[Scan]
initial_time=2016-01-18T20:05:42
final_time=2016-01-18T20:06:02
ip_count=19
run=1024
dataset=6
scan=429
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.36103E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.03509E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=7.056E-11
ql4_vset=
ql4_vmon=-9.14285E0
ql4_imon=-2.84076E-11
mult1=-9.65304E-9
mult2=-2.74285E-9
rf_tmon=-4.00806E-3
rf_agc=3.4194E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.65941E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54196E1
cs_ef1b_imon=2.83559E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04567E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04593E1
cs_ea1_imon=2.51778E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34483E0
lens1_imon=2.69545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64552E1
os_ef1alow_imon=2.98632E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.50091E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84368E1
cs_ef1a_imon=2.92476E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.36201E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11483E1
os_restr1_imon=4.26972E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=2.36664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6296E1
os_ef1bup_imon=3.07797E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21611E0
cs_ionrep_imon=1.20501E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02316E1
cs_anode1_imon=2.98739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20375E0
olens4_imon=3.38127E-8
tplens_vset=1.4E-1
tplens_vmon=1.63907E0
tplens_imon=-1.50232E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2606E1
iondef3_imon=1.51471E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.54267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98126E-4
ql6_vset=1.0E-1
ql6_vmon=9.4676E-2
ql6_imon=4.03644E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=1.80105E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.16561E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74672E1
cs_ef2b_imon=3.15157E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54056E0
os_ea2_imon=-7.76707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71446E1
cs_ef2a_imon=3.15263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07785E0
os_ef2alow_imon=-2.49933E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35954E-1
os_ef2bup_imon=-5.40439E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11312E1
os_restr2_imon=3.4212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0201E1
cs_anode2_imon=2.2383E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7334E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.08371E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.09285E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.96363E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13073E0
cs_ionaccel_imon=-1.66426E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47173E-4
einzel_vset=-2.1E1
einzel_vmon=-2.566E1
einzel_imon=7.87184E-6
window_vset=0.0E0
window_vmon=2.53197E-1
window_imon=-8.1503E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82694E2
mask1_imon=2.39006E-4
mask2_vset=0.0E0
mask2_vmon=-1.86539E1
mask2_imon=-5.31955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.25067E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.98876E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=5.92339E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.44785E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07176E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66367E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=9.98056E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64212E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68086E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-2.77376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79083E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.46104E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35817E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2282E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.52722E-1
res40_imon=-2.66563E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.16727E-1	-7.98059E-1	-9.13205E0	-9.14266E0	4.48227E-3	9.50098E-2	2.73201E1	-3.26506E1	-3.2596E1	2.6833E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99175E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16417E-1	-7.97749E-1	-9.13258E0	-9.1428E0	4.79221E-3	9.52482E-2	2.73231E1	-3.26476E1	-3.26188E1	2.68418E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16631E-1	-7.97892E-1	-9.13229E0	-9.14295E0	4.81606E-3	9.49144E-2	2.73323E1	-3.26388E1	-3.26359E1	2.68322E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98481E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16655E-1	-7.98035E-1	-9.13203E0	-9.14273E0	4.93526E-3	9.4986E-2	2.73273E1	-3.26597E1	-3.265E1	2.6818E1	1.19991E-7	2.51287E-3	2.51287E-3	6.33388E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16584E-1	-7.98154E-1	-9.13215E0	-9.1428E0	4.86374E-3	9.50098E-2	2.73333E1	-3.26753E1	-3.26194E1	2.6852E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16655E-1	-7.98225E-1	-9.13198E0	-9.14259E0	4.72069E-3	9.48906E-2	2.73234E1	-3.2659E1	-3.26254E1	2.68352E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16464E-1	-7.98082E-1	-9.13169E0	-9.14273E0	4.74453E-3	9.49144E-2	2.73134E1	-3.26738E1	-3.26396E1	2.68343E1	1.198E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16751E-1	-7.97796E-1	-9.13205E0	-9.1428E0	4.43459E-3	9.4676E-2	2.73063E1	-3.26729E1	-3.2647E1	2.68569E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16917E-1	-7.98154E-1	-9.13217E0	-9.14245E0	4.79221E-3	9.47475E-2	2.73015E1	-3.26717E1	-3.2614E1	2.68406E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16607E-1	-7.98345E-1	-9.1321E0	-9.1424E0	5.07832E-3	9.49144E-2	2.73346E1	-3.26785E1	-3.26148E1	2.68532E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16441E-1	-7.97987E-1	-9.13219E0	-9.14285E0	4.76837E-3	9.5129E-2	2.73442E1	-3.2647E1	-3.26434E1	2.6843E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16679E-1	-7.98225E-1	-9.13217E0	-9.14304E0	5.07832E-3	9.49621E-2	2.73532E1	-3.26627E1	-3.26212E1	2.68346E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16584E-1	-7.98178E-1	-9.13203E0	-9.14266E0	4.98295E-3	9.49383E-2	2.73473E1	-3.2656E1	-3.2626E1	2.68172E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16631E-1	-7.9844E-1	-9.13217E0	-9.14278E0	4.8399E-3	9.46999E-2	2.73207E1	-3.27017E1	-3.2602E1	2.6846E1	1.19819E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.00144E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16894E-1	-7.98416E-1	-9.13181E0	-9.14278E0	4.91142E-3	9.47952E-2	2.73546E1	-3.26797E1	-3.26248E1	2.68388E1	1.19757E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16655E-1	-7.98249E-1	-9.13169E0	-9.14242E0	4.76837E-3	9.46283E-2	2.73265E1	-3.26548E1	-3.26229E1	2.68508E1	1.20004E-7	2.52815E-3	2.52815E-3	6.32356E-3	3.01995E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.16917E-1	-7.98297E-1	-9.13184E0	-9.14245E0	4.93526E-3	9.47714E-2	2.73204E1	-3.26561E1	-3.26272E1	2.68665E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.00144E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16751E-1	-7.98202E-1	-9.13184E0	-9.14249E0	4.95911E-3	9.45091E-2	2.73311E1	-3.26526E1	-3.26101E1	2.68198E1	1.20106E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.99941E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16965E-1	-7.98178E-1	-9.1315E0	-9.1423E0	4.64916E-3	9.45568E-2	2.73159E1	-3.26915E1	-3.25996E1	2.68484E1	1.198E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16727E-1	-7.98035E-1	-9.13165E0	-9.14285E0	4.79221E-3	9.4676E-2	2.7334E1	-3.26626E1	-3.2606E1	2.68292E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00302E-1
