[Scan]
initial_time=2016-01-18T20:11:29
final_time=2016-01-18T20:11:48
ip_count=19
run=1024
dataset=6
scan=442
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08863E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.36441E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.98133E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=6.53982E-11
ql4_vset=
ql4_vmon=-9.14249E0
ql4_imon=-4.50373E-11
mult1=-9.7949E-9
mult2=-2.6723E-9
rf_tmon=-4.62746E-3
rf_agc=3.39639E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.66409E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65062E0
bslens_imon=2.35963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19573E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04986E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54119E1
cs_ef1b_imon=2.85154E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04638E1
cs_ea1_imon=2.52464E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39037E0
lens1_imon=2.76805E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64764E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.50779E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.929E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.35685E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.24537E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.34944E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.06484E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21774E0
cs_ionrep_imon=1.18983E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.99439E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.36246E-8
tplens_vset=1.4E-1
tplens_vmon=1.65161E0
tplens_imon=-3.92439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.50855E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26467E1
iondef2_imon=1.56695E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03042E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.45568E-2
ql6_imon=4.04855E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28963E0
ionrepsh_imon=1.79101E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33524E1
lens5b_imon=2.17615E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74631E1
cs_ef2b_imon=3.13062E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53519E0
os_ea2_imon=-7.66505E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71543E1
cs_ef2a_imon=3.15826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05521E0
os_ef2alow_imon=-2.46324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34184E-1
os_ef2bup_imon=-5.28514E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11149E1
os_restr2_imon=3.43305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.29546E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01906E1
cs_anode2_imon=2.24123E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73364E1
iondef1_imon=1.10395E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68436E1
iondef4_imon=1.09768E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.08013E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.92458E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13922E0
cs_ionaccel_imon=-1.80933E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47366E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56541E1
einzel_imon=7.7073E-6
window_vset=0.0E0
window_vmon=2.39279E-1
window_imon=-9.29676E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39104E-4
mask2_vset=0.0E0
mask2_vmon=-1.86318E1
mask2_imon=-6.88354E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.21486E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.58887E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.14616E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46508E0
defgridb_imon=6.02395E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.42478E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06538E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66432E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.96841E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6293E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67872E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79521E-2
os_fil2_imon=-2.77553E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9017E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5975E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36224E-1
cs_fil2_imon=-2.62632E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.44295E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22783E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03449E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10084E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16727E-1	-7.98035E-1	-9.13246E0	-9.14261E0	4.48227E-3	9.51529E-2	2.73375E1	-3.2677E1	-3.2626E1	2.6814E1	1.19619E-7	2.52222E-3	2.52222E-3	6.33065E-3	3.02025E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16727E-1	-7.97868E-1	-9.13224E0	-9.14288E0	4.43459E-3	9.52005E-2	2.7328E1	-3.26537E1	-3.26297E1	2.68291E1	1.20092E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.03383E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16631E-1	-7.97892E-1	-9.13219E0	-9.14283E0	4.45843E-3	9.51052E-2	2.73184E1	-3.2659E1	-3.26503E1	2.68354E1	1.19795E-7	2.51667E-3	2.51667E-3	6.32684E-3	3.02422E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16774E-1	-7.98106E-1	-9.13246E0	-9.14252E0	4.52995E-3	9.50098E-2	2.73316E1	-3.26762E1	-3.26195E1	2.68394E1	1.20092E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16584E-1	-7.9813E-1	-9.13215E0	-9.14268E0	4.72069E-3	9.47952E-2	2.73093E1	-3.26669E1	-3.26218E1	2.6846E1	1.20069E-7	2.51443E-3	2.51443E-3	6.26371E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16798E-1	-7.98082E-1	-9.13227E0	-9.1429E0	4.29153E-3	9.48191E-2	2.72967E1	-3.26549E1	-3.2617E1	2.68046E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16607E-1	-7.98154E-1	-9.13219E0	-9.14292E0	4.22001E-3	9.47237E-2	2.73252E1	-3.26567E1	-3.26296E1	2.6792E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.16631E-1	-7.98082E-1	-9.13241E0	-9.14273E0	4.1008E-3	9.47714E-2	2.73165E1	-3.26675E1	-3.26068E1	2.68783E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16679E-1	-7.98368E-1	-9.13224E0	-9.14273E0	4.05312E-3	9.46522E-2	2.73105E1	-3.26621E1	-3.26554E1	2.68124E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16631E-1	-7.98273E-1	-9.13229E0	-9.14259E0	4.14848E-3	9.48906E-2	2.7324E1	-3.26549E1	-3.26248E1	2.68412E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16417E-1	-7.98368E-1	-9.13236E0	-9.14278E0	4.24385E-3	9.50336E-2	2.73502E1	-3.26699E1	-3.26338E1	2.68587E1	1.19953E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16321E-1	-7.98035E-1	-9.13181E0	-9.14297E0	4.22001E-3	9.49621E-2	2.73198E1	-3.26627E1	-3.26205E1	2.68274E1	1.19705E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16655E-1	-7.97915E-1	-9.13198E0	-9.14304E0	4.12464E-3	9.5129E-2	2.73341E1	-3.26411E1	-3.26318E1	2.68857E1	1.19872E-7	2.51804E-3	2.51804E-3	6.29624E-3	2.99348E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16655E-1	-7.98035E-1	-9.13205E0	-9.14292E0	4.33922E-3	9.51529E-2	2.73305E1	-3.26608E1	-3.2626E1	2.68499E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.03804E-1
1.8E1	7.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16631E-1	-7.97844E-1	-9.13208E0	-9.14295E0	4.24385E-3	9.53436E-2	2.73393E1	-3.26669E1	-3.26278E1	2.68364E1	1.20042E-7	2.51077E-3	2.51077E-3	6.33388E-3	2.99093E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16798E-1	-7.98249E-1	-9.1321E0	-9.1428E0	4.55379E-3	9.50813E-2	2.73351E1	-3.26458E1	-3.26765E1	2.68388E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97187E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16655E-1	-7.98154E-1	-9.13188E0	-9.14259E0	4.50611E-3	9.47714E-2	2.73315E1	-3.26636E1	-3.26362E1	2.68216E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16536E-1	-7.98321E-1	-9.13205E0	-9.14249E0	4.673E-3	9.48668E-2	2.72662E1	-3.26089E1	-3.26561E1	2.68348E1	1.20132E-7	2.51371E-3	2.51371E-3	6.31586E-3	2.99193E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16655E-1	-7.98154E-1	-9.13205E0	-9.14259E0	4.52995E-3	9.46999E-2	2.73417E1	-3.26561E1	-3.26248E1	2.68376E1	1.19902E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16655E-1	-7.97939E-1	-9.132E0	-9.14249E0	4.45843E-3	9.45568E-2	2.73364E1	-3.26467E1	-3.2639E1	2.68436E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.03449E-1
