[Scan]
initial_time=2016-01-18T20:12:22
final_time=2016-01-18T20:12:41
ip_count=19
run=1024
dataset=6
scan=444
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08854E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.37227E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.97885E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=1.4174E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-1.87874E-11
mult1=-1.02822E-8
mult2=-2.71262E-9
rf_tmon=-3.68329E-3
rf_agc=3.38863E-2
counter1=0
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.66218E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64953E0
bslens_imon=2.37777E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19627E1
lens5a_imon=2.01109E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02253E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04847E1
cs_ea1_imon=2.53706E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36215E0
lens1_imon=2.58713E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03745E1
cs_ea2_imon=1.48365E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.94594E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.35442E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.26283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1492E1
os_ea1_imon=2.38169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21537E0
cs_ionrep_imon=1.19936E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93574E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.99928E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.36027E-8
tplens_vset=1.4E-1
tplens_vmon=1.65735E0
tplens_imon=-3.10841E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.49504E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.5549E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03013E2
lens6_imon=2.98085E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.06435E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26312E0
ionrepsh_imon=1.78226E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33701E1
lens5b_imon=2.16939E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56614E0
os_ea2_imon=-6.41408E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.2912E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.10607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.09325E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.909E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.06081E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93757E3
defgrida_imon=6.43273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.42076E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38823E0
defgridb_imon=6.05809E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.43021E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07581E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66197E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.97507E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62942E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67984E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54167E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71122E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22799E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02769E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.04031E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16488E-1	-7.97534E-1	-9.13215E0	-9.14283E0	5.07832E-3	9.50813E-2	2.73051E1	-3.26615E1	-3.2644E1	2.68436E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00942E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16631E-1	-7.97915E-1	-9.13253E0	-9.14285E0	4.86374E-3	9.52721E-2	2.73069E1	-3.26603E1	-3.26506E1	2.68448E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16894E-1	-7.98035E-1	-9.13234E0	-9.14311E0	4.62532E-3	9.47475E-2	2.73381E1	-3.26596E1	-3.26434E1	2.68458E1	1.20069E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16965E-1	-7.98225E-1	-9.13243E0	-9.14323E0	4.50611E-3	9.5129E-2	2.7321E1	-3.2688E1	-3.26242E1	2.68322E1	1.19891E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17084E-1	-7.98273E-1	-9.13215E0	-9.14299E0	4.8399E-3	9.53197E-2	2.73213E1	-3.26534E1	-3.26296E1	2.68482E1	1.19953E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16965E-1	-7.98249E-1	-9.13274E0	-9.14278E0	4.673E-3	9.51529E-2	2.7333E1	-3.26939E1	-3.25875E1	2.68303E1	1.20035E-7	2.5159E-3	2.5159E-3	6.31666E-3	2.99406E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16798E-1	-7.98059E-1	-9.13246E0	-9.1428E0	4.48227E-3	9.49144E-2	2.73484E1	-3.26693E1	-3.2605E1	2.68388E1	1.20204E-7	2.51395E-3	2.51395E-3	6.29365E-3	2.99478E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16703E-1	-7.97987E-1	-9.1325E0	-9.14278E0	4.86374E-3	9.4986E-2	2.73442E1	-3.26825E1	-3.25978E1	2.68286E1	1.19653E-7	2.51771E-3	2.51771E-3	6.26916E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.16774E-1	-7.97963E-1	-9.13222E0	-9.14304E0	4.8399E-3	9.50336E-2	2.73075E1	-3.26512E1	-3.26356E1	2.68226E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.16536E-1	-7.98297E-1	-9.13231E0	-9.14295E0	4.81606E-3	9.49621E-2	2.73216E1	-3.26638E1	-3.26514E1	2.68034E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00302E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16679E-1	-7.98368E-1	-9.13248E0	-9.14316E0	4.50611E-3	9.49144E-2	2.73135E1	-3.2653E1	-3.26362E1	2.68605E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16607E-1	-7.98202E-1	-9.13224E0	-9.14307E0	4.72069E-3	9.48191E-2	2.73116E1	-3.26443E1	-3.26555E1	2.68163E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9714E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.1656E-1	-7.98035E-1	-9.13191E0	-9.14257E0	4.81606E-3	9.48429E-2	2.73228E1	-3.26791E1	-3.25942E1	2.68406E1	1.20226E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.97187E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16798E-1	-7.98082E-1	-9.13215E0	-9.14295E0	4.95911E-3	9.48668E-2	2.73682E1	-3.26689E1	-3.26399E1	2.68424E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.16584E-1	-7.98225E-1	-9.13231E0	-9.14273E0	4.52995E-3	9.48668E-2	2.72892E1	-3.26858E1	-3.26247E1	2.68438E1	1.20042E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.006E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.16894E-1	-7.97868E-1	-9.13191E0	-9.14285E0	4.26769E-3	9.47237E-2	2.73334E1	-3.26396E1	-3.26325E1	2.68154E1	1.20005E-7	2.51874E-3	2.51874E-3	6.29581E-3	3.0286E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16679E-1	-7.98297E-1	-9.132E0	-9.14323E0	4.55379E-3	9.46522E-2	2.7352E1	-3.26735E1	-3.26314E1	2.68316E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16655E-1	-7.98273E-1	-9.13186E0	-9.14237E0	4.81606E-3	9.51529E-2	2.74042E1	-3.27287E1	-3.26006E1	2.68511E1	1.19705E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16822E-1	-7.98082E-1	-9.13212E0	-9.14254E0	4.72069E-3	9.47714E-2	2.73222E1	-3.26425E1	-3.26301E1	2.68334E1	1.20055E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	1.0E0	9.3E2	6.47E2	-2.09472E0	-8.16536E-1	-7.98082E-1	-9.13224E0	-9.14283E0	4.33922E-3	9.49383E-2	2.73261E1	-3.26645E1	-3.26086E1	2.68274E1	1.20106E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.02769E-1
