[Scan]
initial_time=2016-01-18T20:10:36
final_time=2016-01-18T20:10:55
ip_count=19
run=1024
dataset=6
scan=440
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.36423E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.91494E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=1.11997E-10
ql4_vset=
ql4_vmon=-9.14288E0
ql4_imon=-4.70042E-11
mult1=-1.05515E-8
mult2=-2.72522E-9
rf_tmon=-5.27635E-3
rf_agc=3.42412E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.70385E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67221E0
bslens_imon=2.47744E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19538E1
lens5a_imon=2.01211E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04928E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.84287E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02057E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04327E1
cs_ea1_imon=2.51974E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32826E0
lens1_imon=2.75821E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0379E1
cs_ea2_imon=1.49174E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.93837E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.35469E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.25238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1525E1
os_ea1_imon=2.36101E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19719E0
cs_ionrep_imon=1.20087E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93641E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.99712E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.36411E-8
tplens_vset=1.4E-1
tplens_vmon=1.68885E0
tplens_imon=-4.01394E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26644E1
iondef3_imon=1.49511E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.56549E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.9808E-4
ql6_vset=1.0E-1
ql6_vmon=9.46283E-2
ql6_imon=4.03442E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30326E0
ionrepsh_imon=1.79722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.16447E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53412E0
os_ea2_imon=-6.55959E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.44365E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.28281E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73311E1
iondef1_imon=1.08968E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6898E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.07799E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.92011E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.82331E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.14992E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=6.9473E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45246E0
defgridb_imon=6.08627E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.42654E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06765E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66264E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.97224E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61879E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67913E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61243E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60325E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.227E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.71305E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16631E-1	-7.97963E-1	-9.13219E0	-9.14292E0	4.33922E-3	9.48906E-2	2.7334E1	-3.26732E1	-3.26142E1	2.68286E1	1.19819E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.99879E-1
2.0E0	4.5E1	1.0E0	3.16E2	1.6E2	-2.09364E0	-8.17108E-1	-7.98082E-1	-9.13229E0	-9.14237E0	4.26769E-3	9.48668E-2	2.73207E1	-3.26573E1	-3.26134E1	2.68286E1	1.20062E-7	2.51538E-3	2.51538E-3	6.3074E-3	3.00378E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.17084E-1	-7.97749E-1	-9.13243E0	-9.14254E0	4.19617E-3	9.47237E-2	2.73294E1	-3.26382E1	-3.26324E1	2.68209E1					
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.17323E-1	-7.97868E-1	-9.13246E0	-9.14268E0	4.50611E-3	9.48429E-2	2.73151E1	-3.26885E1	-3.26154E1	2.68279E1	1.20055E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17156E-1	-7.97725E-1	-9.13239E0	-9.1428E0	4.29153E-3	9.4533E-2	2.73415E1	-3.26522E1	-3.26249E1	2.68105E1	1.20092E-7	2.52448E-3	2.52448E-3	6.3074E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17108E-1	-7.97987E-1	-9.13267E0	-9.14283E0	4.17233E-3	9.46045E-2	2.73426E1	-3.26305E1	-3.2626E1	2.68569E1	1.20177E-7	2.51369E-3	2.51369E-3	6.323E-3	3.01485E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.17037E-1	-7.97892E-1	-9.13234E0	-9.1424E0	4.45843E-3	9.49383E-2	2.73069E1	-3.26837E1	-3.2626E1	2.68436E1	1.20337E-7	2.52106E-3	2.52106E-3	6.3016E-3	3.01193E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16846E-1	-7.98154E-1	-9.13262E0	-9.14292E0	4.43459E-3	9.47237E-2	2.73544E1	-3.26482E1	-3.26212E1	2.68382E1	1.20031E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.1687E-1	-7.98154E-1	-9.1325E0	-9.14268E0	4.19617E-3	9.47952E-2	2.73105E1	-3.26567E1	-3.2608E1	2.68556E1	1.19749E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16774E-1	-7.97796E-1	-9.13239E0	-9.14285E0	4.33922E-3	9.47475E-2	2.73193E1	-3.2639E1	-3.26284E1	2.68406E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16846E-1	-7.97892E-1	-9.13224E0	-9.1428E0	4.24385E-3	9.50575E-2	2.73128E1	-3.26738E1	-3.26366E1	2.68435E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16894E-1	-7.9782E-1	-9.13258E0	-9.14271E0	4.55379E-3	9.50813E-2	2.73405E1	-3.2662E1	-3.26449E1	2.68442E1	1.19902E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.16679E-1	-7.9782E-1	-9.13241E0	-9.14266E0	4.52995E-3	9.46522E-2	2.73255E1	-3.26398E1	-3.26298E1	2.68299E1	1.20069E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16631E-1	-7.97987E-1	-9.13196E0	-9.14266E0	4.45843E-3	9.47237E-2	2.73529E1	-3.26809E1	-3.26183E1	2.68534E1	1.19792E-7	2.51886E-3	2.51886E-3	6.32612E-3	3.00494E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16607E-1	-7.97653E-1	-9.13198E0	-9.14295E0	4.43459E-3	9.50336E-2	2.73183E1	-3.26554E1	-3.26236E1	2.68204E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16536E-1	-7.97653E-1	-9.13241E0	-9.14268E0	4.33922E-3	9.49383E-2	2.73261E1	-3.26392E1	-3.26488E1	2.68436E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16655E-1	-7.97939E-1	-9.13258E0	-9.14245E0	4.43459E-3	9.49144E-2	2.73231E1	-3.26518E1	-3.2587E1	2.6834E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00966E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16226E-1	-7.98011E-1	-9.13248E0	-9.14249E0	4.33922E-3	9.45568E-2	2.74797E1	-3.27428E1	-3.25369E1	2.6843E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16154E-1	-7.97772E-1	-9.13236E0	-9.14304E0	4.1008E-3	9.47952E-2	2.72883E1	-3.26512E1	-3.26344E1	2.68514E1	1.19697E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16226E-1	-7.98106E-1	-9.13222E0	-9.14288E0	4.26769E-3	9.46283E-2	2.73311E1	-3.26478E1	-3.26644E1	2.6898E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
