan=418
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08696E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=1.35984E-8
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=2.02668E-9
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=5.13554E-11
ql4_vset=
ql4_vmon=-9.14276E0
ql4_imon=-4.02808E-11
mult1=-9.42733E-9
mult2=-2.7266E-9
rf_tmon=-6.81359E-3
rf_agc=3.1495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.63265E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69257E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.99353E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.84539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04477E1
cs_ea1_imon=2.51228E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38698E0
lens1_imon=2.73963E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.50361E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.93801E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.36748E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.25382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.37241E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.21702E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=3.00541E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.37773E-8
tplens_vset=1.4E-1
tplens_vmon=1.65886E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.49532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.55372E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03014E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=4.09052E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.8259E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59697E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00324E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17246E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.43464E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23002E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.10923E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71774E1
olens3_imon=5.08032E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.99636E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.19175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.01871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50382E0
defgridb_imon=6.31935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.47328E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66603E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.99927E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62071E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68501E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52001E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22949E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.25655E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09294E0	-8.16965E-1	-7.97725E-1	-9.13227E0	-9.14226E0	4.79221E-3	9.50336E-2	2.73393E1	-3.2629E1	-3.26189E1	2.68484E1	1.19705E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9952E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.16679E-1	-7.97915E-1	-9.13222E0	-9.14223E0	4.673E-3	9.45091E-2	2.73418E1	-3.26658E1	-3.26309E1	2.68176E1	1.19851E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16989E-1	-7.97772E-1	-9.13217E0	-9.14247E0	4.673E-3	9.49144E-2	2.73423E1	-3.26797E1	-3.26437E1	2.6843E1	1.20084E-7	2.52139E-3	2.52139E-3	6.31299E-3	2.99348E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-8.16822E-1	-7.97701E-1	-9.132E0	-9.14261E0	4.81606E-3	9.50098E-2	2.73532E1	-3.26458E1	-3.26284E1	2.68454E1	1.198E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.1706E-1	-7.98035E-1	-9.13231E0	-9.14271E0	4.52995E-3	9.51529E-2	2.73027E1	-3.26476E1	-3.2605E1	2.6825E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09317E0	-8.17013E-1	-7.97749E-1	-9.13246E0	-9.14252E0	4.72069E-3	9.50336E-2	2.73279E1	-3.26759E1	-3.26278E1	2.684E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.16631E-1	-7.98154E-1	-9.13274E0	-9.14271E0	4.62532E-3	9.5129E-2	2.73452E1	-3.26596E1	-3.2616E1	2.68534E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.16631E-1	-7.9782E-1	-9.13217E0	-9.14297E0	4.52995E-3	9.52721E-2	2.73423E1	-3.26425E1	-3.2616E1	2.68424E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.03976E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16846E-1	-7.98059E-1	-9.13203E0	-9.14273E0	4.69685E-3	9.52959E-2	2.73117E1	-3.26657E1	-3.26116E1	2.6831E1	1.2026E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.01738E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16894E-1	-7.97701E-1	-9.13212E0	-9.14259E0	4.55379E-3	9.50575E-2	2.7334E1	-3.26791E1	-3.26024E1	2.68328E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16727E-1	-7.97653E-1	-9.13193E0	-9.14285E0	4.60148E-3	9.51052E-2	2.73235E1	-3.26609E1	-3.26027E1	2.68292E1	1.19953E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.01738E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.16894E-1	-7.98011E-1	-9.13229E0	-9.14266E0	4.673E-3	9.50098E-2	2.73428E1	-3.26372E1	-3.2688E1	2.68352E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01085E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.17132E-1	-7.98106E-1	-9.13224E0	-9.14252E0	4.93526E-3	9.52721E-2	2.73099E1	-3.26506E1	-3.26218E1	2.68364E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16774E-1	-7.97844E-1	-9.13236E0	-9.14285E0	4.673E-3	9.51052E-2	2.73448E1	-3.26825E1	-3.26837E1	2.68296E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09271E0	-8.16631E-1	-7.97939E-1	-9.13224E0	-9.14292E0	4.673E-3	9.51529E-2	2.73322E1	-3.26679E1	-3.26266E1	2.68569E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.16989E-1	-7.97939E-1	-9.1321E0	-9.14264E0	4.64916E-3	9.52721E-2	2.73087E1	-3.26759E1	-3.2653E1	2.68352E1	1.20004E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00197E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.16989E-1	-7.98035E-1	-9.13191E0	-9.14278E0	4.69685E-3	9.5129E-2	2.73321E1	-3.26687E1	-3.26026E1	2.68334E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16822E-1	-7.97844E-1	-9.13208E0	-9.14288E0	4.74453E-3	9.50336E-2	2.73287E1	-3.26697E1	-3.2662E1	2.68226E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17013E-1	-7.97868E-1	-9.13203E0	-9.14264E0	4.673E-3	9.52244E-2	2.73004E1	-3.2662E1	-3.26012E1	2.68279E1	1.19902E-7	2.51632E-3	2.51632E-3	6.35059E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.17227E-1	-7.97868E-1	-9.1321E0	-9.14276E0	4.48227E-3	9.52482E-2	2.73466E1	-3.26783E1	-3.26374E1	2.68166E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
