[Scan]
initial_time=2016-01-18T20:07:02
final_time=2016-01-18T20:07:22
ip_count=19
run=1024
dataset=6
scan=432
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.3581E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.96955E-9
ql3_vset=
ql3_vmon=-9.13239E0
ql3_imon=1.36626E-10
ql4_vset=
ql4_vmon=-9.14266E0
ql4_imon=-3.22342E-11
mult1=-9.42843E-9
mult2=-2.70954E-9
rf_tmon=-5.66765E-3
rf_agc=3.23859E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.68391E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.57865E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.98722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54009E1
cs_ef1b_imon=2.83552E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04451E1
cs_ea1_imon=2.52379E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40205E0
lens1_imon=2.75208E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64655E1
os_ef1alow_imon=2.97557E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.48321E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84377E1
cs_ef1a_imon=2.94012E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.35286E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.25377E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14839E1
os_ea1_imon=2.37195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63722E1
os_ef1bup_imon=3.07461E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01931E1
cs_anode1_imon=3.00059E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.36912E-8
tplens_vset=1.4E-1
tplens_vmon=1.69275E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26201E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26339E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.47714E-2
ql6_imon=4.07609E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30755E0
ionrepsh_imon=1.79822E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3341E1
lens5b_imon=2.16242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74617E1
cs_ef2b_imon=3.13474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55472E0
os_ea2_imon=-7.76707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00456E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.15177E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04819E0
os_ef2alow_imon=-2.52245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.24358E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11228E1
os_restr2_imon=3.43569E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.25932E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73139E1
iondef1_imon=1.10697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68392E1
iondef4_imon=1.09893E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.0603E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.90484E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-1.88648E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56469E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.44329E-1
window_imon=-8.43906E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82668E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86136E1
mask2_imon=-5.65886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.73911E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.6242E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.36039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29335E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.44337E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07318E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66467E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.98905E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62847E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6791E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54716E-2
os_fil2_imon=-2.64023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83706E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.33955E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34146E-1
cs_fil2_imon=-2.40275E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22895E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67894E-1
res40_imon=-2.62324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.1706E-1	-7.98011E-1	-9.13205E0	-9.14276E0	4.57764E-3	9.49144E-2	2.73346E1	-3.26249E1	-3.26666E1	2.68262E1	1.2212E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.16607E-1	-7.97653E-1	-9.13215E0	-9.14261E0	4.33922E-3	9.48906E-2	2.73333E1	-3.26376E1	-3.25917E1	2.68406E1	1.2212E-7	2.52236E-3	2.52236E-3	6.33388E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16631E-1	-7.97725E-1	-9.1321E0	-9.14254E0	4.673E-3	9.50336E-2	2.73364E1	-3.26451E1	-3.26086E1	2.68447E1	1.2212E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00144E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16321E-1	-7.97868E-1	-9.13177E0	-9.14252E0	4.81606E-3	9.46999E-2	2.73718E1	-3.26813E1	-3.26296E1	2.68274E1	1.21356E-7	2.52236E-3	2.52236E-3	6.30212E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.16584E-1	-7.98178E-1	-9.132E0	-9.14283E0	4.8399E-3	9.48668E-2	2.72991E1	-3.26753E1	-3.26554E1	2.6849E1	1.20959E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16274E-1	-7.97892E-1	-9.13198E0	-9.14264E0	4.8399E-3	9.49621E-2	2.73269E1	-3.26614E1	-3.26242E1	2.68198E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16441E-1	-7.97868E-1	-9.13193E0	-9.14283E0	4.52995E-3	9.48429E-2	2.73327E1	-3.26645E1	-3.26116E1	2.68575E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16584E-1	-7.98106E-1	-9.13174E0	-9.14283E0	4.673E-3	9.4986E-2	2.72889E1	-3.26254E1	-3.2617E1	2.68424E1	1.198E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16941E-1	-7.97772E-1	-9.13148E0	-9.14273E0	4.60148E-3	9.4986E-2	2.72841E1	-3.26741E1	-3.26116E1	2.68298E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99348E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.16941E-1	-7.98011E-1	-9.13186E0	-9.14273E0	4.79221E-3	9.48906E-2	2.73063E1	-3.26508E1	-3.26419E1	2.68484E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.1687E-1	-7.98178E-1	-9.13196E0	-9.14264E0	4.8399E-3	9.4676E-2	2.72997E1	-3.2641E1	-3.26386E1	2.68208E1	1.19965E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09302E0	-8.16798E-1	-7.98035E-1	-9.13227E0	-9.14257E0	4.52995E-3	9.46045E-2	2.73128E1	-3.26531E1	-3.26219E1	2.68435E1	1.20226E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.16774E-1	-7.98082E-1	-9.13188E0	-9.14278E0	4.31538E-3	9.46999E-2	2.73339E1	-3.26398E1	-3.26554E1	2.68466E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.1656E-1	-7.97915E-1	-9.13193E0	-9.14242E0	4.55379E-3	9.5129E-2	2.73098E1	-3.26449E1	-3.26531E1	2.68334E1	1.20004E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.99941E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.16727E-1	-7.97629E-1	-9.1321E0	-9.14268E0	4.673E-3	9.47714E-2	2.73466E1	-3.26434E1	-3.2647E1	2.68142E1	1.2033E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.1687E-1	-7.97677E-1	-9.13215E0	-9.14216E0	4.673E-3	9.48191E-2	2.73086E1	-3.26296E1	-3.25853E1	2.68487E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16703E-1	-7.97629E-1	-9.13224E0	-9.14261E0	4.72069E-3	9.44853E-2	2.73261E1	-3.26693E1	-3.26086E1	2.68484E1	1.19851E-7	2.52707E-3	2.52707E-3	6.32356E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16751E-1	-7.97677E-1	-9.1325E0	-9.14266E0	4.79221E-3	9.46522E-2	2.73198E1	-3.26732E1	-3.26319E1	2.68448E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.16798E-1	-7.97486E-1	-9.13217E0	-9.14254E0	4.45843E-3	9.50098E-2	2.73069E1	-3.26404E1	-3.26248E1	2.68388E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-8.16631E-1	-7.97939E-1	-9.13239E0	-9.14266E0	4.62532E-3	9.47714E-2	2.73139E1	-3.26339E1	-3.26201E1	2.68392E1	1.20055E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00966E-1
