[Scan]
initial_time=2016-01-18T20:03:03
final_time=2016-01-18T20:03:22
ip_count=19
run=1024
dataset=6
scan=423
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.36335E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.94072E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=1.13726E-10
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=-3.66807E-11
mult1=-9.4755E-9
mult2=-2.74656E-9
rf_tmon=-5.40765E-3
rf_agc=3.27568E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.70724E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66803E0
bslens_imon=2.32957E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19909E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.85116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02281E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0431E1
cs_ea1_imon=2.52204E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38936E0
lens1_imon=2.7919E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04212E1
cs_ea2_imon=1.47257E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.94594E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.36518E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.23976E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15213E1
os_ea1_imon=2.35588E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25268E0
cs_ionrep_imon=1.20317E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93649E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.00432E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.38705E-8
tplens_vset=1.4E-1
tplens_vmon=1.67735E0
tplens_imon=-3.5754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.49969E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.55739E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98099E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.02583E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23935E0
ionrepsh_imon=1.78612E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.15669E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54989E0
os_ea2_imon=-8.51161E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.4332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.29337E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.11105E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68343E1
iondef4_imon=1.1072E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.12336E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.9776E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.85623E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.63773E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.59487E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.13368E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.392E0
defgridb_imon=5.88572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.44781E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6667E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=1.00115E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63093E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68317E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60573E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4626E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.56386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99846E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22794E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.10659E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16703E-1	-7.97939E-1	-9.13196E0	-9.14211E0	4.43459E-3	9.50575E-2	2.73369E1	-3.265E1	-3.2623E1	2.68154E1	1.20209E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0148E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16679E-1	-7.9782E-1	-9.13162E0	-9.14257E0	4.69685E-3	9.5129E-2	2.73115E1	-3.27106E1	-3.26173E1	2.6836E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16488E-1	-7.97725E-1	-9.13167E0	-9.14268E0	4.41074E-3	9.49383E-2	2.7329E1	-3.26927E1	-3.26058E1	2.68232E1	1.20293E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.00097E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.1656E-1	-7.97796E-1	-9.13174E0	-9.14257E0	4.41074E-3	9.53436E-2	2.73117E1	-3.26338E1	-3.26362E1	2.68472E1	1.19978E-7	2.5147E-3	2.5147E-3	6.29624E-3	2.99348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16464E-1	-7.98154E-1	-9.13153E0	-9.14278E0	4.55379E-3	9.49383E-2	2.73204E1	-3.26354E1	-3.26868E1	2.68346E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.1687E-1	-7.97844E-1	-9.13193E0	-9.14259E0	4.60148E-3	9.48668E-2	2.73261E1	-3.26891E1	-3.26056E1	2.68267E1	1.198E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16774E-1	-7.97749E-1	-9.13172E0	-9.14249E0	4.50611E-3	9.50813E-2	2.73111E1	-3.265E1	-3.26212E1	2.68425E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16917E-1	-7.97725E-1	-9.132E0	-9.14271E0	4.57764E-3	9.4986E-2	2.72925E1	-3.26681E1	-3.26404E1	2.68442E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16894E-1	-7.9782E-1	-9.13219E0	-9.1429E0	4.8399E-3	9.51529E-2	2.73261E1	-3.2635E1	-3.2629E1	2.68431E1	1.20004E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.97901E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16798E-1	-7.97749E-1	-9.13181E0	-9.14271E0	4.79221E-3	9.4986E-2	2.73129E1	-3.26554E1	-3.26392E1	2.68238E1	1.19554E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.97762E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16798E-1	-7.97987E-1	-9.13188E0	-9.14252E0	4.86374E-3	9.50336E-2	2.73472E1	-3.26452E1	-3.26008E1	2.68623E1	1.19697E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.1687E-1	-7.9782E-1	-9.1316E0	-9.14252E0	4.72069E-3	9.48429E-2	2.73075E1	-3.2644E1	-3.26386E1	2.68304E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16894E-1	-7.98082E-1	-9.13181E0	-9.14254E0	4.8399E-3	9.50575E-2	2.73057E1	-3.26791E1	-3.26266E1	2.68424E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09317E0	-8.16751E-1	-7.97725E-1	-9.13172E0	-9.14247E0	4.673E-3	9.50575E-2	2.73057E1	-3.26585E1	-3.26308E1	2.6825E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-8.1706E-1	-7.98059E-1	-9.13177E0	-9.14245E0	4.36306E-3	9.52721E-2	2.73149E1	-3.26634E1	-3.2637E1	2.68466E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16822E-1	-7.97796E-1	-9.13179E0	-9.14249E0	4.673E-3	9.50336E-2	2.73027E1	-3.26344E1	-3.26627E1	2.68322E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.16774E-1	-7.97772E-1	-9.13172E0	-9.14261E0	4.50611E-3	9.52482E-2	2.73267E1	-3.26585E1	-3.26212E1	2.68286E1	1.19757E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16774E-1	-7.97653E-1	-9.132E0	-9.1424E0	4.52995E-3	9.50813E-2	2.73375E1	-3.26767E1	-3.26036E1	2.68274E1	1.20383E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16798E-1	-7.98154E-1	-9.13208E0	-9.14249E0	5.00679E-3	9.52005E-2	2.73198E1	-3.26797E1	-3.26508E1	2.68472E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02922E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.17013E-1	-7.98178E-1	-9.13219E0	-9.14268E0	4.74453E-3	9.49383E-2	2.73129E1	-3.26675E1	-3.26242E1	2.68343E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
