[Scan]
initial_time=2016-01-18T20:11:55
final_time=2016-01-18T20:12:15
ip_count=19
run=1024
dataset=6
scan=443
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08856E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.36071E-8
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=1.97349E-9
ql3_vset=
ql3_vmon=-9.13229E0
ql3_imon=1.01388E-10
ql4_vset=
ql4_vmon=-9.14302E0
ql4_imon=-4.08292E-11
mult1=-1.00294E-8
mult2=-2.72859E-9
rf_tmon=-4.14592E-3
rf_agc=3.23602E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.66519E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67455E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.81403E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04662E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04567E1
cs_ea1_imon=2.513E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32209E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.50794E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.93693E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.34937E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.25562E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.36087E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63335E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.21161E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.99063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.35761E-8
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.54651E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98209E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.0637E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=1.77579E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53088E0
os_ea2_imon=-9.84287E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31662E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.44004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.27405E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68502E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.06988E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.90535E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.61191E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82679E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86206E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.65318E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61209E0
defgridb_imon=5.9949E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.42889E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07101E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66192E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.9687E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63627E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6793E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58317E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22749E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.33464E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16703E-1	-7.98082E-1	-9.13222E0	-9.14261E0	4.22001E-3	9.48906E-2	2.73293E1	-3.26561E1	-3.26549E1	2.68615E1	1.20122E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.9874E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16679E-1	-7.97391E-1	-9.13246E0	-9.14276E0	4.33922E-3	9.50098E-2	2.73241E1	-3.26554E1	-3.26395E1	2.68413E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31563E-3	2.98351E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16631E-1	-7.97844E-1	-9.13231E0	-9.14283E0	4.33922E-3	9.50098E-2	2.73393E1	-3.26764E1	-3.26364E1	2.68372E1					
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16965E-1	-7.97915E-1	-9.13234E0	-9.14261E0	4.12464E-3	9.50575E-2	2.73293E1	-3.26461E1	-3.26183E1	2.68262E1	1.1969E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16607E-1	-7.97844E-1	-9.13231E0	-9.14264E0	4.19617E-3	9.46283E-2	2.73358E1	-3.26704E1	-3.26385E1	2.68314E1	1.19749E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.1687E-1	-7.97892E-1	-9.13227E0	-9.14249E0	4.74453E-3	9.48906E-2	2.73213E1	-3.26341E1	-3.26121E1	2.68569E1	1.19831E-7	2.52301E-3	2.52301E-3	6.31779E-3	3.00741E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16822E-1	-7.98035E-1	-9.13217E0	-9.14278E0	4.60148E-3	9.48429E-2	2.732E1	-3.2651E1	-3.26341E1	2.68393E1	1.20092E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.99093E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16941E-1	-7.9782E-1	-9.13212E0	-9.1428E0	4.36306E-3	9.49383E-2	2.73141E1	-3.26284E1	-3.25834E1	2.68563E1	1.19991E-7	2.51744E-3	2.51744E-3	6.33211E-3	2.99552E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.1687E-1	-7.97963E-1	-9.13239E0	-9.14252E0	4.52995E-3	9.48668E-2	2.73213E1	-3.26488E1	-3.26068E1	2.68316E1	1.2033E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17108E-1	-7.97749E-1	-9.13181E0	-9.14288E0	4.41074E-3	9.48668E-2	2.73327E1	-3.26765E1	-3.26482E1	2.68316E1	1.20017E-7	2.51116E-3	2.51116E-3	6.29645E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16703E-1	-7.98297E-1	-9.13205E0	-9.14288E0	4.41074E-3	9.50336E-2	2.73183E1	-3.26494E1	-3.26338E1	2.6837E1	1.19965E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16917E-1	-7.98106E-1	-9.13186E0	-9.1429E0	4.64916E-3	9.49383E-2	2.73033E1	-3.26488E1	-3.26446E1	2.6825E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16917E-1	-7.97963E-1	-9.13234E0	-9.14245E0	4.48227E-3	9.47714E-2	2.72907E1	-3.26819E1	-3.26302E1	2.68418E1	1.19913E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16774E-1	-7.98297E-1	-9.13224E0	-9.14309E0	4.50611E-3	9.50098E-2	2.73346E1	-3.26531E1	-3.26119E1	2.68453E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16798E-1	-7.97963E-1	-9.13239E0	-9.14271E0	4.45843E-3	9.49383E-2	2.73369E1	-3.26627E1	-3.26038E1	2.68412E1	1.20209E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16464E-1	-7.97939E-1	-9.13234E0	-9.14299E0	4.31538E-3	9.46045E-2	2.73183E1	-3.26627E1	-3.2638E1	2.68418E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16464E-1	-7.97701E-1	-9.13236E0	-9.14264E0	4.24385E-3	9.47952E-2	2.7311E1	-3.26644E1	-3.26266E1	2.68526E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.1625E-1	-7.9782E-1	-9.13219E0	-9.14292E0	3.95775E-3	9.47952E-2	2.7324E1	-3.27475E1	-3.26661E1	2.68221E1	1.20055E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16393E-1	-7.97749E-1	-9.13227E0	-9.1428E0	3.93391E-3	9.47237E-2	2.73267E1	-3.26621E1	-3.26188E1	2.68436E1	1.20055E-7	2.52061E-3	2.52061E-3	6.28592E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.1656E-1	-7.97844E-1	-9.13229E0	-9.14302E0	4.22001E-3	9.50575E-2	2.73351E1	-3.26627E1	-3.26428E1	2.68502E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01871E-1
