[Scan]
initial_time=2016-01-18T20:02:36
final_time=2016-01-18T20:02:55
ip_count=19
run=1024
dataset=6
scan=422
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=1.36473E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.90653E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=1.14632E-10
ql4_vset=
ql4_vmon=-9.14276E0
ql4_imon=-1.52826E-11
mult1=-8.86143E-9
mult2=-2.78448E-9
rf_tmon=-4.6386E-3
rf_agc=3.30211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.65367E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53774E1
cs_ef1b_imon=2.84666E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04569E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=2.52165E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31488E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64827E1
os_ef1alow_imon=2.98177E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03432E1
cs_ea2_imon=1.49027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84332E1
cs_ef1a_imon=2.94247E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.36243E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11666E1
os_restr1_imon=4.25575E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.37024E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63492E1
os_ef1bup_imon=3.0701E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=1.20476E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01865E1
cs_anode1_imon=2.99562E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.37974E-8
tplens_vset=1.4E-1
tplens_vmon=1.62641E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.55588E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.97949E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.0912E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.80102E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74732E1
cs_ef2b_imon=3.12399E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55912E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.15655E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0608E0
os_ef2alow_imon=-2.52192E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.388E-1
os_ef2bup_imon=-5.38499E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11198E1
os_restr2_imon=3.43462E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.28414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0146E1
cs_anode2_imon=2.24373E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6849E1
iondef4_imon=1.09514E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.09151E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.94881E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14324E0
cs_ionaccel_imon=-1.77715E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56443E1
einzel_imon=7.72901E-6
window_vset=0.0E0
window_vmon=2.52527E-1
window_imon=-7.29223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.86806E1
mask2_imon=-4.9344E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.56666E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.32656E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5009E3
multb_neg_imon=7.24943E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.4416E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06949E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66687E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.99906E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62852E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68252E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.6625E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93463E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.29057E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33282E-1
cs_fil2_imon=-2.43795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.55721E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22846E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33065E-3
inlet_lpb_pmon=3.00087E-1
chamber_ion_pmon=1.20171E-7
chamber_cvt_pmon=2.51296E-3
foreline_cvt_pmon=2.51296E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.97434E-1
res40_imon=-2.55934E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=144
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16536E-1	-7.98273E-1	-9.13217E0	-9.14242E0	4.45843E-3	9.52244E-2	2.73311E1	-3.26762E1	-3.26142E1	2.68279E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.97963E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16584E-1	-7.98059E-1	-9.13229E0	-9.14254E0	4.50611E-3	9.4986E-2	2.73411E1	-3.26561E1	-3.2593E1	2.68478E1	1.1974E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99093E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-8.16321E-1	-7.98225E-1	-9.13222E0	-9.14237E0	4.74453E-3	9.50098E-2	2.72986E1	-3.26649E1	-3.26301E1	2.68166E1	1.19925E-7	2.51248E-3	2.51248E-3	6.32978E-3	2.9829E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09271E0	-8.16345E-1	-7.98178E-1	-9.13205E0	-9.14288E0	4.62532E-3	9.50575E-2	2.73309E1	-3.26687E1	-3.26368E1	2.68435E1	1.19749E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.16774E-1	-7.98011E-1	-9.13198E0	-9.14271E0	4.64916E-3	9.50336E-2	2.73424E1	-3.26699E1	-3.26074E1	2.68484E1	1.20055E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.16822E-1	-7.98082E-1	-9.13196E0	-9.14261E0	4.8399E-3	9.49621E-2	2.73216E1	-3.26408E1	-3.26278E1	2.68298E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16965E-1	-7.98082E-1	-9.13231E0	-9.14304E0	4.79221E-3	9.49144E-2	2.73228E1	-3.26626E1	-3.26077E1	2.68364E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17037E-1	-7.98345E-1	-9.13227E0	-9.14218E0	4.95911E-3	9.50336E-2	2.72996E1	-3.26321E1	-3.26254E1	2.68707E1	1.19851E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.17013E-1	-7.98059E-1	-9.13203E0	-9.1429E0	5.05447E-3	9.5129E-2	2.73104E1	-3.26425E1	-3.26567E1	2.68325E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.1706E-1	-7.97939E-1	-9.13198E0	-9.14297E0	5.26905E-3	9.51052E-2	2.73193E1	-3.26549E1	-3.26537E1	2.6843E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17013E-1	-7.9782E-1	-9.13181E0	-9.14252E0	4.8399E-3	9.50575E-2	2.73195E1	-3.26729E1	-3.2629E1	2.68364E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17299E-1	-7.98249E-1	-9.13188E0	-9.14266E0	4.50611E-3	9.50098E-2	2.73454E1	-3.26591E1	-3.26242E1	2.68496E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.1706E-1	-7.98035E-1	-9.132E0	-9.14268E0	4.62532E-3	9.52005E-2	2.73327E1	-3.26663E1	-3.26134E1	2.684E1	1.198E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16822E-1	-7.98273E-1	-9.13222E0	-9.14271E0	4.81606E-3	9.49621E-2	2.73387E1	-3.26567E1	-3.26104E1	2.68334E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16941E-1	-7.98059E-1	-9.1321E0	-9.14288E0	4.43459E-3	9.5129E-2	2.73369E1	-3.26813E1	-3.26392E1	2.68352E1	1.19978E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16774E-1	-7.98059E-1	-9.13227E0	-9.14257E0	4.36306E-3	9.48906E-2	2.73081E1	-3.26554E1	-3.26236E1	2.6843E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
2.0E1	9.0E0	1.0E0	8.08E2	5.58E2	-2.09387E0	-8.17013E-1	-7.9813E-1	-9.13203E0	-9.14245E0	4.41074E-3	9.49144E-2	2.73051E1	-3.26396E1	-3.26248E1	2.68394E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16703E-1	-7.98178E-1	-9.13231E0	-9.14245E0	4.45843E-3	9.49144E-2	2.73599E1	-3.2668E1	-3.26255E1	2.68311E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.98665E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.17108E-1	-7.9813E-1	-9.13205E0	-9.14249E0	4.36306E-3	9.48668E-2	2.73108E1	-3.27017E1	-3.26273E1	2.68394E1	1.20016E-7	2.51752E-3	2.51752E-3	6.31251E-3	2.98213E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17132E-1	-7.98059E-1	-9.13208E0	-9.14276E0	4.52995E-3	9.49621E-2	2.73303E1	-3.26657E1	-3.26368E1	2.6849E1	1.20171E-7	2.51296E-3	2.51296E-3	6.33065E-3	3.00087E-1
