[Scan]
initial_time=2016-01-18T20:01:43
final_time=2016-01-18T20:02:02
ip_count=19
run=1024
dataset=6
scan=420
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36347E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.94324E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=1.19746E-10
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=-2.13981E-11
mult1=-9.55847E-9
mult2=-2.78401E-9
rf_tmon=-5.21146E-3
rf_agc=3.22886E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.67848E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.24949E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19411E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.84539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04566E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.51742E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34483E0
lens1_imon=2.75562E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.49701E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.9463E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.36723E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.26067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.34718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21257E0
cs_ionrep_imon=1.21138E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=3.00072E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.37591E-8
tplens_vset=1.4E-1
tplens_vmon=1.63966E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.98056E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.0555E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=1.79361E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.15782E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57713E0
os_ea2_imon=-7.6255E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.43428E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.28654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.11744E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.97643E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.31273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.35331E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52072E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.43609E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06056E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66802E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=1.00003E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61909E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68366E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.33449E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.05853E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22824E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.95932E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16989E-1	-7.97844E-1	-9.13177E0	-9.14283E0	4.57764E-3	9.52244E-2	2.73505E1	-3.26514E1	-3.26065E1	2.6849E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.03027E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16679E-1	-7.97772E-1	-9.13219E0	-9.1428E0	4.60148E-3	9.4986E-2	2.73455E1	-3.26768E1	-3.26364E1	2.68406E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16822E-1	-7.98082E-1	-9.13212E0	-9.14261E0	4.43459E-3	9.50575E-2	2.73323E1	-3.26503E1	-3.26156E1	2.68377E1	1.20062E-7	2.51647E-3	2.51647E-3	6.31555E-3	3.01544E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16631E-1	-7.97606E-1	-9.13208E0	-9.14242E0	4.48227E-3	9.48906E-2	2.73472E1	-3.26711E1	-3.26098E1	2.6831E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16965E-1	-7.98035E-1	-9.13215E0	-9.14249E0	4.50611E-3	9.45807E-2	2.73315E1	-3.26681E1	-3.2629E1	2.68412E1	1.20209E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16774E-1	-7.9813E-1	-9.13203E0	-9.14261E0	4.31538E-3	9.49144E-2	2.73333E1	-3.26468E1	-3.26254E1	2.68418E1	1.19872E-7	2.52027E-3	2.52027E-3	6.27954E-3	3.01475E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16774E-1	-7.97915E-1	-9.13219E0	-9.1423E0	4.673E-3	9.49144E-2	2.73225E1	-3.26302E1	-3.26404E1	2.68575E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.16965E-1	-7.97963E-1	-9.13224E0	-9.14271E0	4.52995E-3	9.50336E-2	2.73339E1	-3.26711E1	-3.26188E1	2.68472E1	1.19653E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00041E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16703E-1	-7.98154E-1	-9.13227E0	-9.14285E0	4.43459E-3	9.51529E-2	2.73117E1	-3.26837E1	-3.25978E1	2.68286E1	1.20137E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.1687E-1	-7.98082E-1	-9.13229E0	-9.14283E0	4.41074E-3	9.49144E-2	2.73523E1	-3.26537E1	-3.2629E1	2.68346E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02922E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.1687E-1	-7.98345E-1	-9.13239E0	-9.14264E0	4.60148E-3	9.48429E-2	2.73492E1	-3.2645E1	-3.26425E1	2.68352E1	1.19953E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16965E-1	-7.98225E-1	-9.13184E0	-9.14264E0	4.60148E-3	9.51529E-2	2.73458E1	-3.26661E1	-3.25936E1	2.68226E1	1.19653E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16965E-1	-7.98106E-1	-9.132E0	-9.14302E0	4.48227E-3	9.48906E-2	2.73476E1	-3.2649E1	-3.26378E1	2.68004E1	1.20004E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16894E-1	-7.98106E-1	-9.13188E0	-9.14278E0	4.48227E-3	9.50575E-2	2.73273E1	-3.26416E1	-3.2647E1	2.68587E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.1687E-1	-7.98082E-1	-9.13236E0	-9.1429E0	4.81606E-3	9.47952E-2	2.73173E1	-3.2666E1	-3.26538E1	2.68306E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16846E-1	-7.9782E-1	-9.13212E0	-9.14271E0	4.62532E-3	9.48668E-2	2.73026E1	-3.26734E1	-3.26241E1	2.68132E1	1.20078E-7	2.51472E-3	2.51472E-3	6.31779E-3	3.0E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16941E-1	-7.97653E-1	-9.13196E0	-9.14226E0	4.60148E-3	9.50575E-2	2.72892E1	-3.26667E1	-3.26561E1	2.68418E1	1.19775E-7	2.51611E-3	2.51611E-3	6.29035E-3	3.00522E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.16846E-1	-7.97725E-1	-9.13217E0	-9.14295E0	4.48227E-3	9.50336E-2	2.73502E1	-3.26723E1	-3.26236E1	2.68629E1	1.20226E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16703E-1	-7.97749E-1	-9.13162E0	-9.1428E0	4.81606E-3	9.49144E-2	2.73263E1	-3.26484E1	-3.26195E1	2.68412E1	1.19851E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16679E-1	-7.98035E-1	-9.1315E0	-9.14268E0	4.50611E-3	9.49383E-2	2.73375E1	-3.26744E1	-3.2626E1	2.68382E1	1.19809E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9952E-1
