[Scan]
initial_time=2016-01-18T20:03:56
final_time=2016-01-18T20:04:15
ip_count=19
run=1024
dataset=6
scan=425
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08859E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36245E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.96167E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=8.06928E-11
ql4_vset=
ql4_vmon=-9.14266E0
ql4_imon=-3.20673E-12
mult1=-8.58449E-9
mult2=-2.69665E-9
rf_tmon=-4.59654E-3
rf_agc=3.38623E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.65733E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69643E0
bslens_imon=2.49704E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19541E1
lens5a_imon=1.97614E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53684E1
cs_ef1b_imon=2.85777E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02129E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04893E1
cs_ea1_imon=2.50708E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3522E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64816E1
os_ef1alow_imon=2.98349E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04129E1
cs_ea2_imon=1.51581E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8429E1
cs_ef1a_imon=2.94924E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.35928E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1185E1
os_restr1_imon=4.24771E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15109E1
os_ea1_imon=2.37234E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63447E1
os_ef1bup_imon=3.0734E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23492E0
cs_ionrep_imon=1.18907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93386E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0177E1
cs_anode1_imon=3.00334E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.38021E-8
tplens_vset=1.4E-1
tplens_vmon=1.65479E0
tplens_imon=-2.6266E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.4971E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.53985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.08859E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30108E0
ionrepsh_imon=1.81124E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33747E1
lens5b_imon=2.15592E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.1388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56764E0
os_ea2_imon=-8.65748E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71485E1
cs_ef2a_imon=3.15942E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07013E0
os_ef2alow_imon=-2.66174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.33536E-1
os_ef2bup_imon=-5.20729E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11376E1
os_restr2_imon=3.4276E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29203E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01082E1
cs_anode2_imon=2.25525E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73273E1
iondef1_imon=1.1112E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.10274E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.14898E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.93555E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.64975E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47199E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56464E1
einzel_imon=7.65281E-6
window_vset=0.0E0
window_vmon=2.32792E-1
window_imon=-9.33568E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86046E1
mask2_imon=-6.49431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.63092E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.65758E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.03164E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51603E0
defgridb_imon=6.1232E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.4231E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07556E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66481E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.97853E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63008E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68028E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52209E-2
os_fil2_imon=-2.60686E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83034E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.35457E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35385E-1
cs_fil2_imon=-2.49009E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.72936E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.76449E-1
res40_imon=-2.50605E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16917E-1	-7.98106E-1	-9.13174E0	-9.14302E0	4.57764E-3	9.5129E-2	2.73299E1	-3.26626E1	-3.26366E1	2.6836E1	1.19619E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.98985E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16679E-1	-7.98321E-1	-9.13169E0	-9.14259E0	4.19617E-3	9.4986E-2	2.72984E1	-3.2645E1	-3.26428E1	2.68613E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16798E-1	-7.98249E-1	-9.13193E0	-9.14268E0	4.45843E-3	9.4986E-2	2.73416E1	-3.2655E1	-3.26214E1	2.68285E1	1.19782E-7	2.51886E-3	2.51886E-3	6.30221E-3	3.01485E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16894E-1	-7.98082E-1	-9.13167E0	-9.14292E0	4.50611E-3	9.4986E-2	2.73321E1	-3.26738E1	-3.26152E1	2.68318E1	1.19969E-7	2.52467E-3	2.52467E-3	6.3074E-3	3.01167E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16774E-1	-7.98202E-1	-9.13217E0	-9.14288E0	4.48227E-3	9.52005E-2	2.73333E1	-3.26831E1	-3.26486E1	2.68188E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16703E-1	-7.97772E-1	-9.13205E0	-9.14226E0	4.50611E-3	9.49621E-2	2.73219E1	-3.26368E1	-3.2599E1	2.68412E1	1.19961E-7	2.51819E-3	2.51819E-3	6.3074E-3	3.00381E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.16965E-1	-7.97987E-1	-9.13179E0	-9.14254E0	4.8399E-3	9.53436E-2	2.73081E1	-3.26834E1	-3.25807E1	2.68476E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.16965E-1	-7.98082E-1	-9.13193E0	-9.14218E0	4.52995E-3	9.52721E-2	2.73021E1	-3.26639E1	-3.26266E1	2.6852E1	1.20335E-7	2.51807E-3	2.51807E-3	6.32118E-3	3.02103E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16941E-1	-7.98273E-1	-9.13198E0	-9.14264E0	4.72069E-3	9.49144E-2	2.73145E1	-3.26673E1	-3.26024E1	2.68418E1	1.19913E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.1687E-1	-7.98059E-1	-9.1321E0	-9.14252E0	4.72069E-3	9.51052E-2	2.73381E1	-3.26741E1	-3.2644E1	2.68226E1	1.19595E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00453E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17108E-1	-7.98225E-1	-9.13217E0	-9.14288E0	4.74453E-3	9.5439E-2	2.73098E1	-3.26649E1	-3.26213E1	2.68286E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17037E-1	-7.97939E-1	-9.1321E0	-9.14268E0	4.57764E-3	9.52482E-2	2.73183E1	-3.26543E1	-3.26326E1	2.68226E1	1.19549E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.1706E-1	-7.98368E-1	-9.13193E0	-9.14276E0	4.57764E-3	9.52482E-2	2.73375E1	-3.26608E1	-3.26514E1	2.68298E1	1.19953E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16512E-1	-7.98345E-1	-9.13198E0	-9.14276E0	4.88758E-3	9.53197E-2	2.7361E1	-3.26368E1	-3.26116E1	2.68435E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16989E-1	-7.98249E-1	-9.13191E0	-9.14285E0	4.8399E-3	9.52005E-2	2.73139E1	-3.26231E1	-3.26124E1	2.68232E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.1706E-1	-7.98154E-1	-9.13181E0	-9.14254E0	4.81606E-3	9.50813E-2	2.73369E1	-3.26416E1	-3.2599E1	2.68436E1	1.19646E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16655E-1	-7.98082E-1	-9.13246E0	-9.14278E0	4.673E-3	9.4986E-2	2.73273E1	-3.26482E1	-3.26549E1	2.684E1	1.20174E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16751E-1	-7.97772E-1	-9.13208E0	-9.14285E0	4.57764E-3	9.52005E-2	2.73016E1	-3.26756E1	-3.2629E1	2.6834E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.16751E-1	-7.97796E-1	-9.13193E0	-9.14268E0	4.81606E-3	9.49383E-2	2.73305E1	-3.26567E1	-3.26254E1	2.6829E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16679E-1	-7.97796E-1	-9.13203E0	-9.14266E0	4.86374E-3	9.52005E-2	2.73273E1	-3.26711E1	-3.2635E1	2.68514E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
