[Scan]
initial_time=2016-01-18T20:15:01
final_time=2016-01-18T20:15:20
ip_count=19
run=1024
dataset=6
scan=450
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.36764E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.90938E-9
ql3_vset=
ql3_vmon=-9.13217E0
ql3_imon=1.11103E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-5.22733E-11
mult1=-9.39296E-9
mult2=-2.76637E-9
rf_tmon=-6.26148E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.67413E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66621E0
bslens_imon=2.36275E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.82881E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.01909E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04357E1
cs_ea1_imon=2.52521E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34247E0
lens1_imon=2.58927E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64945E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.51117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84622E1
cs_ef1a_imon=2.94053E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.34866E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.26067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.36523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.19192E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.93693E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.9845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.35481E-8
tplens_vset=1.4E-1
tplens_vmon=1.65382E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.56815E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.97985E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.0496E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32938E0
ionrepsh_imon=1.7876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33899E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54764E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.42815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22992E2
cs_ionfoca_imon=6.27663E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02212E1
cs_anode2_imon=2.25362E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.09104E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68163E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.0791E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.89289E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-1.67887E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-6.94985E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.40475E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.37101E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29925E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.44859E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66135E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.98348E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62306E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67753E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.88221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.87019E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22757E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.90236E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16679E-1	-7.97772E-1	-9.13193E0	-9.14311E0	4.26769E-3	9.48191E-2	2.73381E1	-3.26596E1	-3.26413E1	2.68366E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01609E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16607E-1	-7.97701E-1	-9.13208E0	-9.14309E0	4.19617E-3	9.5129E-2	2.7364E1	-3.26639E1	-3.26332E1	2.6828E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16584E-1	-7.98154E-1	-9.13229E0	-9.14297E0	4.19617E-3	9.49621E-2	2.72968E1	-3.26526E1	-3.26478E1	2.68472E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9978E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.16703E-1	-7.97606E-1	-9.13217E0	-9.14295E0	4.41074E-3	9.49144E-2	2.72955E1	-3.26837E1	-3.26182E1	2.6833E1	1.19941E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16512E-1	-7.97462E-1	-9.13241E0	-9.14309E0	4.36306E-3	9.51052E-2	2.73193E1	-3.26508E1	-3.26514E1	2.68353E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16488E-1	-7.97606E-1	-9.13217E0	-9.14309E0	4.1008E-3	9.47475E-2	2.73015E1	-3.26404E1	-3.26188E1	2.6855E1	1.20278E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16679E-1	-7.97558E-1	-9.13212E0	-9.14307E0	4.43459E-3	9.48191E-2	2.73033E1	-3.26364E1	-3.26046E1	2.68456E1	1.2033E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16751E-1	-7.97558E-1	-9.13234E0	-9.14266E0	4.12464E-3	9.47475E-2	2.73345E1	-3.26303E1	-3.2634E1	2.68472E1	1.19925E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.0201E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16345E-1	-7.97749E-1	-9.13212E0	-9.14302E0	4.52995E-3	9.46999E-2	2.73434E1	-3.2663E1	-3.2604E1	2.68311E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16584E-1	-7.97749E-1	-9.13219E0	-9.1428E0	4.81606E-3	9.51529E-2	2.73105E1	-3.26639E1	-3.259E1	2.68382E1	1.19982E-7	2.51862E-3	2.51862E-3	6.3305E-3	3.00234E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16488E-1	-7.97892E-1	-9.13258E0	-9.14295E0	4.55379E-3	9.4986E-2	2.73496E1	-3.26458E1	-3.26038E1	2.68448E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16417E-1	-7.97892E-1	-9.13265E0	-9.14288E0	4.3869E-3	9.5129E-2	2.73153E1	-3.26663E1	-3.26494E1	2.68208E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16584E-1	-7.97439E-1	-9.1325E0	-9.14292E0	4.12464E-3	9.51052E-2	2.73075E1	-3.26657E1	-3.26278E1	2.6825E1	1.19809E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16774E-1	-7.97582E-1	-9.13222E0	-9.14314E0	4.36306E-3	9.5129E-2	2.73387E1	-3.26738E1	-3.26077E1	2.68256E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9874E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16703E-1	-7.97725E-1	-9.13222E0	-9.14299E0	4.31538E-3	9.51529E-2	2.73327E1	-3.26152E1	-3.26621E1	2.68346E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16774E-1	-7.97725E-1	-9.13229E0	-9.14288E0	4.24385E-3	9.49383E-2	2.73098E1	-3.26608E1	-3.2652E1	2.68522E1	1.20311E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16751E-1	-7.97844E-1	-9.13208E0	-9.14302E0	4.64916E-3	9.50813E-2	2.73381E1	-3.26627E1	-3.26446E1	2.68683E1	1.19757E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16727E-1	-7.97701E-1	-9.13234E0	-9.14285E0	4.55379E-3	9.52482E-2	2.73676E1	-3.2635E1	-3.26038E1	2.6819E1	1.19902E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16846E-1	-7.97725E-1	-9.13258E0	-9.14285E0	4.52995E-3	9.52244E-2	2.73346E1	-3.26384E1	-3.2613E1	2.68508E1	1.19809E-7	2.52099E-3	2.52099E-3	6.28006E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16798E-1	-7.97772E-1	-9.13217E0	-9.14283E0	4.36306E-3	9.50575E-2	2.72992E1	-3.26773E1	-3.26242E1	2.68163E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00453E-1
