[Scan]
initial_time=2016-01-18T20:13:15
final_time=2016-01-18T20:13:35
ip_count=19
run=1024
dataset=6
scan=446
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.36992E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.97874E-9
ql3_vset=
ql3_vmon=-9.13243E0
ql3_imon=1.29843E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-2.34604E-11
mult1=-9.921E-9
mult2=-2.83438E-9
rf_tmon=-3.88757E-3
rf_agc=3.40365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.65228E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54001E1
cs_ef1b_imon=2.83566E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.50615E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35814E0
lens1_imon=2.80091E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03594E1
cs_ea2_imon=1.50397E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.92972E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.34433E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=4.27256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14687E1
os_ea1_imon=2.34933E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.05946E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=1.20116E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91973E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02079E1
cs_anode1_imon=2.99676E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.36225E-8
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.51911E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.55661E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98018E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.04066E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27553E0
ionrepsh_imon=1.78083E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34018E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52908E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17479E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04014E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.43644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.03185E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.86632E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-7.05797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.35037E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93763E3
defgrida_imon=6.77718E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.20617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=5.87233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.42156E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07071E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66125E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.9651E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63537E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67601E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80886E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73914E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22771E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15754E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16679E-1	-7.97558E-1	-9.13222E0	-9.14314E0	4.14848E-3	9.51767E-2	2.73635E1	-3.26679E1	-3.26231E1	2.684E1	1.20226E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00824E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.16774E-1	-7.97844E-1	-9.13203E0	-9.14299E0	4.31538E-3	9.5129E-2	2.73285E1	-3.26615E1	-3.26164E1	2.68647E1	1.19891E-7	2.52025E-3	2.52025E-3	6.3445E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16846E-1	-7.97796E-1	-9.13191E0	-9.14297E0	4.62532E-3	9.52005E-2	2.73051E1	-3.26502E1	-3.2613E1	2.68476E1	1.19925E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.00942E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16774E-1	-7.97963E-1	-9.13196E0	-9.14261E0	4.45843E-3	9.5129E-2	2.73322E1	-3.26561E1	-3.26189E1	2.68418E1	1.19749E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16488E-1	-7.98178E-1	-9.13215E0	-9.14292E0	4.50611E-3	9.47952E-2	2.73297E1	-3.265E1	-3.26524E1	2.68298E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16464E-1	-7.97868E-1	-9.13198E0	-9.14254E0	4.24385E-3	9.50813E-2	2.73187E1	-3.26508E1	-3.26378E1	2.68337E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-8.16822E-1	-7.97844E-1	-9.13234E0	-9.14235E0	4.48227E-3	9.46522E-2	2.73412E1	-3.26444E1	-3.26229E1	2.68313E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.16655E-1	-7.97939E-1	-9.13208E0	-9.1429E0	4.45843E-3	9.50098E-2	2.73069E1	-3.26384E1	-3.26166E1	2.68377E1	1.19925E-7	2.52697E-3	2.52697E-3	6.31299E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16846E-1	-7.97749E-1	-9.13162E0	-9.14326E0	4.43459E-3	9.49144E-2	2.72931E1	-3.2638E1	-3.25906E1	2.6825E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.1687E-1	-7.97606E-1	-9.13179E0	-9.14292E0	4.33922E-3	9.4986E-2	2.73285E1	-3.26615E1	-3.26392E1	2.68442E1	1.20106E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.98665E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.16727E-1	-7.97701E-1	-9.13215E0	-9.14316E0	4.48227E-3	9.47952E-2	2.73039E1	-3.26797E1	-3.26384E1	2.68142E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16631E-1	-7.97653E-1	-9.1321E0	-9.14295E0	4.57764E-3	9.50336E-2	2.73345E1	-3.26735E1	-3.26014E1	2.68556E1	1.20069E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16846E-1	-7.97582E-1	-9.13196E0	-9.14266E0	4.43459E-3	9.49144E-2	2.73165E1	-3.26615E1	-3.25972E1	2.6813E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16798E-1	-7.97677E-1	-9.132E0	-9.14276E0	4.64916E-3	9.44853E-2	2.73287E1	-3.26638E1	-3.25953E1	2.68569E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16727E-1	-7.97749E-1	-9.13227E0	-9.14292E0	4.43459E-3	9.45807E-2	2.73222E1	-3.26609E1	-3.26591E1	2.68319E1	1.20209E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.9892E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16464E-1	-7.97915E-1	-9.13229E0	-9.14264E0	4.43459E-3	9.45091E-2	2.7321E1	-3.26366E1	-3.26189E1	2.68406E1	1.19965E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01085E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16798E-1	-7.97796E-1	-9.13239E0	-9.14268E0	4.50611E-3	9.48191E-2	2.73181E1	-3.27015E1	-3.2659E1	2.6828E1	1.19965E-7	2.52538E-3	2.52538E-3	6.34037E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17013E-1	-7.98059E-1	-9.13203E0	-9.14292E0	4.673E-3	9.48429E-2	2.73364E1	-3.26567E1	-3.26307E1	2.68198E1	1.198E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16774E-1	-7.97963E-1	-9.13239E0	-9.1429E0	4.57764E-3	9.48429E-2	2.73302E1	-3.26499E1	-3.26199E1	2.68406E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16774E-1	-7.98082E-1	-9.13243E0	-9.14295E0	4.76837E-3	9.48906E-2	2.73051E1	-3.26518E1	-3.26206E1	2.68316E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00563E-1
