[Scan]
initial_time=2016-01-18T20:09:16
final_time=2016-01-18T20:09:35
ip_count=19
run=1024
dataset=6
scan=437
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.36006E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.94867E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=1.38032E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=-4.47869E-11
mult1=-9.40325E-9
mult2=-2.75254E-9
rf_tmon=-4.55448E-3
rf_agc=3.25765E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.6917E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=2.01191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.84287E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=2.5267E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34552E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04087E1
cs_ea2_imon=1.49496E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.35507E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.25526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.36231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.06451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19923E0
cs_ionrep_imon=1.19539E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.98198E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.36155E-8
tplens_vset=1.4E-1
tplens_vmon=1.70091E0
tplens_imon=-4.72384E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03036E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.01878E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30497E0
ionrepsh_imon=1.80859E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52307E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.15893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73255E1
iondef1_imon=1.11284E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.05782E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.91871E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16618E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.89327E-6
window_vset=0.0E0
window_vmon=2.34161E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.58108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.44049E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.43099E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07648E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66319E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.97285E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63309E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68111E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57028E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.61694E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22789E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.37979E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16774E-1	-7.97677E-1	-9.13179E0	-9.14283E0	4.50611E-3	9.52005E-2	2.73299E1	-3.26762E1	-3.26573E1	2.68286E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.96414E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16917E-1	-7.97629E-1	-9.13217E0	-9.1428E0	4.36306E-3	9.54866E-2	2.73357E1	-3.26697E1	-3.26329E1	2.68388E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16965E-1	-7.97915E-1	-9.13217E0	-9.14249E0	4.17233E-3	9.50336E-2	2.73115E1	-3.26492E1	-3.26214E1	2.68673E1	1.19766E-7	2.51581E-3	2.51581E-3	6.34099E-3	2.99879E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16917E-1	-7.9813E-1	-9.13205E0	-9.1428E0	4.00543E-3	9.48191E-2	2.73261E1	-3.26428E1	-3.2629E1	2.68358E1	1.19891E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16941E-1	-7.97725E-1	-9.132E0	-9.14266E0	4.1008E-3	9.48191E-2	2.73196E1	-3.26451E1	-3.26353E1	2.68556E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16846E-1	-7.98011E-1	-9.13208E0	-9.14271E0	4.24385E-3	9.47952E-2	2.72829E1	-3.26897E1	-3.26074E1	2.68603E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16941E-1	-7.97772E-1	-9.13203E0	-9.14297E0	4.33922E-3	9.48906E-2	2.73358E1	-3.26514E1	-3.2659E1	2.68328E1	1.19851E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16703E-1	-7.9782E-1	-9.13241E0	-9.14319E0	4.3869E-3	9.48906E-2	2.73231E1	-3.26362E1	-3.26008E1	2.68502E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16631E-1	-7.98154E-1	-9.13205E0	-9.14302E0	4.36306E-3	9.50336E-2	2.73369E1	-3.26419E1	-3.26383E1	2.68412E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16846E-1	-7.98059E-1	-9.13191E0	-9.14307E0	4.29153E-3	9.50336E-2	2.72945E1	-3.26219E1	-3.26437E1	2.6828E1	1.19653E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02396E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16798E-1	-7.97725E-1	-9.13212E0	-9.14307E0	4.43459E-3	9.49144E-2	2.73087E1	-3.26536E1	-3.2638E1	2.68358E1	1.19809E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.17013E-1	-7.9782E-1	-9.13224E0	-9.14323E0	4.64916E-3	9.48191E-2	2.73375E1	-3.26995E1	-3.25795E1	2.68394E1	1.19757E-7	2.5188E-3	2.5188E-3	6.28552E-3	2.9874E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.17299E-1	-7.97868E-1	-9.13224E0	-9.14319E0	4.62532E-3	9.48906E-2	2.73405E1	-3.26384E1	-3.26514E1	2.68334E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.17204E-1	-7.98297E-1	-9.13236E0	-9.14254E0	4.62532E-3	9.51529E-2	2.73045E1	-3.26807E1	-3.26374E1	2.68593E1	1.19749E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00197E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09333E0	-8.17108E-1	-7.98345E-1	-9.13222E0	-9.14247E0	4.60148E-3	9.49383E-2	2.73299E1	-3.26803E1	-3.26254E1	2.68296E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.17084E-1	-7.97939E-1	-9.13227E0	-9.14271E0	4.50611E-3	9.48429E-2	2.73193E1	-3.26697E1	-3.26189E1	2.68274E1	1.20106E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.0071E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16798E-1	-7.98011E-1	-9.13231E0	-9.14326E0	4.43459E-3	9.4676E-2	2.73177E1	-3.26561E1	-3.26404E1	2.68226E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09317E0	-8.17132E-1	-7.97915E-1	-9.1321E0	-9.14285E0	4.52995E-3	9.46283E-2	2.73228E1	-3.25776E1	-3.25723E1	2.68372E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.97187E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09271E0	-8.17108E-1	-7.97987E-1	-9.13229E0	-9.14292E0	4.43459E-3	9.49144E-2	2.73393E1	-3.26657E1	-3.26086E1	2.68292E1	1.19941E-7	2.51182E-3	2.51182E-3	6.31798E-3	2.99093E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-8.16894E-1	-7.97963E-1	-9.132E0	-9.14309E0	4.19617E-3	9.48191E-2	2.73255E1	-3.265E1	-3.26392E1	2.681E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00041E-1
