[Scan]
initial_time=2016-01-18T20:14:34
final_time=2016-01-18T20:14:54
ip_count=19
run=1024
dataset=6
scan=449
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.35906E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.9403E-9
ql3_vset=
ql3_vmon=-9.13241E0
ql3_imon=1.37198E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-2.88606E-11
mult1=-9.6561E-9
mult2=-2.79846E-9
rf_tmon=-4.93901E-3
rf_agc=3.30932E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.66618E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.27099E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=1.98523E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.04866E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=2.83674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04411E1
cs_ea1_imon=2.53211E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36174E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.49965E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.95207E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.34647E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11586E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14729E1
os_ea1_imon=2.34573E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=1.18998E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.98054E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.36202E-8
tplens_vset=1.4E-1
tplens_vmon=1.65645E0
tplens_imon=-3.13766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25984E1
iondef3_imon=1.51803E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98108E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.06045E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.78011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.17089E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55071E0
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71594E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.38164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11171E1
os_restr2_imon=3.42383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.28198E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.09204E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.88138E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.49778E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39304E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.31071E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.32295E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=6.83846E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07029E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66282E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.97218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63171E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67753E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67726E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.53575E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22626E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.76711E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16631E-1	-7.97915E-1	-9.13229E0	-9.14264E0	4.3869E-3	9.55343E-2	2.73393E1	-3.26649E1	-3.26189E1	2.68755E1	1.20017E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.98222E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16584E-1	-7.9782E-1	-9.13241E0	-9.14247E0	4.48227E-3	9.51529E-2	2.73235E1	-3.2678E1	-3.26211E1	2.68893E1	1.19851E-7	2.51096E-3	2.51096E-3	6.29665E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16631E-1	-7.97272E-1	-9.1326E0	-9.14237E0	4.1008E-3	9.51529E-2	2.73322E1	-3.26561E1	-3.26278E1	2.68376E1	1.19913E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01085E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16274E-1	-7.97391E-1	-9.13241E0	-9.14292E0	4.05312E-3	9.51767E-2	2.73199E1	-3.26271E1	-3.2638E1	2.68177E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.16464E-1	-7.97606E-1	-9.13229E0	-9.14242E0	4.17233E-3	9.51052E-2	2.73452E1	-3.2668E1	-3.26324E1	2.68458E1	1.20127E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.0223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16417E-1	-7.97677E-1	-9.13246E0	-9.14288E0	4.41074E-3	9.50575E-2	2.73297E1	-3.26554E1	-3.2614E1	2.68388E1	1.20076E-7	2.52029E-3	2.52029E-3	6.3074E-3	3.00479E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16393E-1	-7.97415E-1	-9.13253E0	-9.14285E0	4.52995E-3	9.52482E-2	2.73099E1	-3.26452E1	-3.26158E1	2.68581E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16441E-1	-7.97558E-1	-9.1325E0	-9.14264E0	4.43459E-3	9.52005E-2	2.73051E1	-3.26366E1	-3.26349E1	2.68331E1	1.19653E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16369E-1	-7.9751E-1	-9.13241E0	-9.14302E0	4.48227E-3	9.52005E-2	2.73454E1	-3.26458E1	-3.2611E1	2.68563E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16488E-1	-7.97892E-1	-9.13236E0	-9.1429E0	4.22001E-3	9.50098E-2	2.73216E1	-3.26462E1	-3.26021E1	2.68151E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.16607E-1	-7.97892E-1	-9.13258E0	-9.14273E0	4.02927E-3	9.5129E-2	2.73375E1	-3.26366E1	-3.26349E1	2.6843E1	1.19978E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.01475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16226E-1	-7.97844E-1	-9.13267E0	-9.14285E0	4.17233E-3	9.51052E-2	2.72971E1	-3.26548E1	-3.26181E1	2.68369E1	1.19851E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16512E-1	-7.97939E-1	-9.1325E0	-9.14273E0	4.57764E-3	9.47952E-2	2.73269E1	-3.26673E1	-3.26331E1	2.68366E1	1.2035E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.99613E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16584E-1	-7.97796E-1	-9.13227E0	-9.14297E0	4.43459E-3	9.50575E-2	2.73399E1	-3.26452E1	-3.26633E1	2.68256E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.98665E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16894E-1	-7.97772E-1	-9.13243E0	-9.14268E0	4.17233E-3	9.50575E-2	2.73187E1	-3.26526E1	-3.26154E1	2.68334E1	1.19713E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00144E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16727E-1	-7.98488E-1	-9.1325E0	-9.14302E0	4.24385E-3	9.47952E-2	2.73411E1	-3.26681E1	-3.26122E1	2.68334E1	1.19749E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01738E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16917E-1	-7.97963E-1	-9.1325E0	-9.14297E0	4.29153E-3	9.49621E-2	2.73189E1	-3.26464E1	-3.26536E1	2.68364E1	1.198E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16655E-1	-7.97892E-1	-9.13286E0	-9.14266E0	4.60148E-3	9.47714E-2	2.73764E1	-3.26863E1	-3.26098E1	2.68377E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16751E-1	-7.97892E-1	-9.13239E0	-9.14297E0	4.74453E-3	9.48906E-2	2.73225E1	-3.26663E1	-3.26056E1	2.6837E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16655E-1	-7.97772E-1	-9.13241E0	-9.14295E0	4.45843E-3	9.48191E-2	2.73303E1	-3.26404E1	-3.25984E1	2.6837E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01995E-1
