[Scan]
initial_time=2016-01-18T20:18:07
final_time=2016-01-18T20:18:27
ip_count=19
run=1024
dataset=6
scan=457
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08707E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.3655E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.97777E-9
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=1.23739E-10
ql4_vset=
ql4_vmon=-9.14271E0
ql4_imon=-5.05805E-11
mult1=-9.921E-9
mult2=-2.7765E-9
rf_tmon=-5.31152E-3
rf_agc=3.28709E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.69252E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67903E0
bslens_imon=2.46861E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=2.01277E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53962E1
cs_ef1b_imon=2.82613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02062E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04693E1
cs_ea1_imon=2.53559E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34765E0
lens1_imon=2.66676E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03713E1
cs_ea2_imon=1.51463E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=2.93734E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.34241E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=4.26315E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14935E1
os_ea1_imon=2.37256E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.07566E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24399E0
cs_ionrep_imon=1.191E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.98356E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.34773E-8
tplens_vset=1.4E-1
tplens_vmon=1.61189E0
tplens_imon=-2.21968E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.56782E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.04751E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31525E0
ionrepsh_imon=1.79273E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33837E1
lens5b_imon=2.18728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54062E0
os_ea2_imon=-8.16399E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.15733E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06904E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05919E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11338E1
os_restr2_imon=3.42144E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.28051E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.24368E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73496E1
iondef1_imon=1.09297E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.09824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71774E1
olens3_imon=5.04699E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.86369E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1481E0
cs_ionaccel_imon=-1.66754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47487E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.74344E-6
window_vset=0.0E0
window_vmon=2.57072E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86136E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.56473E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.66787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.30402E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41231E0
defgridb_imon=6.1082E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.42327E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07596E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65909E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=9.95522E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62349E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67608E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69279E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81436E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.38537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.92948E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22721E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67894E-1
res40_imon=-2.57458E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=229
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17132E-1	-7.98011E-1	-9.13177E0	-9.14292E0	4.07696E-3	9.5129E-2	2.73015E1	-3.26735E1	-3.26152E1	2.68502E1	1.19991E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.01356E-1
2.0E0	4.3E1	1.0E0	3.16E2	1.6E2	-2.09426E0	-8.17275E-1	-7.98035E-1	-9.13181E0	-9.1428E0	4.24385E-3	9.5129E-2	2.72914E1	-3.26809E1	-3.26104E1	2.68188E1	1.19861E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.02659E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.1706E-1	-7.98059E-1	-9.132E0	-9.14288E0	4.31538E-3	9.50813E-2	2.73144E1	-3.26724E1	-3.26457E1	2.68447E1	1.19883E-7	2.51498E-3	2.51498E-3	6.3531E-3	3.00251E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.1718E-1	-7.98035E-1	-9.132E0	-9.14273E0	4.48227E-3	9.50575E-2	2.73249E1	-3.26452E1	-3.26356E1	2.6852E1	1.19991E-7	2.51814E-3	2.51814E-3	6.29684E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16751E-1	-7.98082E-1	-9.13234E0	-9.14271E0	4.55379E-3	9.49144E-2	2.73297E1	-3.26789E1	-3.26068E1	2.68442E1	1.20226E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16727E-1	-7.97749E-1	-9.13227E0	-9.14288E0	4.36306E-3	9.48906E-2	2.73729E1	-3.26585E1	-3.26484E1	2.68364E1	1.20017E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16679E-1	-7.97844E-1	-9.13205E0	-9.14311E0	4.50611E-3	9.49621E-2	2.73327E1	-3.26783E1	-3.26038E1	2.68166E1	1.19953E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16751E-1	-7.97892E-1	-9.13184E0	-9.14271E0	4.26769E-3	9.50336E-2	2.73189E1	-3.26741E1	-3.26404E1	2.68508E1	1.19913E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16846E-1	-7.97844E-1	-9.13191E0	-9.14271E0	4.14848E-3	9.49144E-2	2.73249E1	-3.26753E1	-3.26518E1	2.68514E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16631E-1	-7.97868E-1	-9.13186E0	-9.14268E0	4.52995E-3	9.50575E-2	2.73291E1	-3.26717E1	-3.262E1	2.68118E1	1.19653E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16464E-1	-7.97653E-1	-9.13191E0	-9.14285E0	4.41074E-3	9.5129E-2	2.73297E1	-3.2653E1	-3.26128E1	2.68478E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9978E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16655E-1	-7.97772E-1	-9.13198E0	-9.14278E0	4.36306E-3	9.52959E-2	2.73411E1	-3.26729E1	-3.25731E1	2.684E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16512E-1	-7.98178E-1	-9.13191E0	-9.14297E0	4.14848E-3	9.50813E-2	2.73291E1	-3.26837E1	-3.26026E1	2.68267E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16679E-1	-7.97844E-1	-9.13196E0	-9.14302E0	4.07696E-3	9.52005E-2	2.73147E1	-3.26398E1	-3.26404E1	2.68462E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16441E-1	-7.97844E-1	-9.13177E0	-9.14261E0	4.1008E-3	9.53197E-2	2.73411E1	-3.26753E1	-3.26158E1	2.68377E1	1.20069E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16774E-1	-7.98059E-1	-9.13217E0	-9.14278E0	4.02927E-3	9.53913E-2	2.73027E1	-3.26832E1	-3.25841E1	2.6855E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16631E-1	-7.97987E-1	-9.13198E0	-9.14266E0	4.48227E-3	9.53197E-2	2.72991E1	-3.26801E1	-3.26062E1	2.68406E1	1.2033E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.1687E-1	-7.98154E-1	-9.13208E0	-9.14268E0	4.22001E-3	9.52721E-2	2.73461E1	-3.26823E1	-3.26009E1	2.68442E1	1.19809E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16512E-1	-7.98059E-1	-9.13188E0	-9.14261E0	4.57764E-3	9.5129E-2	2.73555E1	-3.26312E1	-3.26654E1	2.68424E1	1.19749E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16464E-1	-7.97987E-1	-9.13198E0	-9.14271E0	4.07696E-3	9.49621E-2	2.73496E1	-3.26332E1	-3.26338E1	2.681E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
