[Scan]
initial_time=2016-01-18T20:07:29
final_time=2016-01-18T20:07:48
ip_count=19
run=1024
dataset=6
scan=433
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36338E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.92686E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=9.08256E-11
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=-2.99573E-11
mult1=-9.36486E-9
mult2=-2.75853E-9
rf_tmon=-3.93393E-3
rf_agc=3.38303E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.7122E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19418E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05147E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=2.85584E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04483E1
cs_ea1_imon=2.50903E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35273E0
lens1_imon=2.83336E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.50469E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.94378E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.35391E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.24949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.35727E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=1.20512E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02085E1
cs_anode1_imon=2.98775E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.37523E-8
tplens_vset=1.4E-1
tplens_vmon=1.68529E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26346E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26223E1
iondef2_imon=1.55156E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.9822E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.05483E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=1.79814E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33387E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55792E0
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11376E1
os_restr2_imon=3.43464E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.26395E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73167E1
iondef1_imon=1.11896E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.06899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.10881E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.91844E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.68968E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39005E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.32513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.36982E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.25664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.4373E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66437E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.98059E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63105E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68128E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71858E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.40787E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22804E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25965E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16202E-1	-7.97915E-1	-9.13203E0	-9.1424E0	4.76837E-3	9.44853E-2	2.73381E1	-3.26579E1	-3.26425E1	2.6828E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00453E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.16393E-1	-7.97629E-1	-9.13205E0	-9.14273E0	4.673E-3	9.4676E-2	2.73309E1	-3.26573E1	-3.2638E1	2.68136E1	1.19913E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09294E0	-8.16083E-1	-7.9751E-1	-9.13184E0	-9.14268E0	4.45843E-3	9.49383E-2	2.73157E1	-3.26313E1	-3.26101E1	2.68453E1	1.20122E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00302E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-8.16631E-1	-7.97701E-1	-9.13208E0	-9.14295E0	4.91142E-3	9.46522E-2	2.73195E1	-3.2644E1	-3.2626E1	2.68689E1	1.1979E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-8.16631E-1	-7.97629E-1	-9.13212E0	-9.14295E0	4.81606E-3	9.46522E-2	2.73291E1	-3.26272E1	-3.2608E1	2.68587E1	1.20383E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16631E-1	-7.9782E-1	-9.13193E0	-9.14264E0	4.60148E-3	9.4676E-2	2.73207E1	-3.26657E1	-3.25996E1	2.68274E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.9829E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16798E-1	-7.97749E-1	-9.13203E0	-9.14259E0	4.72069E-3	9.51052E-2	2.73472E1	-3.26711E1	-3.26392E1	2.68448E1	1.20069E-7	2.51116E-3	2.51116E-3	6.29098E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.16536E-1	-7.97844E-1	-9.13203E0	-9.14242E0	4.79221E-3	9.52482E-2	2.73261E1	-3.26807E1	-3.26008E1	2.68334E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09333E0	-8.16703E-1	-7.98178E-1	-9.13205E0	-9.14268E0	4.64916E-3	9.50575E-2	2.73261E1	-3.26633E1	-3.25894E1	2.68352E1	1.20244E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00144E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16727E-1	-7.97606E-1	-9.13215E0	-9.14254E0	4.79221E-3	9.4986E-2	2.73476E1	-3.26402E1	-3.26083E1	2.68292E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16441E-1	-7.97868E-1	-9.13191E0	-9.14273E0	4.79221E-3	9.5129E-2	2.73677E1	-3.26677E1	-3.26034E1	2.68493E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16512E-1	-7.97725E-1	-9.1321E0	-9.14311E0	4.673E-3	9.52959E-2	2.73213E1	-3.26391E1	-3.26316E1	2.6835E1	1.20142E-7	2.51498E-3	2.51498E-3	6.29684E-3	3.00097E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09279E0	-8.1656E-1	-7.97939E-1	-9.13222E0	-9.14288E0	4.36306E-3	9.48906E-2	2.73458E1	-3.26779E1	-3.26514E1	2.68337E1	1.19883E-7	2.51725E-3	2.51725E-3	6.3245E-3	3.01065E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09309E0	-8.16584E-1	-7.98106E-1	-9.13181E0	-9.14273E0	4.45843E-3	9.49144E-2	2.73003E1	-3.26663E1	-3.25888E1	2.68394E1	1.19646E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.02769E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09333E0	-8.16417E-1	-7.98035E-1	-9.1321E0	-9.14311E0	4.26769E-3	9.49621E-2	2.73189E1	-3.26651E1	-3.26164E1	2.68146E1	1.19861E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09317E0	-8.16607E-1	-7.97963E-1	-9.13222E0	-9.14299E0	4.43459E-3	9.50098E-2	2.73357E1	-3.26657E1	-3.2608E1	2.68436E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09317E0	-8.16488E-1	-7.98059E-1	-9.13208E0	-9.14299E0	4.72069E-3	9.50813E-2	2.73098E1	-3.26956E1	-3.25965E1	2.68575E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16488E-1	-7.98059E-1	-9.13229E0	-9.14295E0	4.57764E-3	9.48191E-2	2.73375E1	-3.26508E1	-3.26384E1	2.68204E1	1.20311E-7	2.52815E-3	2.52815E-3	6.29665E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16631E-1	-7.98035E-1	-9.13246E0	-9.14257E0	4.673E-3	9.46045E-2	2.7347E1	-3.2675E1	-3.26089E1	2.68484E1	1.20311E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16679E-1	-7.97963E-1	-9.13224E0	-9.14314E0	4.45843E-3	9.47952E-2	2.73167E1	-3.26223E1	-3.26346E1	2.6801E1	1.19902E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.0148E-1
